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MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
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B81B7/008
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B7/00
Micro-structural systems; Auxiliary parts of micro-structural devices or systems
Current Industry
B81B7/008
MEMS characterised by an electronic circuit specially adapted for controlling or driving the same
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Microelectromechanical systems (“MEMS”) device having a built-in se...
Patent number
11,975,963
Issue date
May 7, 2024
John J. Albers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for sensing the activity of people or the status of infrastr...
Patent number
11,961,384
Issue date
Apr 16, 2024
EnOcean GmbH
Frank Schmidt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual-output microelectromechanical resonator and method of manufact...
Patent number
11,932,530
Issue date
Mar 19, 2024
STATHERA IP HOLDINGS INC.
George Xereas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having a metallization structure embedded in a dielectr...
Patent number
11,932,534
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor with dimple features and improved out-of-plane stiction
Patent number
11,919,769
Issue date
Mar 5, 2024
Invensense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated systems with force or strain sensing and haptic feedback
Patent number
11,914,777
Issue date
Feb 27, 2024
NEXTINPUT, INC.
Julius Minglin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor package including a substrate with an inductor layer
Patent number
11,912,564
Issue date
Feb 27, 2024
Knowles Electronics, LLC
Adam Ariffin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Digital microphone assembly with improved mismatch shaping
Patent number
11,916,575
Issue date
Feb 27, 2024
KNOWLESELECTRONICS, LLC.
Mohammad Sadegh Mohammadi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Heat dissipation system with microelectromechanical system (MEMS) f...
Patent number
11,910,568
Issue date
Feb 20, 2024
Cisco Technology, Inc.
Joel Richard Goergen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bipolar staggered comb drive for bidirectional MEMS actuation
Patent number
11,909,332
Issue date
Feb 20, 2024
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Qin Zhou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
3D NAND flash memory devices and related electronic systems
Patent number
11,908,512
Issue date
Feb 20, 2024
Micron Technology, Inc.
Tomoharu Tanaka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing microelectromechanical devices, in partic...
Patent number
11,891,298
Issue date
Feb 6, 2024
STMicroelectronics S.r.l.
Fabio Quaglia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Differential mems device and methods
Patent number
11,892,465
Issue date
Feb 6, 2024
Movella Inc.
Sanjay Bhandari
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Root mean square sensor device
Patent number
11,884,538
Issue date
Jan 30, 2024
Texas Instruments Incorporated
Marco Corsi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for fast mode change of a digital microphone usin...
Patent number
11,858,808
Issue date
Jan 2, 2024
Infineon Technologies AG
Dietmar Straeussnigg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device
Patent number
11,863,933
Issue date
Jan 2, 2024
Infineon Technologies AG
Niccoló De Milleri
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Position sensing circuit for an electrostatically driven MEMS device
Patent number
11,820,649
Issue date
Nov 21, 2023
Lawrence Livermore National Security, LLC
Robert Matthew Panas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS actuation device with sparse pulses
Patent number
11,802,042
Issue date
Oct 31, 2023
STMicroelectronics S.r.l.
Davide Terzi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for adjusting calibration parameters and senso...
Patent number
11,761,980
Issue date
Sep 19, 2023
Robert Bosch GmbH
Hanna Beuchert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microphone assembly with transducer sensitivity drift compensation...
Patent number
11,743,666
Issue date
Aug 29, 2023
Knowles Electronics, LLC
Vezio Malandruccolo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for operating a mems device based on sensed tem...
Patent number
11,738,994
Issue date
Aug 29, 2023
Invensense, Inc.
David deKoninck
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Devices, systems, and methods for obtaining sensor measurements
Patent number
11,731,870
Issue date
Aug 22, 2023
Canon Solutions America, Inc.
Jeffrey David Kane
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stacked-die MEMS resonator
Patent number
11,708,264
Issue date
Jul 25, 2023
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for thermally regulating sensor operation
Patent number
11,703,522
Issue date
Jul 18, 2023
SZ DJI Technology Co., Ltd
Guoxiu Pan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system (MEMS) vibration sensor having a segm...
Patent number
11,691,871
Issue date
Jul 4, 2023
Infineon Technologies AG
Somu Goswami
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Scalable high-voltage control circuits using thin film electronics
Patent number
11,673,796
Issue date
Jun 13, 2023
Palo Alto Research Center Incorporated
Jengping Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Isotachophoresis for purification of nucleic acids
Patent number
11,674,132
Issue date
Jun 13, 2023
Purigen Biosystems, Inc.
Lewis A. Marshall
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing method for a micromechanical component, a correspondi...
Patent number
11,667,520
Issue date
Jun 6, 2023
Robert Bosch GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Overload recovery optimization in microelectromechanical system app...
Patent number
11,661,334
Issue date
May 30, 2023
Apple Inc.
Eddie L. Ng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor package with ingress protection
Patent number
11,662,236
Issue date
May 30, 2023
Knowles Electronics, LLC
Tony K. Lim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
ELECTROMECHANICAL SYSTEM AND METHOD FOR OPERATING AN ELECTROMECHANI...
Publication number
20240140784
Publication date
May 2, 2024
ROBERT BOSCH GmbH
Timo Giesselmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL SENSOR WITH INTEGRATED STRESS SENSOR AND METHOD FOR...
Publication number
20240142490
Publication date
May 2, 2024
ROBERT BOSCH GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
System and Method for Fast Mode Change of a Digital Microphone Usin...
Publication number
20240083744
Publication date
Mar 14, 2024
INFINEON TECHNOLOGIES AG
Dietmar Straeussnigg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20240025734
Publication date
Jan 25, 2024
Zhunmao (Hangzhou) Technology Co.
Haitao Ding
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER
Publication number
20230399226
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Fan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE PACKAGE
Publication number
20230391610
Publication date
Dec 7, 2023
Fortemedia, Inc.
Yen-Son Paul HUANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STACKED-DIE MEMS RESONATOR
Publication number
20230391611
Publication date
Dec 7, 2023
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMIRROR RESONANCE SUPRESSION USING CONFIGURABLE FILTER
Publication number
20230384582
Publication date
Nov 30, 2023
Microsoft Technology Licensing, LLC
Wenjun LIAO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE AND PROCESS FOR MANUFACTURING A MICRO...
Publication number
20230356999
Publication date
Nov 9, 2023
STMicroelectronics S.r.l.
Filippo DANIELE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEMS AND METHODS FOR THERMALLY REGULATING SENSOR OPERATION
Publication number
20230358781
Publication date
Nov 9, 2023
SZ DJI Technology Co., Ltd.
Guoxiu PAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICES, SYSTEMS, AND METHODS FOR OBTAINING SENSOR MEASUREMENTS
Publication number
20230348260
Publication date
Nov 2, 2023
Canon Solutions America, Inc.
Jeffrey David Kane
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF ELECTRICAL TRIMMING OF SENSITIVITY AND FREQUENCY RESPONSE...
Publication number
20230262397
Publication date
Aug 17, 2023
INFINEON TECHNOLOGY AG
Christian Bretthauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD TO ESTIMATE PHASE AND AMPLITUDE FOR CONTROL OF A RESONANT ME...
Publication number
20230234836
Publication date
Jul 27, 2023
STMicroelectronics S.r.l
Raffaele Enrico FURCERI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACT...
Publication number
20230183057
Publication date
Jun 15, 2023
Stathera IP Holdings Inc.
George Xereas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
3D NAND FLASH MEMORY DEVICES AND RELATED ELECTRONIC SYSTEMS
Publication number
20230143421
Publication date
May 11, 2023
Micron Technology, Inc.
Tomoharu Tanaka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SINGLE-AXIS INERTIAL SENSOR MODULE WITH INTERPOSER
Publication number
20230133753
Publication date
May 4, 2023
TELEDYNE SCIENTIFIC & IMAGING, LLC
Jeffrey F. DeNatale
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-TRANSDUCER CHIP ULTRASOUND DEVICE
Publication number
20230125688
Publication date
Apr 27, 2023
eXo Imaging, Inc.
Liang WANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEMS AND METHODS FOR OPERATING A MEMS DEVICE BASED ON SENSED TEM...
Publication number
20230107211
Publication date
Apr 6, 2023
InvenSense, Inc.
David deKoninck
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR WITH DIMPLE FEATURES AND IMPROVED OUT-OF-PLANE STICTION
Publication number
20230100960
Publication date
Mar 30, 2023
InvenSense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENHANCED MEMS SENSOR EMBEDDED HEATER
Publication number
20230061188
Publication date
Mar 2, 2023
Apple Inc.
Gregory B. ARNDT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MIRROR SYSTEM WITH SLOW LIGHT BEAM DEFLECTION USING FAST RESON...
Publication number
20230067823
Publication date
Mar 2, 2023
INFINEON TECHNOLOGIES AG
Boris KIRILLOV
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND ACOUSTIC DEVICE HAVING THE SAME
Publication number
20230039552
Publication date
Feb 9, 2023
Advanced Semiconductor Engineering, Inc.
Ming-Tau HUANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR CHIP WITH A PLURALITY OF INTEGRATED SENSOR CIRCUITS
Publication number
20230035123
Publication date
Feb 2, 2023
INFINEON TECHNOLOGIES AG
Stephan LEISENHEIMER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical System (MEMS) Vibration Sensor Having a Segm...
Publication number
20220402752
Publication date
Dec 22, 2022
INFINEON TECHNOLOGIES AG
Somu Goswami
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SAFETY MECHANISM FOR SENSORS
Publication number
20220373574
Publication date
Nov 24, 2022
Murata Manufacturing Co., Ltd.
Lasse AALTONEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Pop-Up Laminate Structures with Integrated Electronics
Publication number
20220361974
Publication date
Nov 17, 2022
President and Fellows of Harvard College
Joshua B. Gafford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STACKED-DIE MEMS RESONATOR
Publication number
20220356059
Publication date
Nov 10, 2022
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
REDUCED NOISE MEMS DEVICE WITH FORCE FEEDBACK
Publication number
20220337947
Publication date
Oct 20, 2022
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEMS ("MEMS") DEVICE HAVING A BUILT-IN SE...
Publication number
20220332569
Publication date
Oct 20, 2022
KNOWLES ELECTRONICS, LLC
John J. Albers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEMODULATION PHASE CALIBRATION USING EXTERNAL INPUT
Publication number
20220326045
Publication date
Oct 13, 2022
InvenSense, Inc.
Doruk Senkal
B81 - MICRO-STRUCTURAL TECHNOLOGY