MEMS characterised by an electronic circuit specially adapted for controlling or driving the same

Industry

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B81B7/008

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B7/00Micro-structural systems; Auxiliary parts of micro-structural devices or systems

Current Industry

B81B7/008MEMS characterised by an electronic circuit specially adapted for controlling or driving the same

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Adaptive MEMS device, codec for use with the MEMS device and method...
- Patent number 12,215,024
- Issue date Feb 4, 2025
- Infineon Technologies AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive sensing circuit and capacitive sensing method
- Patent number 12,215,021
- Issue date Feb 4, 2025
- AAC Technologies Pte. Ltd.
- Siewseong Tan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spatial light modulator (SLM) comprising integrated digital-to-anal...
- Patent number 12,195,328
- Issue date Jan 14, 2025
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to estimate phase and amplitude for control of a resonant ME...
- Patent number 12,187,604
- Issue date Jan 7, 2025
- STMicroelectronics S.r.l.
- Raffaele Enrico Furceri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor with integrated heater
- Patent number 12,180,067
- Issue date Dec 31, 2024
- Invensense, Inc.
- Pei-Wen Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective self-assembled monolayer patterning with sacrificial laye...
- Patent number 12,139,397
- Issue date Nov 12, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrooptical systems having heating elements
- Patent number 12,105,277
- Issue date Oct 1, 2024
- Innoviz Technologies Ltd.
- Yair Alpern
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-transducer chip ultrasound device
- Patent number 12,099,150
- Issue date Sep 24, 2024
- EXO IMAGING, INC.
- Liang Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrodynamically levitated actuator
- Patent number 12,091,313
- Issue date Sep 17, 2024
- The Research Foundation for the State University of New York
- Shahrzad Towfighian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for thermally regulating sensor operation
- Patent number 12,078,653
- Issue date Sep 3, 2024
- SZ DJI Technology Co., Ltd
- Guoxiu Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of electrical trimming of sensitivity and frequency response...
- Patent number 12,075,212
- Issue date Aug 27, 2024
- Infineon Technologies AG
- Christian Bretthauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone with flexible performance
- Patent number 12,069,430
- Issue date Aug 20, 2024
- Invensense, Inc.
- Stefano Valle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for diagnosing the operating state of a microelec...
- Patent number 12,060,265
- Issue date Aug 13, 2024
- STMicroelectronics S.r.l.
- Enrico Rosario Alessi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Safety mechanism for sensors
- Patent number 12,044,697
- Issue date Jul 23, 2024
- Murata Manufacturing Co., Ltd.
- Lasse Aaltonen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Overhanging device structures and related methods of manufacture
- Patent number 12,043,541
- Issue date Jul 23, 2024
- X-CELEPRINT LIMITED
- Raja Fazan Gul
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS image forming element with built-in voltage generator
- Patent number 12,030,772
- Issue date Jul 9, 2024
- ASML Netherlands B.V.
- Yongxin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Devices, systems, and methods for obtaining sensor measurements
- Patent number 12,024,421
- Issue date Jul 2, 2024
- Canon Solutions America, Inc.
- Jeffrey David Kane
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for vibration immunity to suppress bias errors in sensor de...
- Patent number 12,012,327
- Issue date Jun 18, 2024
- Honeywell International Inc.
- Daniel Endean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isotachophoresis for purification of nucleic acids
- Patent number 12,006,496
- Issue date Jun 11, 2024
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflection device
- Patent number 12,007,556
- Issue date Jun 11, 2024
- Stanley Electric Co., Ltd.
- Atsuhiko Chikaoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Elastic strain engineering of defect doped materials
- Patent number 11,996,446
- Issue date May 28, 2024
- Massachusetts Institute of Technology
- Ming Dao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator system
- Patent number 11,987,495
- Issue date May 21, 2024
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical systems (“MEMS”) device having a built-in se...
- Patent number 11,975,963
- Issue date May 7, 2024
- John J. Albers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for sensing the activity of people or the status of infrastr...
- Patent number 11,961,384
- Issue date Apr 16, 2024
- EnOcean GmbH
- Frank Schmidt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-output microelectromechanical resonator and method of manufact...
- Patent number 11,932,530
- Issue date Mar 19, 2024
- STATHERA IP HOLDINGS INC.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a metallization structure embedded in a dielectr...
- Patent number 11,932,534
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hung-Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor with dimple features and improved out-of-plane stiction
- Patent number 11,919,769
- Issue date Mar 5, 2024
- Invensense, Inc.
- Ashfaque Uddin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated systems with force or strain sensing and haptic feedback
- Patent number 11,914,777
- Issue date Feb 27, 2024
- NEXTINPUT, INC.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Digital microphone assembly with improved mismatch shaping
- Patent number 11,916,575
- Issue date Feb 27, 2024
- KNOWLESELECTRONICS, LLC.
- Mohammad Sadegh Mohammadi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR
- Publication number 20250059025
- Publication date Feb 20, 2025
- ROBERT BOSCH GmbH
- Martin Kittel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE SENSING CIRCUIT AND CAPACITIVE SENSING METHOD
- Publication number 20250042724
- Publication date Feb 6, 2025
- AAC TECHNOLOGIES PTE. LTD
- Siewseong Tan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED-DIE MEMS RESONATOR
- Publication number 20250019229
- Publication date Jan 16, 2025
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE
- Publication number 20250011164
- Publication date Jan 9, 2025
- INFINEON TECHNOLOGIES AG
- Klaus ELIAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT WITH EXTERNAL CONTACTING
- Publication number 20240425362
- Publication date Dec 26, 2024
- ROBERT BOSCH GmbH
- Benjamin Biasi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TEMPERATURE-CONTROL ARRANGEMENT FOR A MICROELECTRIC SYSTEM
- Publication number 20240375941
- Publication date Nov 14, 2024
- ROBERT BOSCH GmbH
- Udo Schulz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROOPTICAL SYSTEMS HAVING HEAT ELEMENTS
- Publication number 20240361587
- Publication date Oct 31, 2024
- Innoviz Technologies Ltd.
- Yair ALPERN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGHLY SENSITIVE THERMOELECTRIC-BASED INFRARED DETECTOR WITH HIGH C...
- Publication number 20240351863
- Publication date Oct 24, 2024
- Meridian Innovation Pte Ltd
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANT SENSOR SYSTEM AND METHOD FOR OPERATING A RESONANT SENSOR S...
- Publication number 20240337491
- Publication date Oct 10, 2024
- ROBERT BOSCH GmbH
- Antonios Nikas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT
- Publication number 20240300807
- Publication date Sep 12, 2024
- ROBERT BOSCH GmbH
- Jan Stiedl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Isotachophoresis for Purification of Nucleic Acids
- Publication number 20240301395
- Publication date Sep 12, 2024
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE AND METHOD FOR BONDED WAFER BARRIER
- Publication number 20240282716
- Publication date Aug 22, 2024
- TEXAS INSTRUMENTS INCORPORATED
- John C. Ehmke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM
- Publication number 20240262680
- Publication date Aug 8, 2024
- SILMACH
- Marc Sworowski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACT...
- Publication number 20240253975
- Publication date Aug 1, 2024
- Stathera IP Holdings Inc.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICE AND A METHOD FOR MANUFACTURING A MICROFLUIDIC D...
- Publication number 20240207845
- Publication date Jun 27, 2024
- IMEC vzw
- Lei ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SENSOR DEVICE WITH IMPROVED MANAGEMENT OF A...
- Publication number 20240200980
- Publication date Jun 20, 2024
- STMicroelectronics International N.V.
- Salvatore POLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20240199412
- Publication date Jun 20, 2024
- InvenSense, Inc.
- Camillo Pilla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS LOUDSPEAKER MANUFACTURING METHOD AND MEMS LOUDSPEAKER
- Publication number 20240174513
- Publication date May 30, 2024
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Qiang Dan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL SYSTEM AND METHOD FOR OPERATING AN ELECTROMECHANI...
- Publication number 20240140784
- Publication date May 2, 2024
- ROBERT BOSCH GmbH
- Timo Giesselmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR WITH INTEGRATED STRESS SENSOR AND METHOD FOR...
- Publication number 20240142490
- Publication date May 2, 2024
- ROBERT BOSCH GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and Method for Fast Mode Change of a Digital Microphone Usin...
- Publication number 20240083744
- Publication date Mar 14, 2024
- INFINEON TECHNOLOGIES AG
- Dietmar Straeussnigg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20240025734
- Publication date Jan 25, 2024
- Zhunmao (Hangzhou) Technology Co.
- Haitao Ding
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER
- Publication number 20230399226
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE PACKAGE
- Publication number 20230391610
- Publication date Dec 7, 2023
- Fortemedia, Inc.
- Yen-Son Paul HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED-DIE MEMS RESONATOR
- Publication number 20230391611
- Publication date Dec 7, 2023
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMIRROR RESONANCE SUPRESSION USING CONFIGURABLE FILTER
- Publication number 20230384582
- Publication date Nov 30, 2023
- Microsoft Technology Licensing, LLC
- Wenjun LIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE AND PROCESS FOR MANUFACTURING A MICRO...
- Publication number 20230356999
- Publication date Nov 9, 2023
- STMicroelectronics S.r.l.
- Filippo DANIELE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR THERMALLY REGULATING SENSOR OPERATION
- Publication number 20230358781
- Publication date Nov 9, 2023
- SZ DJI Technology Co., Ltd.
- Guoxiu PAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICES, SYSTEMS, AND METHODS FOR OBTAINING SENSOR MEASUREMENTS
- Publication number 20230348260
- Publication date Nov 2, 2023
- Canon Solutions America, Inc.
- Jeffrey David Kane
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ELECTRICAL TRIMMING OF SENSITIVITY AND FREQUENCY RESPONSE...
- Publication number 20230262397
- Publication date Aug 17, 2023
- INFINEON TECHNOLOGY AG
- Christian Bretthauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

MEMS characterised by an electronic circuit specially adapted for controlling or driving the same

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Adaptive MEMS device, codec for use with the MEMS device and method...

Capacitive sensing circuit and capacitive sensing method

Spatial light modulator (SLM) comprising integrated digital-to-anal...

Method to estimate phase and amplitude for control of a resonant ME...

Sensor with integrated heater

Selective self-assembled monolayer patterning with sacrificial laye...

MEMS actuator package architecture

Electrooptical systems having heating elements

Multi-transducer chip ultrasound device

Electrodynamically levitated actuator

Systems and methods for thermally regulating sensor operation

Method of electrical trimming of sensitivity and frequency response...

Microphone with flexible performance

System and method for diagnosing the operating state of a microelec...

Safety mechanism for sensors

Overhanging device structures and related methods of manufacture

MEMS image forming element with built-in voltage generator

Devices, systems, and methods for obtaining sensor measurements

Methods for vibration immunity to suppress bias errors in sensor de...

Isotachophoresis for purification of nucleic acids

Light deflection device

Elastic strain engineering of defect doped materials

MEMS resonator system

Microelectromechanical systems (“MEMS”) device having a built-in se...

Device for sensing the activity of people or the status of infrastr...

Dual-output microelectromechanical resonator and method of manufact...

MEMS device having a metallization structure embedded in a dielectr...

Sensor with dimple features and improved out-of-plane stiction

Integrated systems with force or strain sensing and haptic feedback

Digital microphone assembly with improved mismatch shaping

Patents Applicationslast 30 patents

METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR

CAPACITIVE SENSING CIRCUIT AND CAPACITIVE SENSING METHOD

STACKED-DIE MEMS RESONATOR

SENSOR DEVICE

MICROMECHANICAL COMPONENT WITH EXTERNAL CONTACTING

TEMPERATURE-CONTROL ARRANGEMENT FOR A MICROELECTRIC SYSTEM

ELECTROOPTICAL SYSTEMS HAVING HEAT ELEMENTS

HIGHLY SENSITIVE THERMOELECTRIC-BASED INFRARED DETECTOR WITH HIGH C...

RESONANT SENSOR SYSTEM AND METHOD FOR OPERATING A RESONANT SENSOR S...

MICROMECHANICAL COMPONENT

Isotachophoresis for Purification of Nucleic Acids

STRUCTURE AND METHOD FOR BONDED WAFER BARRIER

METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM

DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACT...

MICROFLUIDIC DEVICE AND A METHOD FOR MANUFACTURING A MICROFLUIDIC D...

MICROELECTROMECHANICAL SENSOR DEVICE WITH IMPROVED MANAGEMENT OF A...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

MEMS LOUDSPEAKER MANUFACTURING METHOD AND MEMS LOUDSPEAKER

ELECTROMECHANICAL SYSTEM AND METHOD FOR OPERATING AN ELECTROMECHANI...

MICROMECHANICAL SENSOR WITH INTEGRATED STRESS SENSOR AND METHOD FOR...

System and Method for Fast Mode Change of a Digital Microphone Usin...

MEMS DEVICE

MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER

MEMS MICROPHONE PACKAGE

STACKED-DIE MEMS RESONATOR

MICROMIRROR RESONANCE SUPRESSION USING CONFIGURABLE FILTER

MICROELECTROMECHANICAL DEVICE AND PROCESS FOR MANUFACTURING A MICRO...

SYSTEMS AND METHODS FOR THERMALLY REGULATING SENSOR OPERATION

DEVICES, SYSTEMS, AND METHODS FOR OBTAINING SENSOR MEASUREMENTS

METHOD OF ELECTRICAL TRIMMING OF SENSITIVITY AND FREQUENCY RESPONSE...