Maintaining a critical distance between the structures to be released

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B81C1/00944

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/00944Maintaining a critical distance between the structures to be released

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micro-electro-mechanical system (MEMS) thermal sensor
- Patent number 11,796,396
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) thermal sensor
- Patent number 10,962,424
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,870,574
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,273,143
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for producing an electromechanical device
- Patent number 10,112,827
- Issue date Oct 30, 2018
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Vincent Agache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Oxide retainer method for MEMS devices
- Patent number 8,993,362
- Issue date Mar 31, 2015
- MCube Inc.
- Anthony F. Flannery
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process of forming a microphone using support member
- Patent number 8,828,773
- Issue date Sep 9, 2014
- Invensense, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro electronic mechanical system structure
- Patent number 8,502,328
- Issue date Aug 6, 2013
- Maxchip Electronics Corp.
- Tsai-Chiang Nieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electret condenser
- Patent number 8,320,589
- Issue date Nov 27, 2012
- Panasonic Corporation
- Tohru Yamaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process of forming a microphone using support member
- Patent number 8,309,386
- Issue date Nov 13, 2012
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro electronic mechanical system structure
- Patent number 8,163,583
- Issue date Apr 24, 2012
- Maxchip Electronics Corp.
- Tsai-Chiang Nieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pre-released structure device
- Patent number 8,138,556
- Issue date Mar 20, 2012
- Commissariat a l'Energie Atomique
- Stéphane Caplet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electret condenser
- Patent number 7,853,027
- Issue date Dec 14, 2010
- Panasonic Corporation
- Tohru Yamaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro electro-mechanical system and method of manufacturing the same
- Patent number 7,829,365
- Issue date Nov 9, 2010
- Oki Semiconductor Co., Ltd.
- Makiko Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS element having a dummy pattern
- Patent number 7,723,822
- Issue date May 25, 2010
- Kabushiki Kaisha Toshiba
- Satoshi Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process of forming a microphone using support member
- Patent number 7,449,356
- Issue date Nov 11, 2008
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method of providing a regenerating protective coating in...
- Patent number 7,446,926
- Issue date Nov 4, 2008
- IDC, LLC
- Jeffrey B. Sampsell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for MEMS device nebulizer lubrication system
- Patent number 7,264,179
- Issue date Sep 4, 2007
- Texas Instruments Incorporated
- Roger A. Robbins
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making a SOI silicon structure
- Patent number 7,160,751
- Issue date Jan 9, 2007
- Delphi Technologies, Inc.
- Dan W. Chilcott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for MEMS device nebulizer lubrication system
- Patent number 6,921,680
- Issue date Jul 26, 2005
- Texas Instruments Incorporated
- Roger A. Robbins
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface micromachining using a thick release process
- Patent number 6,531,332
- Issue date Mar 11, 2003
- Parvenu, Inc.
- Andrei M Shkel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of HF vapor release of microstructures
- Patent number 6,238,580
- Issue date May 29, 2001
- The Aerospace Corporation
- Robert C. Cole
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for a micromechanical component with a movable st...
- Patent number 5,817,539
- Issue date Oct 6, 1998
- Siemens Aktiengesellschaft
- Wolfgang Werner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a structure with a useful layer held at a...
- Patent number 5,750,420
- Issue date May 12, 1998
- Commissariat a l'Energie Atomique
- Hubert Bono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component with a switch element as a movable struct...
- Patent number 5,637,904
- Issue date Jun 10, 1997
- Siemens Aktiengesellschaft
- Thomas Zettler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating microstructures using temporary bridges
- Patent number 5,364,497
- Issue date Nov 15, 1994
- Analog Devices, Inc.
- Kevin H. L. Chau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive surface micromachined differential pressure sensor
- Patent number 5,332,469
- Issue date Jul 26, 1994
- Ford Motor Company
- Carlos H. Mastrangelo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dry-release method for sacrificial layer microstructure fabrication
- Patent number 5,258,097
- Issue date Nov 2, 1993
- Ford Motor Company
- Carlos H. Mastrangelo
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Micro-Electro-Mechanical System (Mems) Thermal Sensor
- Publication number 20230375416
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYTEM (MEMS) THERMAL SENSOR
- Publication number 20210215550
- Publication date Jul 15, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) THERMAL SENSOR
- Publication number 20200103290
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...
- Publication number 20190241425
- Publication date Aug 8, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR PRODUCING AN ELECTROMECHANICAL DEVICE
- Publication number 20180148328
- Publication date May 31, 2018
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Vincent AGACHE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process of Forming a Microphone Using Support Member
- Publication number 20130065344
- Publication date Mar 14, 2013
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE
- Publication number 20120153469
- Publication date Jun 21, 2012
- MAXCHIP ELECTRONICS CORP.
- Tsai-Chiang Nieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE AND MANUFACTURING METH...
- Publication number 20110169106
- Publication date Jul 14, 2011
- MAXCHIP ELECTRONICS CORP.
- Tsai-Chiang Nieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRET CONDENSER
- Publication number 20110044480
- Publication date Feb 24, 2011
- PANASONIC CORPORATION
- Tohru Yamaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRE-RELEASED STRUCTURE DEVICE
- Publication number 20090261431
- Publication date Oct 22, 2009
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Stephane Caplet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process of Forming a Microphone Using Support Member
- Publication number 20090029501
- Publication date Jan 29, 2009
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro electro-mechanical system and method of manufacturing the same
- Publication number 20080224319
- Publication date Sep 18, 2008
- Oki Electric Industry Co., Ltd.
- Makiko Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of fabricating microstructures
- Publication number 20080200029
- Publication date Aug 21, 2008
- Sungkyunkwan University
- Joontae Song
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electret condenser
- Publication number 20070189555
- Publication date Aug 16, 2007
- Tohru Yamaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microstructure manufacturing method and microstructure
- Publication number 20070172988
- Publication date Jul 26, 2007
- FUJITSU LIMITED
- Tadashi Nakatani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process of Forming a Microphone Using Support Member
- Publication number 20070092983
- Publication date Apr 26, 2007
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS element and manufacturing method
- Publication number 20070069342
- Publication date Mar 29, 2007
- Kabushiki Kaisha Toshiba
- Satoshi Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MAKING A SOI SILICON STRUCTURE
- Publication number 20060281214
- Publication date Dec 14, 2006
- Dan W. Chilcott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS release methods
- Publication number 20060234412
- Publication date Oct 19, 2006
- Hewlett-Packard Development Company, L.P. Intellectual Property Administration
- Dennis M. Lazaroff
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and method of providing a regenerating protective coating in...
- Publication number 20060077150
- Publication date Apr 13, 2006
- Jeffrey B. Sampsell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for MEMS device nebulizer lubrication system
- Publication number 20050178848
- Publication date Aug 18, 2005
- Roger A. Robbins
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for MEMS device nebulizer lubrication system
- Publication number 20030129782
- Publication date Jul 10, 2003
- Roger A. Robbins
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Maintaining a critical distance between the structures to be released

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-electro-mechanical system (MEMS) thermal sensor

Micro-electro-mechanical system (MEMS) thermal sensor

Method and apparatus for reducing in-process and in-use stiction fo...

Method and apparatus for reducing in-process and in-use stiction fo...

Process for producing an electromechanical device

Oxide retainer method for MEMS devices

Process of forming a microphone using support member

Micro electronic mechanical system structure

Electret condenser

Process of forming a microphone using support member

Manufacturing method of micro electronic mechanical system structure

Pre-released structure device

Electret condenser

Micro electro-mechanical system and method of manufacturing the same

MEMS element having a dummy pattern

Process of forming a microphone using support member

System and method of providing a regenerating protective coating in...

Method and apparatus for MEMS device nebulizer lubrication system

Method of making a SOI silicon structure

Method and apparatus for MEMS device nebulizer lubrication system

Surface micromachining using a thick release process

Method of HF vapor release of microstructures

Production method for a micromechanical component with a movable st...

Method for manufacturing a structure with a useful layer held at a...

Micromechanical component with a switch element as a movable struct...

Method for fabricating microstructures using temporary bridges

Capacitive surface micromachined differential pressure sensor

Dry-release method for sacrificial layer microstructure fabrication

Patents Applicationslast 30 patents

Micro-Electro-Mechanical System (Mems) Thermal Sensor

MICRO-ELECTRO-MECHANICAL SYTEM (MEMS) THERMAL SENSOR

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) THERMAL SENSOR

METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...

PROCESS FOR PRODUCING AN ELECTROMECHANICAL DEVICE

Process of Forming a Microphone Using Support Member

MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE

MICRO ELECTRONIC MECHANICAL SYSTEM STRUCTURE AND MANUFACTURING METH...

ELECTRET CONDENSER

PRE-RELEASED STRUCTURE DEVICE

Process of Forming a Microphone Using Support Member

Micro electro-mechanical system and method of manufacturing the same

Method of fabricating microstructures

Electret condenser

Microstructure manufacturing method and microstructure

Process of Forming a Microphone Using Support Member

MEMS element and manufacturing method

METHOD OF MAKING A SOI SILICON STRUCTURE

MEMS release methods

System and method of providing a regenerating protective coating in...

Method and apparatus for MEMS device nebulizer lubrication system

Method and apparatus for MEMS device nebulizer lubrication system