Processes for the planarisation of structures

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B81C1/00611

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00611Processes for the planarisation of structures

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Laser-assisted material phase-change and expulsion micro-machining...
- Patent number 12,077,432
- Issue date Sep 3, 2024
- Massachusetts Institute of Technology
- Prashant Patil
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing semiconductor structure and planarization...
- Patent number 11,377,347
- Issue date Jul 5, 2022
- United Microelectronics Corporation
- Xiang Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Superstrate and methods of using the same
- Patent number 11,018,018
- Issue date May 25, 2021
- Canon Kabushiki Kaisha
- Ozkan Ozturk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for forming inkjet nozzle devices
- Patent number 10,822,228
- Issue date Nov 3, 2020
- Memjet Technology Limited
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a planarization structure
- Patent number 10,804,112
- Issue date Oct 13, 2020
- STMicroelectronics (Crolles 2) SAS
- Loic Gaben
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for filling etched holes using first and second polymers
- Patent number 10,597,290
- Issue date Mar 24, 2020
- Memjet Technology Limited
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a MEMS and/or NEMS structure comprising at le...
- Patent number 10,585,074
- Issue date Mar 10, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Bruno Fain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for filling etched holes using photoimageable thermoplastic...
- Patent number 10,329,146
- Issue date Jun 25, 2019
- Memjet Technology Limited
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of reverse tone patterning
- Patent number 10,211,051
- Issue date Feb 19, 2019
- Canon Kabushiki Kaisha
- Niyaz Khusnatdinov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device with electrode connected to through wire, and method for man...
- Patent number 10,090,780
- Issue date Oct 2, 2018
- Canon Kabushiki Kaisha
- Shinan Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for composite substrate
- Patent number 9,935,257
- Issue date Apr 3, 2018
- NGK Insulators, Ltd.
- Kazumasa Kitamura
- B24 - GRINDING POLISHING
Information Patent Grant
Main pole layer with at least two sacrificial layers and a gap layer
- Patent number 9,922,671
- Issue date Mar 20, 2018
- Seagate Technology LLC
- Wei Tian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of polishing sapphire surfaces
- Patent number 9,896,604
- Issue date Feb 20, 2018
- Ecolab USA Inc.
- Kim Marie Long
- B24 - GRINDING POLISHING
Information Patent Grant
Ultrasonic transducer, method of producing same, and ultrasonic pro...
- Patent number 9,873,137
- Issue date Jan 23, 2018
- Hitachi, Ltd.
- Shuntaro Machida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for filling etched holes
- Patent number 9,708,183
- Issue date Jul 18, 2017
- Memjet Technology Limited
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a MEMS structure and use of the method
- Patent number 9,556,021
- Issue date Jan 31, 2017
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming planar sacrificial material in a MEMS device
- Patent number 9,487,395
- Issue date Nov 8, 2016
- Cavendish Kinetics, Inc.
- Brian I. Troy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a MEMS structure
- Patent number 9,334,160
- Issue date May 10, 2016
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 9,287,050
- Issue date Mar 15, 2016
- Kabushiki Kaisha Toshiba
- Tomohiro Saito
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processing for overcoming extreme topography
- Patent number 9,263,292
- Issue date Feb 16, 2016
- GLOBALFOUNDRIES Inc.
- Guy M. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for reconditioning semiconductor surface to facilitate bonding
- Patent number 8,956,884
- Issue date Feb 17, 2015
- DunAn Microstaq, Inc.
- Parthiban Arunasalam
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-leveling planarization materials for microelectronic topography
- Patent number 8,865,599
- Issue date Oct 21, 2014
- Brewer Science Inc.
- Dongshun Bai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processing for overcoming extreme topography
- Patent number 8,603,846
- Issue date Dec 10, 2013
- International Business Machines Corporation
- Guy A. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical components
- Patent number 8,236,694
- Issue date Aug 7, 2012
- Valtion teknillinen Tutkimuskeskus
- Jyrki Kiihamäki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planarity of pixel mirrors
- Patent number 8,203,776
- Issue date Jun 19, 2012
- Texas Instruments Incorporated
- Rosemary Urmese Anthraper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMP process flow for MEMS
- Patent number 8,124,527
- Issue date Feb 28, 2012
- Cavendish Kinetics, Inc.
- Joseph Damian Gordon Lacey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for the production of planar structures
- Patent number 8,003,537
- Issue date Aug 23, 2011
- IMEC
- Xavier Rottenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processing for overcoming extreme topography
- Patent number 7,915,064
- Issue date Mar 29, 2011
- International Business Machines Corporation
- Guy A. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical components
- Patent number 7,882,741
- Issue date Feb 8, 2011
- Valtion teknillinen Tutkimuskeskus
- Jyrki Kiihamäki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for filling vias
- Patent number 7,781,311
- Issue date Aug 24, 2010
- Texas Instruments Incorporated
- Mark Andrew Franklin
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
- Publication number 20240101413
- Publication date Mar 28, 2024
- Intel Corporation
- Jeremy D. Ecton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND PLANARIZATION...
- Publication number 20210354983
- Publication date Nov 18, 2021
- UNITED MICROELECTRONICS CORPORATION
- Xiang Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...
- Publication number 20210139321
- Publication date May 13, 2021
- Massachusetts Institute of Technology
- Prashant Patil
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUPERSTRATE AND METHODS OF USING THE SAME
- Publication number 20200185230
- Publication date Jun 11, 2020
- Canon Kabushiki Kaisha
- Ozkan Ozturk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FORMING INKJET NOZZLE DEVICES
- Publication number 20200180949
- Publication date Jun 11, 2020
- MEMJET TECHNOLOGY LIMITED
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FILLING ETCHED HOLES USING FIRST AND SECOND POLYMERS
- Publication number 20190263657
- Publication date Aug 29, 2019
- MEMJET TECHNOLOGY LIMITED
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING A MEMS AND/OR NEMS STRUCTURE COMPRISING AT LE...
- Publication number 20180202982
- Publication date Jul 19, 2018
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Bruno FAIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FILLING ETCHED HOLES USING PHOTOIMAGEABLE THERMOPLASTIC...
- Publication number 20170349431
- Publication date Dec 7, 2017
- Memjet Technology Ltd.
- Angus North
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING PLANAR SACRIFICIAL MATERIAL IN A MEMS DEVICE
- Publication number 20160207763
- Publication date Jul 21, 2016
- CAVENDISH KINETICS, INC.
- Brian I. TROY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE WITH ELECTRODE CONNECTED TO THROUGH WIRE, AND METHOD FOR MAN...
- Publication number 20160043660
- Publication date Feb 11, 2016
- Canon Kabushiki Kaisha
- Shinan Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROBE AND METHOD FOR MANUFACTURING THE PROBE
- Publication number 20150355235
- Publication date Dec 10, 2015
- MPI Corporation
- Yu-Chen HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MEMS STRUCTURE
- Publication number 20150336793
- Publication date Nov 26, 2015
- MURATA MANUFACTURING CO., LTD.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR FABRICATING MEMS DEVICES
- Publication number 20140374851
- Publication date Dec 25, 2014
- FREESCALE SEMICONDUCTOR, INC.
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESSING FOR OVERCOMING EXTREME TOPOGRAPHY
- Publication number 20140141618
- Publication date May 22, 2014
- International Business Machines Corporation
- Guy M. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-LEVELING PLANARIZATION MATERIALS FOR MICROELECTRONIC TOPOGRAPHY
- Publication number 20130113086
- Publication date May 9, 2013
- BREWER SCIENCE INC.
- Dongshun Bai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process for Reconditioning Semiconductor Surface to Facilitate Bonding
- Publication number 20120295371
- Publication date Nov 22, 2012
- DunAn Microstaq, Inc.
- Parthiban Arunasalam
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
- Publication number 20120228726
- Publication date Sep 13, 2012
- Tomohiro SAITO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMP Process Flow for MEMS
- Publication number 20110212593
- Publication date Sep 1, 2011
- Joseph Damian Gordon Lacey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESSING FOR OVERCOMING EXTREME TOPOGRAPHY
- Publication number 20110130005
- Publication date Jun 2, 2011
- International Business Machines Corporation
- Guy A. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL COMPONENTS
- Publication number 20110070675
- Publication date Mar 24, 2011
- Jyrki KIIHAMAKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Polysilicon Planarization Solution for Planarizing Low Temperature...
- Publication number 20100126961
- Publication date May 27, 2010
- Sang In Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANARITY OF PIXEL MIRRORS
- Publication number 20100128338
- Publication date May 27, 2010
- TEXAS INSTRUMENTS INCORPORATED
- Rosemary Urmese Anthraper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESSING FOR OVERCOMING EXTREME TOPOGRAPHY
- Publication number 20090298292
- Publication date Dec 3, 2009
- International Business Machines Corporation
- Guy A. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical device having a common ground plane and meth...
- Publication number 20090215213
- Publication date Aug 27, 2009
- Chia-Shing Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing micromechanical components
- Publication number 20090206423
- Publication date Aug 20, 2009
- Valtion teknillinen tutkimuskeskus
- Jyrki Kiihamaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrochemical Fabrication Methods Incorporating Dielectric Materi...
- Publication number 20090165295
- Publication date Jul 2, 2009
- University of Southern California
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Fabricating a Silicon-On-Insulator Structure
- Publication number 20080213981
- Publication date Sep 4, 2008
- FREESCALE SEMICONDUCTOR, INC.
- Philippe Renaud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process For Wafer Bonding
- Publication number 20080194076
- Publication date Aug 14, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fa-Yuan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and method for filling vias
- Publication number 20080150150
- Publication date Jun 26, 2008
- TEXAS INSTRUMENTS INCORPORATED
- Mark Andrew Franklin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method For Selective CMP Of Polysilicon
- Publication number 20080119051
- Publication date May 22, 2008
- Clarkson University
- Suryadevara V. Babu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Processes for the planarisation of structures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser-assisted material phase-change and expulsion micro-machining...

Method for manufacturing semiconductor structure and planarization...

Superstrate and methods of using the same

Process for forming inkjet nozzle devices

Method for forming a planarization structure

Process for filling etched holes using first and second polymers

Method of fabricating a MEMS and/or NEMS structure comprising at le...

Process for filling etched holes using photoimageable thermoplastic...

Method of reverse tone patterning

Device with electrode connected to through wire, and method for man...

Production method for composite substrate

Main pole layer with at least two sacrificial layers and a gap layer

Methods of polishing sapphire surfaces

Ultrasonic transducer, method of producing same, and ultrasonic pro...

Process for filling etched holes

Method of manufacturing a MEMS structure and use of the method

Method of forming planar sacrificial material in a MEMS device

Method of manufacturing a MEMS structure

MEMS and method of manufacturing the same

Processing for overcoming extreme topography

Process for reconditioning semiconductor surface to facilitate bonding

Self-leveling planarization materials for microelectronic topography

Processing for overcoming extreme topography

Method for manufacturing micromechanical components

Planarity of pixel mirrors

CMP process flow for MEMS

Method for the production of planar structures

Processing for overcoming extreme topography

Method for manufacturing micromechanical components

System and method for filling vias

Patents Applicationslast 30 patents

SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND PLANARIZATION...

Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...

SUPERSTRATE AND METHODS OF USING THE SAME

PROCESS FOR FORMING INKJET NOZZLE DEVICES

PROCESS FOR FILLING ETCHED HOLES USING FIRST AND SECOND POLYMERS

METHOD OF FABRICATING A MEMS AND/OR NEMS STRUCTURE COMPRISING AT LE...

PROCESS FOR FILLING ETCHED HOLES USING PHOTOIMAGEABLE THERMOPLASTIC...

METHOD OF FORMING PLANAR SACRIFICIAL MATERIAL IN A MEMS DEVICE

DEVICE WITH ELECTRODE CONNECTED TO THROUGH WIRE, AND METHOD FOR MAN...

PROBE AND METHOD FOR MANUFACTURING THE PROBE

METHOD OF MANUFACTURING A MEMS STRUCTURE

MEMS DEVICE AND METHOD FOR FABRICATING MEMS DEVICES

PROCESSING FOR OVERCOMING EXTREME TOPOGRAPHY

SELF-LEVELING PLANARIZATION MATERIALS FOR MICROELECTRONIC TOPOGRAPHY

Process for Reconditioning Semiconductor Surface to Facilitate Bonding

MEMS AND METHOD OF MANUFACTURING THE SAME

CMP Process Flow for MEMS

PROCESSING FOR OVERCOMING EXTREME TOPOGRAPHY

METHOD FOR MANUFACTURING MICROMECHANICAL COMPONENTS

Polysilicon Planarization Solution for Planarizing Low Temperature...

PLANARITY OF PIXEL MIRRORS

PROCESSING FOR OVERCOMING EXTREME TOPOGRAPHY

Microelectromechanical device having a common ground plane and meth...

Method for manufacturing micromechanical components

Electrochemical Fabrication Methods Incorporating Dielectric Materi...

Method of Fabricating a Silicon-On-Insulator Structure

Process For Wafer Bonding

System and method for filling vias

Method For Selective CMP Of Polysilicon