composed of alternated layers or of mixtures of nitrides and oxides or of oxinitrides

Industry

CPC
H01L21/3143

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/3143composed of alternated layers or of mixtures of nitrides and oxides or of oxinitrides

Industries

Patents Grantslast 30 patents

Information Patent Grant
SONOS ONO stack scaling
- Patent number 10,699,901
- Issue date Jun 30, 2020
- LONGITUDE FLASH MEMORY SOLUTIONS LTD.
- Frederick B. Jenne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SONOS ONO stack scaling
- Patent number 9,997,641
- Issue date Jun 12, 2018
- Cypress Semiconductor Corporation
- Fredrick B. Jenne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ZrAION films
- Patent number 9,502,256
- Issue date Nov 22, 2016
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SONOS ONO stack scaling
- Patent number 9,299,568
- Issue date Mar 29, 2016
- Cypress Semiconductor Corporation
- Fredrick Jenne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ZrA1ON films
- Patent number 9,236,245
- Issue date Jan 12, 2016
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nonvolatile semiconductor memory device and manufacturing method th...
- Patent number 9,231,070
- Issue date Jan 5, 2016
- Semiconductor Energy Laboratory Co., Ltd.
- Tetsuya Kakehata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doping with ALD technology
- Patent number 9,139,906
- Issue date Sep 22, 2015
- ASM America, Inc.
- Chang-Gong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ZrAlON films
- Patent number 8,993,455
- Issue date Mar 31, 2015
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for canceling radio frequency interferers (RFI's)...
- Patent number 8,958,468
- Issue date Feb 17, 2015
- Ikanos Communications, Inc.
- Christophe Servaes
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
High dielectric constant transition metal oxide materials
- Patent number 8,791,519
- Issue date Jul 29, 2014
- Micron Technology, Inc.
- Jiutao Li
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Method for manufacturing silicon carbide semiconductor device
- Patent number 8,753,951
- Issue date Jun 17, 2014
- Mitsubishi Electric Corporation
- Toshikazu Tanioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for improved pressure control in horizontal diffusion furnac...
- Patent number 8,662,886
- Issue date Mar 4, 2014
- Micrel, Inc.
- Miles Dudman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Nitridation oxidation of tunneling layer for improved SONOS speed a...
- Patent number 8,637,921
- Issue date Jan 28, 2014
- Cypress Semiconductor Corporation
- Sagy Levy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SONOS ONO stack scaling
- Patent number 8,614,124
- Issue date Dec 24, 2013
- Cypress Semiconductor Corporation
- Fredrick B. Jenne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device having multi-layered...
- Patent number 8,609,543
- Issue date Dec 17, 2013
- Hynix Semiconductor Inc.
- Myung-Ok Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilayer device with organic and inorganic dielectric material
- Patent number 8,587,093
- Issue date Nov 19, 2013
- Hewlett-Packard Development Company, L.P.
- Peter Mardilovich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-temperature dielectric formation for devices with strained germ...
- Patent number 8,580,034
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Gert Leusink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of forming the same
- Patent number 8,569,821
- Issue date Oct 29, 2013
- Samsung Electronics Co., Ltd.
- Sangjin Hyun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor substrate and substrate proce...
- Patent number 8,524,580
- Issue date Sep 3, 2013
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier film and laminated material, container for wrapping and ima...
- Patent number 8,475,929
- Issue date Jul 2, 2013
- Dai Nippon Printing Co., Ltd.
- Minoru Komada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for wet etching while forming interconnect trench in insulat...
- Patent number 8,449,787
- Issue date May 28, 2013
- Fujitsu Limited
- Tadahiro Imada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming silicon-containing materials during a photoexcit...
- Patent number 8,387,557
- Issue date Mar 5, 2013
- Applied Materials
- Kaushal K. Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Light emitting device, semiconductor device, and method of fabricat...
- Patent number 8,390,019
- Issue date Mar 5, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G02 - OPTICS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,324,699
- Issue date Dec 4, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Mitsuhiro Ichijo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stabilization of high-k dielectric materials
- Patent number 8,323,754
- Issue date Dec 4, 2012
- Applied Materials, Inc.
- Christopher Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transistor device and methods of manufacture thereof
- Patent number 8,269,289
- Issue date Sep 18, 2012
- Infineon Technologies AG
- Hongfa Luan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation mask forming method
- Patent number 8,241,512
- Issue date Aug 14, 2012
- Samsung Electronics Co., Ltd.
- Yong-Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation of a silicon oxynitride layer on a high-k dielectric mate...
- Patent number 8,119,210
- Issue date Feb 21, 2012
- Applied Materials, Inc.
- Pravin K. Narwankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
NROM fabrication method
- Patent number 8,106,442
- Issue date Jan 31, 2012
- Spansion Israel Ltd.
- Boaz Eitan
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods of forming semiconductor devices
- Patent number 8,048,787
- Issue date Nov 1, 2011
- Samsung Electronics Co., Ltd.
- Sangjin Hyun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SONOS ONO STACK SCALING
- Publication number 20180351003
- Publication date Dec 6, 2018
- CYPRESS SEMICONDUCTOR CORPORATION
- Fredrick B. Jenne
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SONOS ONO STACK SCALING
- Publication number 20130307052
- Publication date Nov 21, 2013
- CYPRESS SEMICONDUCTOR CORPORATION
- Fredrick JENNE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR WET ETCHING WHILE FORMING INTERCONNECT TRENCH IN INSU...
- Publication number 20130233489
- Publication date Sep 12, 2013
- FUJITSU LIMITED
- Tadahiro IMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME
- Publication number 20120012942
- Publication date Jan 19, 2012
- Sangjin HYUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE
- Publication number 20120009801
- Publication date Jan 12, 2012
- Mitsubishi Electric Corporation
- Toshikazu Tanioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transistor Device and Methods of Manufacture Thereof
- Publication number 20110284970
- Publication date Nov 24, 2011
- INFINEON TECHNOLOGIES AG
- Hongfa Luan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD TH...
- Publication number 20110227139
- Publication date Sep 22, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Tetsuya KAKEHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming a gate insulator in group III-V nitride semicondu...
- Publication number 20110124203
- Publication date May 26, 2011
- Lung-Han Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20110089425
- Publication date Apr 21, 2011
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Mitsuhiro Ichijo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Composition Comprising Rare-earth Dielectric
- Publication number 20110037048
- Publication date Feb 17, 2011
- Translucent, Inc.
- Petar Atanackovic
- C30 - CRYSTAL GROWTH
Information Patent Application
PROCESS OF FORMING AN ELECTRONIC DEVICE INCLUDING INSULATING LAYERS...
- Publication number 20110003444
- Publication date Jan 6, 2011
- FREESCALE SEMICONDUCTOR, INC.
- Paul A. Grudowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS
- Publication number 20100326818
- Publication date Dec 30, 2010
- Canon ANELVA Corporation
- Manabu Ikemoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR IN-CHAMBER PREPROCESSING IN PLASMA NITRIDATION PROCESSIN...
- Publication number 20100239781
- Publication date Sep 23, 2010
- Masaki Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ZrAlON FILMS
- Publication number 20100237403
- Publication date Sep 23, 2010
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device and associated methods of manufacture
- Publication number 20100227479
- Publication date Sep 9, 2010
- Samsung Electronics Co., Ltd.
- Sunjung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DIELECTRIC CONSTANT TRANSITION METAL OXIDE MATERIALS
- Publication number 20100213574
- Publication date Aug 26, 2010
- Micron Technology, Inc.
- Jiutao Li
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Manufacturing method of semiconductor substrate and substrate proc...
- Publication number 20100190348
- Publication date Jul 29, 2010
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rare-earth oxides, rare-earth nitrides, rare-earth phosphides and t...
- Publication number 20100140755
- Publication date Jun 10, 2010
- Translucent, Inc.
- Petar Atanackovic
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME
- Publication number 20100099269
- Publication date Apr 22, 2010
- SAMSUNG ELECTRONICS CO., LTD.
- Sangjin Hyun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SILICON OXIDE FILM, PLASMA PROCESSING APPARATUS...
- Publication number 20100093186
- Publication date Apr 15, 2010
- TOKYO ELECTRON LIMITED
- Takashi Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BARRIER FILM AND LAMINATED MATERIAL, CONTAINER FOR WRAPPING AND IMA...
- Publication number 20100075082
- Publication date Mar 25, 2010
- DAI NIPPON PRINTING CO., LTD.
- Minoru KOMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Forming Tunnel Insulation Layer in Flash Memory Device
- Publication number 20100029091
- Publication date Feb 4, 2010
- Hynix Semiconductor Inc.
- Woo Ri Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...
- Publication number 20100018460
- Publication date Jan 28, 2010
- Applied Materials, Inc.
- Kaushal K. Singh
- C30 - CRYSTAL GROWTH
Information Patent Application
GRADED OXY-NITRIDE TUNNEL BARRIER
- Publication number 20090321809
- Publication date Dec 31, 2009
- Nirmal Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STABLE STRESS DIELECTRIC LAYER
- Publication number 20090315121
- Publication date Dec 24, 2009
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Luona GOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Light Emitting Device, Semiconductor Device, and Method of Fabricat...
- Publication number 20090302339
- Publication date Dec 10, 2009
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- G02 - OPTICS
Information Patent Application
SPUTTERING APPARATUS FOR DEPOSITING A HIGHER PERMITTIVITY DIELECTRI...
- Publication number 20090218217
- Publication date Sep 3, 2009
- Canon ANELVA Corporation
- Sunil Wickramanayaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPING WITH ALD TECHNOLOGY
- Publication number 20090214767
- Publication date Aug 27, 2009
- ASM AMERICA, INC
- Chang-gong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20090203174
- Publication date Aug 13, 2009
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Mitsuhiro Ichijo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD OF IMPROVED PRESSURE CONTROL IN HORIZONTAL DIFFUS...
- Publication number 20090176181
- Publication date Jul 9, 2009
- MICREL, INC.
- Miles DUDMAN
- C30 - CRYSTAL GROWTH

composed of alternated layers or of mixtures of nitrides and oxides or of oxinitrides

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

SONOS ONO stack scaling

SONOS ONO stack scaling

ZrAION films

SONOS ONO stack scaling

ZrA1ON films

Nonvolatile semiconductor memory device and manufacturing method th...

Doping with ALD technology

ZrAlON films

System and method for canceling radio frequency interferers (RFI's)...

High dielectric constant transition metal oxide materials

Method for manufacturing silicon carbide semiconductor device

System for improved pressure control in horizontal diffusion furnac...

Nitridation oxidation of tunneling layer for improved SONOS speed a...

SONOS ONO stack scaling

Method for manufacturing semiconductor device having multi-layered...

Multilayer device with organic and inorganic dielectric material

Low-temperature dielectric formation for devices with strained germ...

Semiconductor devices and methods of forming the same

Manufacturing method of semiconductor substrate and substrate proce...

Barrier film and laminated material, container for wrapping and ima...

Method for wet etching while forming interconnect trench in insulat...

Method for forming silicon-containing materials during a photoexcit...

Light emitting device, semiconductor device, and method of fabricat...

Method for manufacturing semiconductor device

Stabilization of high-k dielectric materials

Transistor device and methods of manufacture thereof

Ion implantation mask forming method

Formation of a silicon oxynitride layer on a high-k dielectric mate...

NROM fabrication method

Methods of forming semiconductor devices

Patents Applicationslast 30 patents

SONOS ONO STACK SCALING

SONOS ONO STACK SCALING

APPARATUS FOR WET ETCHING WHILE FORMING INTERCONNECT TRENCH IN INSU...

SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME

METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE

Transistor Device and Methods of Manufacture Thereof

NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD TH...

Method of forming a gate insulator in group III-V nitride semicondu...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Composition Comprising Rare-earth Dielectric

PROCESS OF FORMING AN ELECTRONIC DEVICE INCLUDING INSULATING LAYERS...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SPUTTERING APPARATUS

METHOD FOR IN-CHAMBER PREPROCESSING IN PLASMA NITRIDATION PROCESSIN...

ZrAlON FILMS

Semiconductor device and associated methods of manufacture

HIGH DIELECTRIC CONSTANT TRANSITION METAL OXIDE MATERIALS

Manufacturing method of semiconductor substrate and substrate proc...

Rare-earth oxides, rare-earth nitrides, rare-earth phosphides and t...

SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME

METHOD FOR FORMING SILICON OXIDE FILM, PLASMA PROCESSING APPARATUS...

BARRIER FILM AND LAMINATED MATERIAL, CONTAINER FOR WRAPPING AND IMA...

Method of Forming Tunnel Insulation Layer in Flash Memory Device

METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCIT...

GRADED OXY-NITRIDE TUNNEL BARRIER

STABLE STRESS DIELECTRIC LAYER

Light Emitting Device, Semiconductor Device, and Method of Fabricat...

SPUTTERING APPARATUS FOR DEPOSITING A HIGHER PERMITTIVITY DIELECTRI...

DOPING WITH ALD TECHNOLOGY

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

SYSTEM AND METHOD OF IMPROVED PRESSURE CONTROL IN HORIZONTAL DIFFUS...