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Micro-structural technology
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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Manufacture or treatment of devices or systems in or on a substrate
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B81C1/00325
for reducing stress inside of the package structure
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Patents Grants
last 30 patents
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Patent Grant
Polyamic acid composition for packaging electronic components, and...
Patent number
12,139,581
Issue date
Nov 12, 2024
PI Advanced Materials Co., Ltd.
Ik Sang Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor devices with gas-permeable cover and associated production m...
Patent number
12,122,667
Issue date
Oct 22, 2024
Infineon Technologies AG
Rainer Markus Schaller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having decreased contact resistance
Patent number
12,077,431
Issue date
Sep 3, 2024
Qorvo US, Inc.
Shibajyoti Ghosh Dastider
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a sensor device and moulding support structure
Patent number
12,024,418
Issue date
Jul 2, 2024
Melexis Technologies NV
Appolonius Jacobus Van Der Wiel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication method for a MEMS device
Patent number
12,017,909
Issue date
Jun 25, 2024
Imec VZW
Deniz Sabuncuoglu Tezcan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stress isolated device package and method of manufacture
Patent number
12,012,328
Issue date
Jun 18, 2024
NXP USA, INC.
Chad Dawson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stress-isolated MEMS device comprising substrate having cavity and...
Patent number
11,981,560
Issue date
May 14, 2024
Analog Devices, Inc.
Xin Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor device having an ASIC chip integrated into a...
Patent number
11,906,383
Issue date
Feb 20, 2024
Robert Bosch GmbH
Stefan Pinter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mems device having a rugged package and fabrication process thereof
Patent number
11,873,215
Issue date
Jan 16, 2024
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Support structure for MEMS device with particle filter
Patent number
11,807,521
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor devices with gas-permeable cover and associated production m...
Patent number
11,795,053
Issue date
Oct 24, 2023
Infineon Technologies AG
Rainer Markus Schaller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS assembly substrates including a bond layer
Patent number
11,787,690
Issue date
Oct 17, 2023
Knowles Electronics, LLC
Sung Bok Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low-stress packaging structure for MEMS acceleration sensor chip
Patent number
11,780,727
Issue date
Oct 10, 2023
Zhejiang University
Lufeng Che
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device built using the BEOL metal layers of a solid state semi...
Patent number
11,780,725
Issue date
Oct 10, 2023
Nanusens SL
Josep Montanyà Silvestre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS stress reduction structure embedded into package
Patent number
11,760,627
Issue date
Sep 19, 2023
Invensense, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device and method for manufacturing mems device
Patent number
11,753,296
Issue date
Sep 12, 2023
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with dummy-area utilization for pressure enhancement
Patent number
11,713,242
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Surface micromechanical element and method for manufacturing the same
Patent number
11,697,586
Issue date
Jul 11, 2023
Teknologian tutkimuskeskus VTT Oy
Aarne Oja
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a sensor device and moulding support structure
Patent number
11,655,142
Issue date
May 23, 2023
Melexis Technologies NV
Appolonius Jacobus Van Der Wiel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS vibrator and MEMS oscillator
Patent number
11,655,145
Issue date
May 23, 2023
Kaneka Corporation
Junji Sone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Particle filter for MEMS device
Patent number
11,649,162
Issue date
May 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Reducing delamination in sensor package
Patent number
11,584,638
Issue date
Feb 21, 2023
Invensense, Inc.
Efren Lacap
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package structures and methods of manufacturing the same
Patent number
11,565,934
Issue date
Jan 31, 2023
Advanced Semiconductor Engineering, Inc.
Yu-Hsuan Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package with flexible interconnect
Patent number
11,542,152
Issue date
Jan 3, 2023
STMicroelectronics, Inc.
Jefferson Talledo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device packages and methods of manufacturing the same
Patent number
11,524,890
Issue date
Dec 13, 2022
Advanced Semiconductor Engineering, Inc.
Yung-Hsing Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing micromechanical diaphragm sensors
Patent number
11,519,803
Issue date
Dec 6, 2022
Robert Bosch GmbH
Arne Dannenberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structures for packaging stress-sensitive micro-electro-mechanical...
Patent number
11,498,831
Issue date
Nov 15, 2022
Texas Instruments Incorporated
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package structure and method for manufacturing the same
Patent number
11,427,466
Issue date
Aug 30, 2022
Advanced Semiconductor Engineering, Inc.
Wei-Wei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package, MEMS microphone and method of manufacturing the MEMS...
Patent number
11,350,220
Issue date
May 31, 2022
SAE Magnetics (H. K.) Ltd.
Masashi Shiraishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mems device built using the BEOL metal layers of a solid state semi...
Patent number
11,312,617
Issue date
Apr 26, 2022
Nanusens SL
Josep Montanyà Silvestre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DIES EMBEDDED IN GLASS CORES
Publication number
20240327201
Publication date
Oct 3, 2024
Intel Corporation
Numair Ahmed
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LENS AND EYEWEAR
Publication number
20240286891
Publication date
Aug 29, 2024
HS Vision Ltd.
Alexander MacDonald
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESS ISOLATION PROCESS
Publication number
20240253979
Publication date
Aug 1, 2024
Analog Devices, Inc.
Xin Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR DEVICES WITH GAS-PERMEABLE COVER AND ASSOCIATED PRODUCTION M...
Publication number
20240002217
Publication date
Jan 4, 2024
INFINEON TECHNOLOGIES AG
Rainer Markus SCHALLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
Publication number
20230406693
Publication date
Dec 21, 2023
Nanusens SL
Josep Montanyà Silvestre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A SENSOR DEVICE AND MOULDING SUPPORT STRUCTURE
Publication number
20230249962
Publication date
Aug 10, 2023
MELEXIS TECHNOLOGIES NV
Appolonius Jacobus VAN DER WIEL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A DETECTION DEVICE COMPRISING A PERIPHERAL...
Publication number
20230213389
Publication date
Jul 6, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Geoffroy DUMONT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING
Publication number
20230126914
Publication date
Apr 27, 2023
TEXAS INSTRUMENTS INCORPORATED
Jane Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS STRESS REDUCTION STRUCTURE EMBEDDED INTO PACKAGE
Publication number
20220396472
Publication date
Dec 15, 2022
InvenSense, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESS ISOLATED DEVICE PACKAGE AND METHOD OF MANUFACTURE
Publication number
20220348456
Publication date
Nov 3, 2022
NXP USA, Inc.
Chad Dawson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE HAVING DECREASED CONTACT RESISTANCE
Publication number
20220289565
Publication date
Sep 15, 2022
Qorvo US, Inc.
Shibajyoti Ghosh Dastider
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE HAVING A RUGGED PACKAGE AND FABRICATION PROCESS THEREOF
Publication number
20220185661
Publication date
Jun 16, 2022
STMicroelectronics S.r.l.
Enri DUQI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH DUMMY-AREA UTILIZATION FOR PRESSURE ENHANCEMENT
Publication number
20220063994
Publication date
Mar 3, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
REDUCING DELAMINATION IN SENSOR PACKAGE.
Publication number
20220033252
Publication date
Feb 3, 2022
Efren Lacap
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
POLYAMIC ACID COMPOSITION FOR PACKAGING ELECTRONIC COMPONENTS, AND...
Publication number
20220010070
Publication date
Jan 13, 2022
PI Advanced Materials Co., Ltd.
Ik Sang Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
POLYAMIC ACID COMPOSITION FOR PACKAGING ELECTRONIC COMPONENTS, AND...
Publication number
20220002489
Publication date
Jan 6, 2022
PI Advanced Materials Co., Ltd.
Gyeong Hyeon Ro
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESS-ISOLATED MEMS DEVICE COMPRISING SUBSTRATE HAVING CAVITY AND...
Publication number
20210380403
Publication date
Dec 9, 2021
Analog Devices, Inc.
Xin Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD
Publication number
20210348976
Publication date
Nov 11, 2021
ROBERT BOSCH GmbH
Stefan Pinter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR DEVICES WITH GAS-PERMEABLE COVER AND ASSOCIATED PRODUCTION M...
Publication number
20210323812
Publication date
Oct 21, 2021
INFINEON TECHNOLOGIES AG
Rainer Markus SCHALLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER
Publication number
20210238030
Publication date
Aug 5, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Package, MEMS Microphone and Method of Manufacturing the MEMS...
Publication number
20210227334
Publication date
Jul 22, 2021
SAE Magnetics (H.K.) Ltd.
Masashi Shiraishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PACKAGE STRUCTURES AND METHODS OF MANUFACTURING THE SAME
Publication number
20210206628
Publication date
Jul 8, 2021
Advanced Semiconductor Engineering, Inc.
Yu-Hsuan TSAI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
Publication number
20210206624
Publication date
Jul 8, 2021
Nanusens SL
Josep Montanyà Silvestre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE PACKAGES AND METHODS OF MANUFACTURING THE SAME
Publication number
20210130165
Publication date
May 6, 2021
Advanced Semiconductor Engineering, Inc.
Yung-Hsing CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FABRICATION METHOD FOR A MEMS DEVICE
Publication number
20210061652
Publication date
Mar 4, 2021
IMEC vzw
Deniz SABUNCUOGLU TEZCAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PARTICLE FILTER FOR MEMS DEVICE
Publication number
20210047175
Publication date
Feb 18, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUPPORT STRUCTURE FOR MEMS DEVICE WITH PARTICLE FILTER
Publication number
20210047176
Publication date
Feb 18, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PACKAGE WITH FLEXIBLE INTERCONNECT
Publication number
20210032098
Publication date
Feb 4, 2021
STMICROELECTRONICS, INC.
Jefferson TALLEDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20210017018
Publication date
Jan 21, 2021
Advanced Semiconductor Engineering, Inc.
Wei-Wei LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Surface micromechanical element and method for manufacturing the same
Publication number
20210002127
Publication date
Jan 7, 2021
Teknologian Tutkimuskeskus VTT Oy
Aarne Oja
B81 - MICRO-STRUCTURAL TECHNOLOGY