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Processes for controlling etch progression not provided for in B81C2201/0136 - B81C2201/014
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
Current Industry
B81C2201/0142
Processes for controlling etch progression not provided for in B81C2201/0136 - B81C2201/014
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Patents Grants
last 30 patents
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Patent Grant
Microfabrication of omni-view peripheral scanning system
Patent number
11,926,523
Issue date
Mar 12, 2024
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure forming method and device
Patent number
11,679,976
Issue date
Jun 20, 2023
Seiko Epson Corporation
Shogo Inaba
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing micromechanical structures in a device wafer
Patent number
11,524,893
Issue date
Dec 13, 2022
Murata Manufacturing Co., Ltd.
Hidetoshi Fujii
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Processing method and plasma processing apparatus
Patent number
11,211,229
Issue date
Dec 28, 2021
Tokyo Electron Limited
Sho Oikawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone and manufacturing method for making same
Patent number
10,947,110
Issue date
Mar 16, 2021
AAC Technologies Pte. Ltd.
Lieng Loo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing micromechanical structures in a device wafer
Patent number
10,807,863
Issue date
Oct 20, 2020
Murata Manufacturing Co., Ltd.
Hidetoshi Fujii
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Atomic layer etching using a combination of plasma and vapor treatm...
Patent number
10,784,118
Issue date
Sep 22, 2020
Lam Research Corporation
Andreas Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Forming a microelectromechanical systems (MEMS) device using silico...
Patent number
10,604,405
Issue date
Mar 31, 2020
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of production of semiconductor device having semiconductor l...
Patent number
10,479,675
Issue date
Nov 19, 2019
Denso Corporation
Akira Ogawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Atomic layer etching of AL2O3 using a combination of plasma and vap...
Patent number
10,256,108
Issue date
Apr 9, 2019
Lam Research Corporation
Andreas Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming an on-pitch self-aligned hard mask for contact to...
Patent number
10,003,014
Issue date
Jun 19, 2018
International Business Machines Corporation
Michael C. Gaidis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device manufacturing method and device manufacturing apparatus
Patent number
10,002,801
Issue date
Jun 19, 2018
Hitachi, Ltd.
Misuzu Sagawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS-based method for manufacturing sensor
Patent number
9,975,766
Issue date
May 22, 2018
CSMC TECHNOLOGIES FABI CO., LTD.
Yonggang Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vacuum-cavity-insulated flow sensors
Patent number
9,880,036
Issue date
Jan 30, 2018
Posifa
Xiang Zheng Tu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Etching apparatus and methods
Patent number
9,640,370
Issue date
May 2, 2017
SPTS Technologies Limited
Oliver James Ansell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micropores and methods of making and using thereof
Patent number
9,404,913
Issue date
Aug 2, 2016
Sandia Corporation
Thomas D. Perroud
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Control over hydrogen fluoride levels in oxide etchant
Patent number
8,945,939
Issue date
Feb 3, 2015
Ecolab USA Inc.
Amy M. Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Control over ammonium fluoride levels in oxide etchant
Patent number
8,932,874
Issue date
Jan 13, 2015
Nalco Company
Amy M. Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and devices for immobilization of single particles in a vir...
Patent number
8,815,177
Issue date
Aug 26, 2014
Sandia Corporation
Thomas D. Perroud
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Control over hydrogen fluoride levels in oxide etchant
Patent number
8,716,028
Issue date
May 6, 2014
Nalco Company
Amy Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for selectively removing material from the surface of a subs...
Patent number
8,652,343
Issue date
Feb 18, 2014
Excelitas Technologies Singapore Pte. Ltd.
Martin Hausner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micropores and methods of making and using thereof
Patent number
8,585,916
Issue date
Nov 19, 2013
Sandia Corporation
Thomas D. Perroud
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Chip, method for producing a chip and device for laser ablation
Patent number
8,564,026
Issue date
Oct 22, 2013
Infineon Technologies AG
Franz-Peter Kalz
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of manufacturing a wiring board
Patent number
7,900,350
Issue date
Mar 8, 2011
Omron Corporation
Taku Masai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming finely-structured parts, finely-structured parts...
Patent number
7,678,454
Issue date
Mar 16, 2010
NEC Corporation
Shin-ichi Uehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming finely-structured parts, finely-structured parts...
Patent number
7,643,100
Issue date
Jan 5, 2010
NEC Corporation
Shin-ichi Uehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micro-electro-mechanical structure
Patent number
7,524,767
Issue date
Apr 28, 2009
Delphi Technologies, Inc.
Dan W. Chilcott
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming finely-structured parts, finely-structured parts...
Patent number
7,525,732
Issue date
Apr 28, 2009
NEC Corporation
Shin-ichi Uehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Liquid-based gravity-driven etching-stop technique for controlling...
Patent number
7,435,355
Issue date
Oct 14, 2008
Industrial Technology Research Institute
Wei-Chin Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming finely-structured parts, finely-structured parts...
Patent number
7,329,611
Issue date
Feb 12, 2008
NEC Corporation
Shinichi Uehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
Publication number
20230399754
Publication date
Dec 14, 2023
Entegris, Inc.
Daniela White
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM
Publication number
20230072948
Publication date
Mar 9, 2023
Beijing Voyager Technology Co., Ltd.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE, METHOD FOR MANUFA...
Publication number
20210403320
Publication date
Dec 30, 2021
Hamamatsu Photonics K.K.
Nao INOUE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL STRUCTURES IN A DEVICE WAFER
Publication number
20210002131
Publication date
Jan 7, 2021
Murata Manufacturing Co., Ltd.
Hidetoshi FUJII
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRUCTURE FORMING METHOD AND DEVICE
Publication number
20200247666
Publication date
Aug 6, 2020
SEIKO EPSON CORPORATION
Shogo INABA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS microphone and manufacturing method for making same
Publication number
20200048080
Publication date
Feb 13, 2020
AAC Technologies Pte. Ltd.
Lieng Loo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ATOMIC LAYER ETCHING USING A COMBINATION OF PLASMA AND VAPOR TREATM...
Publication number
20190198345
Publication date
Jun 27, 2019
LAM RESEARCH CORPORATION
Andreas Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE PRODUCTION METHOD
Publication number
20190023563
Publication date
Jan 24, 2019
DENSO CORPORATION
Akira OGAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING AN ON-PITCH SELF-ALIGNED HARD MASK FOR CONTACT TO...
Publication number
20180240967
Publication date
Aug 23, 2018
International Business Machines Corporation
Michael C. Gaidis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURING APPARATUS
Publication number
20180005906
Publication date
Jan 4, 2018
Hitachi, Ltd
Misuzu SAGAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS-BASED METHOD FOR MANUFACTURING SENSOR
Publication number
20170073224
Publication date
Mar 16, 2017
CSMC TECHNOLOGIES FAB1 CO., LTD.
Yonggang HU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS AND DEVICES FOR IMMOBILIZATION OF SINGLE PARTICLES IN A VIR...
Publication number
20140329722
Publication date
Nov 6, 2014
SANDIA CORPORATION
Thomas D. Perroud
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT
Publication number
20140315320
Publication date
Oct 23, 2014
NALCO COMPANY
Amy M. Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Novel Micropores and Methods of Making and Using Thereof
Publication number
20140099241
Publication date
Apr 10, 2014
SANDIA CORPORATION
Thomas D. Perroud
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT
Publication number
20140073060
Publication date
Mar 13, 2014
NALCO COMPANY
Amy M. Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTROL OVER HYDROGEN FLUORIDE LEVELS IN OXIDE ETCHANT
Publication number
20130183773
Publication date
Jul 18, 2013
Amy M. Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHIP, METHOD FOR PRODUCING A CHIP AND DEVICE FOR LASER ABLATION
Publication number
20120074598
Publication date
Mar 29, 2012
INFINEON TECHNOLOGIES AG
Franz-Peter Kalz
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MULTICOMPONENT SACRIFICIAL STRUCTURE
Publication number
20120057216
Publication date
Mar 8, 2012
QUALCOMM MEMS TECHNOLOGIES, INC.
Lucio Flores
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods and Devices for Immobilization of Single Particles
Publication number
20110028351
Publication date
Feb 3, 2011
Thomas D. Perroud
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Novel Micropores and Methods of Making and Using Thereof
Publication number
20110024368
Publication date
Feb 3, 2011
Thomas D. Perroud
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY
Publication number
20090218312
Publication date
Sep 3, 2009
IDC, LLC
Philip D. Floyd
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR OBTAINING ANISOTROPIC ETCHING OF PATTERNED SU...
Publication number
20080245674
Publication date
Oct 9, 2008
Robert J. von Gutfeld
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING FINELY-STRUCTURED PARTS, FINELY-STRUCTURED PARTS...
Publication number
20080074564
Publication date
Mar 27, 2008
NEC Corporation
Shin-Ichi UEHARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING FINELY-STRUCTURED PARTS, FINELY-STRUCTURED PARTS...
Publication number
20080057731
Publication date
Mar 6, 2008
NEC Corporation
Shinichi UEHARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Structure in a substrate for the manufacturing of a semiconductor d...
Publication number
20080009139
Publication date
Jan 10, 2008
Thomas Hecht
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING FINELY-STRUCTURED PARTS, FINELY-STRUCTURED PARTS...
Publication number
20070291370
Publication date
Dec 20, 2007
NEC Corporation
Shinichi UEHARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for manufacturing a micro-electro-mechanical structure
Publication number
20070072428
Publication date
Mar 29, 2007
Dan W. Chilcott
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Liquid-based gravity-driven etching-stop technique for controlling...
Publication number
20060264058
Publication date
Nov 23, 2006
Wei-Chin Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of manufacturing a wiring board, a wiring board, a circuit e...
Publication number
20060209520
Publication date
Sep 21, 2006
Omron Corporation
Taku Masai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and system for xenon fluoride etching with enhanced efficiency
Publication number
20060065622
Publication date
Mar 30, 2006
Philip D. Floyd
B81 - MICRO-STRUCTURAL TECHNOLOGY