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MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
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Industry
CPC
B81B7/008
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B7/00
Micro-structural systems; Auxiliary parts of micro-structural devices or systems
Current Industry
B81B7/008
MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
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