Processes for controlling etch progression not provided for in B81C2201/0136 - B81C2201/014

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B81C2201/0142

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0142Processes for controlling etch progression not provided for in B81C2201/0136 - B81C2201/014

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microfabrication of omni-view peripheral scanning system
- Patent number 11,926,523
- Issue date Mar 12, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structure forming method and device
- Patent number 11,679,976
- Issue date Jun 20, 2023
- Seiko Epson Corporation
- Shogo Inaba
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 11,524,893
- Issue date Dec 13, 2022
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processing method and plasma processing apparatus
- Patent number 11,211,229
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Sho Oikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and manufacturing method for making same
- Patent number 10,947,110
- Issue date Mar 16, 2021
- AAC Technologies Pte. Ltd.
- Lieng Loo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical structures in a device wafer
- Patent number 10,807,863
- Issue date Oct 20, 2020
- Murata Manufacturing Co., Ltd.
- Hidetoshi Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic layer etching using a combination of plasma and vapor treatm...
- Patent number 10,784,118
- Issue date Sep 22, 2020
- Lam Research Corporation
- Andreas Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming a microelectromechanical systems (MEMS) device using silico...
- Patent number 10,604,405
- Issue date Mar 31, 2020
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of production of semiconductor device having semiconductor l...
- Patent number 10,479,675
- Issue date Nov 19, 2019
- Denso Corporation
- Akira Ogawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic layer etching of AL2O3 using a combination of plasma and vap...
- Patent number 10,256,108
- Issue date Apr 9, 2019
- Lam Research Corporation
- Andreas Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming an on-pitch self-aligned hard mask for contact to...
- Patent number 10,003,014
- Issue date Jun 19, 2018
- International Business Machines Corporation
- Michael C. Gaidis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device manufacturing method and device manufacturing apparatus
- Patent number 10,002,801
- Issue date Jun 19, 2018
- Hitachi, Ltd.
- Misuzu Sagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-based method for manufacturing sensor
- Patent number 9,975,766
- Issue date May 22, 2018
- CSMC TECHNOLOGIES FABI CO., LTD.
- Yonggang Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vacuum-cavity-insulated flow sensors
- Patent number 9,880,036
- Issue date Jan 30, 2018
- Posifa
- Xiang Zheng Tu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching apparatus and methods
- Patent number 9,640,370
- Issue date May 2, 2017
- SPTS Technologies Limited
- Oliver James Ansell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micropores and methods of making and using thereof
- Patent number 9,404,913
- Issue date Aug 2, 2016
- Sandia Corporation
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Control over hydrogen fluoride levels in oxide etchant
- Patent number 8,945,939
- Issue date Feb 3, 2015
- Ecolab USA Inc.
- Amy M. Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Control over ammonium fluoride levels in oxide etchant
- Patent number 8,932,874
- Issue date Jan 13, 2015
- Nalco Company
- Amy M. Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for immobilization of single particles in a vir...
- Patent number 8,815,177
- Issue date Aug 26, 2014
- Sandia Corporation
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Control over hydrogen fluoride levels in oxide etchant
- Patent number 8,716,028
- Issue date May 6, 2014
- Nalco Company
- Amy Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for selectively removing material from the surface of a subs...
- Patent number 8,652,343
- Issue date Feb 18, 2014
- Excelitas Technologies Singapore Pte. Ltd.
- Martin Hausner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micropores and methods of making and using thereof
- Patent number 8,585,916
- Issue date Nov 19, 2013
- Sandia Corporation
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Chip, method for producing a chip and device for laser ablation
- Patent number 8,564,026
- Issue date Oct 22, 2013
- Infineon Technologies AG
- Franz-Peter Kalz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing a wiring board
- Patent number 7,900,350
- Issue date Mar 8, 2011
- Omron Corporation
- Taku Masai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming finely-structured parts, finely-structured parts...
- Patent number 7,678,454
- Issue date Mar 16, 2010
- NEC Corporation
- Shin-ichi Uehara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming finely-structured parts, finely-structured parts...
- Patent number 7,643,100
- Issue date Jan 5, 2010
- NEC Corporation
- Shin-ichi Uehara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micro-electro-mechanical structure
- Patent number 7,524,767
- Issue date Apr 28, 2009
- Delphi Technologies, Inc.
- Dan W. Chilcott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming finely-structured parts, finely-structured parts...
- Patent number 7,525,732
- Issue date Apr 28, 2009
- NEC Corporation
- Shin-ichi Uehara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Liquid-based gravity-driven etching-stop technique for controlling...
- Patent number 7,435,355
- Issue date Oct 14, 2008
- Industrial Technology Research Institute
- Wei-Chin Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming finely-structured parts, finely-structured parts...
- Patent number 7,329,611
- Issue date Feb 12, 2008
- NEC Corporation
- Shinichi Uehara
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR CHIP WITH EMBEDDED MICROFLUIDIC CHANNELS AND METHOD O...
- Publication number 20240208806
- Publication date Jun 27, 2024
- National Taiwan University
- Jun-Chau Chien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF
- Publication number 20240174512
- Publication date May 30, 2024
- TAIWAN MASK CORPORATION
- SHANG-KUANG WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
- Publication number 20230399754
- Publication date Dec 14, 2023
- Entegris, Inc.
- Daniela White
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM
- Publication number 20230072948
- Publication date Mar 9, 2023
- Beijing Voyager Technology Co., Ltd.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFA...
- Publication number 20210403320
- Publication date Dec 30, 2021
- Hamamatsu Photonics K.K.
- Nao INOUE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER
- Publication number 20210002131
- Publication date Jan 7, 2021
- Murata Manufacturing Co., Ltd.
- Hidetoshi FUJII
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE FORMING METHOD AND DEVICE
- Publication number 20200247666
- Publication date Aug 6, 2020
- SEIKO EPSON CORPORATION
- Shogo INABA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS microphone and manufacturing method for making same
- Publication number 20200048080
- Publication date Feb 13, 2020
- AAC Technologies Pte. Ltd.
- Lieng Loo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC LAYER ETCHING USING A COMBINATION OF PLASMA AND VAPOR TREATM...
- Publication number 20190198345
- Publication date Jun 27, 2019
- LAM RESEARCH CORPORATION
- Andreas Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PRODUCTION METHOD
- Publication number 20190023563
- Publication date Jan 24, 2019
- DENSO CORPORATION
- Akira OGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING AN ON-PITCH SELF-ALIGNED HARD MASK FOR CONTACT TO...
- Publication number 20180240967
- Publication date Aug 23, 2018
- International Business Machines Corporation
- Michael C. Gaidis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURING APPARATUS
- Publication number 20180005906
- Publication date Jan 4, 2018
- Hitachi, Ltd
- Misuzu SAGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-BASED METHOD FOR MANUFACTURING SENSOR
- Publication number 20170073224
- Publication date Mar 16, 2017
- CSMC TECHNOLOGIES FAB1 CO., LTD.
- Yonggang HU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND DEVICES FOR IMMOBILIZATION OF SINGLE PARTICLES IN A VIR...
- Publication number 20140329722
- Publication date Nov 6, 2014
- SANDIA CORPORATION
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT
- Publication number 20140315320
- Publication date Oct 23, 2014
- NALCO COMPANY
- Amy M. Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Novel Micropores and Methods of Making and Using Thereof
- Publication number 20140099241
- Publication date Apr 10, 2014
- SANDIA CORPORATION
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT
- Publication number 20140073060
- Publication date Mar 13, 2014
- NALCO COMPANY
- Amy M. Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT
- Publication number 20130183773
- Publication date Jul 18, 2013
- Amy M. Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHIP, METHOD FOR PRODUCING A CHIP AND DEVICE FOR LASER ABLATION
- Publication number 20120074598
- Publication date Mar 29, 2012
- INFINEON TECHNOLOGIES AG
- Franz-Peter Kalz
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTICOMPONENT SACRIFICIAL STRUCTURE
- Publication number 20120057216
- Publication date Mar 8, 2012
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Lucio Flores
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods and Devices for Immobilization of Single Particles
- Publication number 20110028351
- Publication date Feb 3, 2011
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Novel Micropores and Methods of Making and Using Thereof
- Publication number 20110024368
- Publication date Feb 3, 2011
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY
- Publication number 20090218312
- Publication date Sep 3, 2009
- IDC, LLC
- Philip D. Floyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SU...
- Publication number 20080245674
- Publication date Oct 9, 2008
- Robert J. von Gutfeld
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING FINELY-STRUCTURED PARTS, FINELY-STRUCTURED PARTS...
- Publication number 20080074564
- Publication date Mar 27, 2008
- NEC Corporation
- Shin-Ichi UEHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING FINELY-STRUCTURED PARTS, FINELY-STRUCTURED PARTS...
- Publication number 20080057731
- Publication date Mar 6, 2008
- NEC Corporation
- Shinichi UEHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Structure in a substrate for the manufacturing of a semiconductor d...
- Publication number 20080009139
- Publication date Jan 10, 2008
- Thomas Hecht
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING FINELY-STRUCTURED PARTS, FINELY-STRUCTURED PARTS...
- Publication number 20070291370
- Publication date Dec 20, 2007
- NEC Corporation
- Shinichi UEHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a micro-electro-mechanical structure
- Publication number 20070072428
- Publication date Mar 29, 2007
- Dan W. Chilcott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Liquid-based gravity-driven etching-stop technique for controlling...
- Publication number 20060264058
- Publication date Nov 23, 2006
- Wei-Chin Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Processes for controlling etch progression not provided for in B81C2201/0136 - B81C2201/014

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microfabrication of omni-view peripheral scanning system

Structure forming method and device

Method for manufacturing micromechanical structures in a device wafer

Processing method and plasma processing apparatus

MEMS microphone and manufacturing method for making same

Method for manufacturing micromechanical structures in a device wafer

Atomic layer etching using a combination of plasma and vapor treatm...

Forming a microelectromechanical systems (MEMS) device using silico...

Method of production of semiconductor device having semiconductor l...

Atomic layer etching of AL2O3 using a combination of plasma and vap...

Method of forming an on-pitch self-aligned hard mask for contact to...

Device manufacturing method and device manufacturing apparatus

MEMS-based method for manufacturing sensor

Vacuum-cavity-insulated flow sensors

Etching apparatus and methods

Micropores and methods of making and using thereof

Control over hydrogen fluoride levels in oxide etchant

Control over ammonium fluoride levels in oxide etchant

Methods and devices for immobilization of single particles in a vir...

Control over hydrogen fluoride levels in oxide etchant

Method for selectively removing material from the surface of a subs...

Micropores and methods of making and using thereof

Chip, method for producing a chip and device for laser ablation

Method of manufacturing a wiring board

Method for forming finely-structured parts, finely-structured parts...

Method for forming finely-structured parts, finely-structured parts...

Method for manufacturing a micro-electro-mechanical structure

Method for forming finely-structured parts, finely-structured parts...

Liquid-based gravity-driven etching-stop technique for controlling...

Method for forming finely-structured parts, finely-structured parts...

Patents Applicationslast 30 patents

SEMICONDUCTOR CHIP WITH EMBEDDED MICROFLUIDIC CHANNELS AND METHOD O...

MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF

CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR

MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM

METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFA...

METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER

STRUCTURE FORMING METHOD AND DEVICE

MEMS microphone and manufacturing method for making same

ATOMIC LAYER ETCHING USING A COMBINATION OF PLASMA AND VAPOR TREATM...

SEMICONDUCTOR DEVICE PRODUCTION METHOD

METHOD OF FORMING AN ON-PITCH SELF-ALIGNED HARD MASK FOR CONTACT TO...

DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURING APPARATUS

MEMS-BASED METHOD FOR MANUFACTURING SENSOR

METHODS AND DEVICES FOR IMMOBILIZATION OF SINGLE PARTICLES IN A VIR...

CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT

Novel Micropores and Methods of Making and Using Thereof

CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT

CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT

CHIP, METHOD FOR PRODUCING A CHIP AND DEVICE FOR LASER ABLATION

MULTICOMPONENT SACRIFICIAL STRUCTURE

Methods and Devices for Immobilization of Single Particles

Novel Micropores and Methods of Making and Using Thereof

METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY

SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SU...

METHOD FOR FORMING FINELY-STRUCTURED PARTS, FINELY-STRUCTURED PARTS...

METHOD FOR FORMING FINELY-STRUCTURED PARTS, FINELY-STRUCTURED PARTS...

Structure in a substrate for the manufacturing of a semiconductor d...

METHOD FOR FORMING FINELY-STRUCTURED PARTS, FINELY-STRUCTURED PARTS...

Method for manufacturing a micro-electro-mechanical structure

Liquid-based gravity-driven etching-stop technique for controlling...