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Connecting electric signal lines from the MEMS device with external electrical signal lines
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Micro-structural technology
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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Connecting electric signal lines from the MEMS device with external electrical signal lines
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Packaging of microfluidic devices and microfluidic integrated syste...
Patent number
11,926,522
Issue date
Mar 12, 2024
Corporation for National Research Initiatives
Michael A. Huff
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Semiconductor device and method of manufacturing semiconductor device
Patent number
11,897,761
Issue date
Feb 13, 2024
Amkor Technology Singapore Holding Pte Ltd.
Ki Yeul Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Electrical contacting and method for producing an electrical contac...
Patent number
11,897,758
Issue date
Feb 13, 2024
Robert Bosch GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Semiconductor device and method for forming the same
Patent number
11,897,759
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Po Chen Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Electrical interconnection structure, electronic apparatus and manu...
Patent number
11,884,536
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Jan 30, 2024
AAC Technologies Pte. Ltd.
Bharadwaja S.N. Shrowthi
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Microelectromechanical system (MEMS) sensor packages and methods fo...
Patent number
11,851,322
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Dec 26, 2023
Infineon Technologies AG
Rainer Markus Schaller
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Integrated piezoelectric microelectromechanical ultrasound transduc...
Patent number
11,847,851
Issue date
Dec 19, 2023
Invensense, Inc.
Julius Ming-Lin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Microfabricated ultrasonic transducers and related apparatus and me...
Patent number
11,828,729
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Nov 28, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Chip package
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11,746,003
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Sep 5, 2023
Xintec Inc.
Tsang-Yu Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Stacked-die MEMS resonator
Patent number
11,708,264
Issue date
Jul 25, 2023
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Microelectromechanical structure with bonded cover
Patent number
11,685,650
Issue date
Jun 27, 2023
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Methods and devices for microelectromechanical resonators
Patent number
11,664,781
Issue date
May 30, 2023
STATHERA IP HOLDINGS INC.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Semiconductor component and method for producing same
Patent number
11,655,143
Issue date
May 23, 2023
Infineon Technologies AG
Mathias Vaupel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS pressure sensor
Patent number
11,579,033
Issue date
Feb 14, 2023
MEI Micro, Inc.
Robert Mark Boysel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Miniaturized vacuum package and methods of making same
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11,551,921
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Jan 10, 2023
National Technology & Engineering Solutions of Sandia, LLC
Hayden James Evans McGuinness
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Semiconductor package with flexible interconnect
Patent number
11,542,152
Issue date
Jan 3, 2023
STMicroelectronics, Inc.
Jefferson Talledo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Electronic device and method for manufacturing an electronic device
Patent number
11,492,250
Issue date
Nov 8, 2022
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Hermetic conductive feedthroughs for a semiconductor wafer
Patent number
11,485,670
Issue date
Nov 1, 2022
Medtronic, Inc.
David A. Ruben
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Packaging structure and packaging method for retinal prosthesis imp...
Patent number
11,478,654
Issue date
Oct 25, 2022
HANGZHOU NANOCHAP ELECTRONICS CO., LTD.
Jiawei Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Methods and devices for microelectromechanical resonators
Patent number
11,479,460
Issue date
Oct 25, 2022
STATHERA IP HOLDINGS INC.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Inter-poly connection for parasitic capacitor and die size improvement
Patent number
11,407,636
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Aug 9, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Shyh-Wei Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS transducing apparatus and method of fabricating the same
Patent number
11,401,159
Issue date
Aug 2, 2022
FORMOSA MATERIAL INDUSTRIAL CORP.
Chun-Lung Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Sensor packages
Patent number
11,401,158
Issue date
Aug 2, 2022
ATLANTIC INERTIAL SYSTEMS, LIMITED
Henry Thomas
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Sound producing package structure and method for packaging sound pr...
Patent number
11,395,073
Issue date
Jul 19, 2022
xMEMS Labs, Inc.
Hai-Hung Wen
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Method for manufacturing a MEMS sensor
Patent number
11,390,519
Issue date
Jul 19, 2022
Robert Bosch GmbH
Sebastian Schuler-Watkins
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Semiconductor devices and related methods
Patent number
11,383,970
Issue date
Jul 12, 2022
Amkor Technology Singapore Holding Pte Ltd.
Sung Jae Oh
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Stacked-die MEMS resonator
Patent number
11,370,656
Issue date
Jun 28, 2022
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Method for producing MEMS transducer, MEMS transducer, ultrasound p...
Patent number
11,369,345
Issue date
Jun 28, 2022
Konica Minolta, Inc.
Yuta Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Semiconductor device and method of forming microelectromechanical s...
Patent number
11,370,655
Issue date
Jun 28, 2022
STATS ChipPAC Pte. Ltd.
Yaojian Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Semiconductor device and method of manufacturing semiconductor device
Patent number
11,352,252
Issue date
Jun 7, 2022
Amkor Technology Singapore Holding Pte Ltd.
Ki Yeul Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20240140782
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing company Ltd.
PO CHEN YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
PACKAGED CAVITY STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240116752
Publication date
Apr 11, 2024
Zhuhai ACCESS Semiconductor Co., Ltd
Xianming CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
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METHOD FOR SEALING A MEMS DEVICE AND A SEALED MEMS DEVICE
Publication number
20240116753
Publication date
Apr 11, 2024
Murata Manufacturing Co., Ltd.
Antti IIHOLA
B81 - MICRO-STRUCTURAL TECHNOLOGY
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MICROFABRICATED ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND ME...
Publication number
20240044846
Publication date
Feb 8, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS Structure with Reduced Peeling and Methods Forming the Same
Publication number
20240034619
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Pei-Wei Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICROMECHANICAL STRUCTURE WITH BONDED COVER
Publication number
20240002218
Publication date
Jan 4, 2024
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS PRESSURE SENSOR
Publication number
20230417614
Publication date
Dec 28, 2023
MEI Micro, Inc.
Robert Mark Boysel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20230399225
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing company Ltd.
PO CHEN YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
STACKED-DIE MEMS RESONATOR
Publication number
20230391611
Publication date
Dec 7, 2023
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
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PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF
Publication number
20230314197
Publication date
Oct 5, 2023
Applied Materials, Inc.
Arvinder Manmohan Singh Chadha
B81 - MICRO-STRUCTURAL TECHNOLOGY
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METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
Publication number
20230308076
Publication date
Sep 28, 2023
Stathera IP Holdings Inc.
Vamsy P. Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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TECHNIQUES TO ENABLE A FLIP CHIP UNDERFILL EXCLUSION ZONE
Publication number
20230207412
Publication date
Jun 29, 2023
Intel Corporation
Ronald SPREITZER
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
STACKED DIE PACKAGE AND METHODS OF FORMING THE SAME
Publication number
20230163103
Publication date
May 25, 2023
Qorvo US, Inc.
Julio C. Costa
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
SOC PMUT SUITABLE FOR HIGH-DENSITY SYSTEM INTEGRATION, ARRAY CHIP,...
Publication number
20230060728
Publication date
Mar 2, 2023
NANJING SHENGXI XINYING TECHNOLOGY CO., LTD
Hui LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Wafer level package for device
Publication number
20230050181
Publication date
Feb 16, 2023
Teknologian Tutkimuskeskus VTT Oy
Jae-Wung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
Publication number
20230051438
Publication date
Feb 16, 2023
Stathera IP Holdings Inc.
Vamsy Chodavarapu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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PACKAGING STRUCTURES AND PACKAGING METHODS FOR ULTRASOUND-ON-CHIP D...
Publication number
20230034707
Publication date
Feb 2, 2023
BFLY Operations, Inc
Jianwei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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SEMICONDUCTOR DEVICES AND RELATED METHODS
Publication number
20230002217
Publication date
Jan 5, 2023
Amkor Technology Singapore Holding Pte. Ltd.
Sung Jae Oh
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
STACKED-DIE MEMS RESONATOR
Publication number
20220356059
Publication date
Nov 10, 2022
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
INTER-POLY CONNECTION FOR PARASITIC CAPACITOR AND DIE SIZE IMPROVEMENT
Publication number
20220348454
Publication date
Nov 3, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Shyh-Wei Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
SENSING DEVICE AND METHOD FOR MANUFACTURING SENSING DEVICE
Publication number
20220315413
Publication date
Oct 6, 2022
MITSUMI ELECTRIC CO., LTD.
Etsuji HAYAKAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20220298008
Publication date
Sep 22, 2022
Amkor Technology Singapore Holding Pte. Ltd.
Ki Yeul YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Semiconductor Device and Method of Forming Microelectromechanical S...
Publication number
20220289560
Publication date
Sep 15, 2022
STATS ChipPAC Pte Ltd.
Yaojian Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Device for Supporting MEMS and/or ASIC Components
Publication number
20220250902
Publication date
Aug 11, 2022
TE Connectivity Solutions GmbH
Ismael Brunner
B81 - MICRO-STRUCTURAL TECHNOLOGY
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CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20220219970
Publication date
Jul 14, 2022
XINTEC INC.
Tsang-Yu LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
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PRESSURE SENSOR AND PACKAGING METHOD THEREOF
Publication number
20220178773
Publication date
Jun 9, 2022
FATRI UNITED TESTING & CONTROL (QUANZHOU) TECHNOLOGIES CO., LTD.
Yongzhong NIE
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...
Publication number
20220172506
Publication date
Jun 2, 2022
InvenSense, Inc.
Julius Ming-Lin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
ELECTRICAL INTERCONNECTION STRUCTURE, ELECTRONIC APPARATUS AND MANU...
Publication number
20220127138
Publication date
Apr 28, 2022
AAC TECHNOLOGIES (NANJING) CO., LTD.
Bharadwaja S.N. SHROWTHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING SAME
Publication number
20220112076
Publication date
Apr 14, 2022
Ningbo Semiconductor International Corporation (Shanghai Branch)
Xiaoshan QIN
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MEMS ENCAPSULATION STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20220112077
Publication date
Apr 14, 2022
Ningbo Semiconductor International Corporation (Shanghai Branch)
Xiaoshan QIN
B81 - MICRO-STRUCTURAL TECHNOLOGY