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Processes for the planarisation of structures
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B81C1/00611
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00611
Processes for the planarisation of structures
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Patents Grants
last 30 patents
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Patent Grant
Method for manufacturing semiconductor structure and planarization...
Patent number
11,377,347
Issue date
Jul 5, 2022
United Microelectronics Corporation
Xiang Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Superstrate and methods of using the same
Patent number
11,018,018
Issue date
May 25, 2021
Canon Kabushiki Kaisha
Ozkan Ozturk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for forming inkjet nozzle devices
Patent number
10,822,228
Issue date
Nov 3, 2020
Memjet Technology Limited
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming a planarization structure
Patent number
10,804,112
Issue date
Oct 13, 2020
STMicroelectronics (Crolles 2) SAS
Loic Gaben
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for filling etched holes using first and second polymers
Patent number
10,597,290
Issue date
Mar 24, 2020
Memjet Technology Limited
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating a MEMS and/or NEMS structure comprising at le...
Patent number
10,585,074
Issue date
Mar 10, 2020
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Bruno Fain
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for filling etched holes using photoimageable thermoplastic...
Patent number
10,329,146
Issue date
Jun 25, 2019
Memjet Technology Limited
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of reverse tone patterning
Patent number
10,211,051
Issue date
Feb 19, 2019
Canon Kabushiki Kaisha
Niyaz Khusnatdinov
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device with electrode connected to through wire, and method for man...
Patent number
10,090,780
Issue date
Oct 2, 2018
Canon Kabushiki Kaisha
Shinan Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Production method for composite substrate
Patent number
9,935,257
Issue date
Apr 3, 2018
NGK Insulators, Ltd.
Kazumasa Kitamura
B24 - GRINDING POLISHING
Information
Patent Grant
Main pole layer with at least two sacrificial layers and a gap layer
Patent number
9,922,671
Issue date
Mar 20, 2018
Seagate Technology LLC
Wei Tian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of polishing sapphire surfaces
Patent number
9,896,604
Issue date
Feb 20, 2018
Ecolab USA Inc.
Kim Marie Long
B24 - GRINDING POLISHING
Information
Patent Grant
Ultrasonic transducer, method of producing same, and ultrasonic pro...
Patent number
9,873,137
Issue date
Jan 23, 2018
Hitachi, Ltd.
Shuntaro Machida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for filling etched holes
Patent number
9,708,183
Issue date
Jul 18, 2017
Memjet Technology Limited
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a MEMS structure and use of the method
Patent number
9,556,021
Issue date
Jan 31, 2017
Murata Manufacturing Co., Ltd.
Altti Torkkeli
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming planar sacrificial material in a MEMS device
Patent number
9,487,395
Issue date
Nov 8, 2016
Cavendish Kinetics, Inc.
Brian I. Troy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a MEMS structure
Patent number
9,334,160
Issue date
May 10, 2016
Murata Manufacturing Co., Ltd.
Altti Torkkeli
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS and method of manufacturing the same
Patent number
9,287,050
Issue date
Mar 15, 2016
Kabushiki Kaisha Toshiba
Tomohiro Saito
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Processing for overcoming extreme topography
Patent number
9,263,292
Issue date
Feb 16, 2016
GLOBALFOUNDRIES Inc.
Guy M. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for reconditioning semiconductor surface to facilitate bonding
Patent number
8,956,884
Issue date
Feb 17, 2015
DunAn Microstaq, Inc.
Parthiban Arunasalam
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Self-leveling planarization materials for microelectronic topography
Patent number
8,865,599
Issue date
Oct 21, 2014
Brewer Science Inc.
Dongshun Bai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Processing for overcoming extreme topography
Patent number
8,603,846
Issue date
Dec 10, 2013
International Business Machines Corporation
Guy A. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing micromechanical components
Patent number
8,236,694
Issue date
Aug 7, 2012
Valtion teknillinen Tutkimuskeskus
Jyrki Kiihamäki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planarity of pixel mirrors
Patent number
8,203,776
Issue date
Jun 19, 2012
Texas Instruments Incorporated
Rosemary Urmese Anthraper
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMP process flow for MEMS
Patent number
8,124,527
Issue date
Feb 28, 2012
Cavendish Kinetics, Inc.
Joseph Damian Gordon Lacey
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for the production of planar structures
Patent number
8,003,537
Issue date
Aug 23, 2011
IMEC
Xavier Rottenberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Processing for overcoming extreme topography
Patent number
7,915,064
Issue date
Mar 29, 2011
International Business Machines Corporation
Guy A. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing micromechanical components
Patent number
7,882,741
Issue date
Feb 8, 2011
Valtion teknillinen Tutkimuskeskus
Jyrki Kiihamäki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for filling vias
Patent number
7,781,311
Issue date
Aug 24, 2010
Texas Instruments Incorporated
Mark Andrew Franklin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating submicron suspended objects and application t...
Patent number
7,754,506
Issue date
Jul 13, 2010
Altis Semiconductor
Pierre Vekeman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
Publication number
20240101413
Publication date
Mar 28, 2024
Intel Corporation
Jeremy D. Ecton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND PLANARIZATION...
Publication number
20210354983
Publication date
Nov 18, 2021
UNITED MICROELECTRONICS CORPORATION
Xiang Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Laser-Assisted Material Phase-Change and Expulsion Micro-Machining...
Publication number
20210139321
Publication date
May 13, 2021
Massachusetts Institute of Technology
Prashant Patil
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUPERSTRATE AND METHODS OF USING THE SAME
Publication number
20200185230
Publication date
Jun 11, 2020
Canon Kabushiki Kaisha
Ozkan Ozturk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR FORMING INKJET NOZZLE DEVICES
Publication number
20200180949
Publication date
Jun 11, 2020
MEMJET TECHNOLOGY LIMITED
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR FILLING ETCHED HOLES USING FIRST AND SECOND POLYMERS
Publication number
20190263657
Publication date
Aug 29, 2019
MEMJET TECHNOLOGY LIMITED
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FABRICATING A MEMS AND/OR NEMS STRUCTURE COMPRISING AT LE...
Publication number
20180202982
Publication date
Jul 19, 2018
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Bruno FAIN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR FILLING ETCHED HOLES USING PHOTOIMAGEABLE THERMOPLASTIC...
Publication number
20170349431
Publication date
Dec 7, 2017
Memjet Technology Ltd.
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING PLANAR SACRIFICIAL MATERIAL IN A MEMS DEVICE
Publication number
20160207763
Publication date
Jul 21, 2016
CAVENDISH KINETICS, INC.
Brian I. TROY
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE WITH ELECTRODE CONNECTED TO THROUGH WIRE, AND METHOD FOR MAN...
Publication number
20160043660
Publication date
Feb 11, 2016
Canon Kabushiki Kaisha
Shinan Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROBE AND METHOD FOR MANUFACTURING THE PROBE
Publication number
20150355235
Publication date
Dec 10, 2015
MPI Corporation
Yu-Chen HSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A MEMS STRUCTURE
Publication number
20150336793
Publication date
Nov 26, 2015
MURATA MANUFACTURING CO., LTD.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR FABRICATING MEMS DEVICES
Publication number
20140374851
Publication date
Dec 25, 2014
FREESCALE SEMICONDUCTOR, INC.
Lianjun Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESSING FOR OVERCOMING EXTREME TOPOGRAPHY
Publication number
20140141618
Publication date
May 22, 2014
International Business Machines Corporation
Guy M. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELF-LEVELING PLANARIZATION MATERIALS FOR MICROELECTRONIC TOPOGRAPHY
Publication number
20130113086
Publication date
May 9, 2013
BREWER SCIENCE INC.
Dongshun Bai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process for Reconditioning Semiconductor Surface to Facilitate Bonding
Publication number
20120295371
Publication date
Nov 22, 2012
DunAn Microstaq, Inc.
Parthiban Arunasalam
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
Publication number
20120228726
Publication date
Sep 13, 2012
Tomohiro SAITO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMP Process Flow for MEMS
Publication number
20110212593
Publication date
Sep 1, 2011
Joseph Damian Gordon Lacey
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESSING FOR OVERCOMING EXTREME TOPOGRAPHY
Publication number
20110130005
Publication date
Jun 2, 2011
International Business Machines Corporation
Guy A. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL COMPONENTS
Publication number
20110070675
Publication date
Mar 24, 2011
Jyrki KIIHAMAKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Polysilicon Planarization Solution for Planarizing Low Temperature...
Publication number
20100126961
Publication date
May 27, 2010
Sang In Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANARITY OF PIXEL MIRRORS
Publication number
20100128338
Publication date
May 27, 2010
TEXAS INSTRUMENTS INCORPORATED
Rosemary Urmese Anthraper
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESSING FOR OVERCOMING EXTREME TOPOGRAPHY
Publication number
20090298292
Publication date
Dec 3, 2009
International Business Machines Corporation
Guy A. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical device having a common ground plane and meth...
Publication number
20090215213
Publication date
Aug 27, 2009
Chia-Shing Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for manufacturing micromechanical components
Publication number
20090206423
Publication date
Aug 20, 2009
Valtion teknillinen tutkimuskeskus
Jyrki Kiihamaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrochemical Fabrication Methods Incorporating Dielectric Materi...
Publication number
20090165295
Publication date
Jul 2, 2009
University of Southern California
Adam L. Cohen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of Fabricating a Silicon-On-Insulator Structure
Publication number
20080213981
Publication date
Sep 4, 2008
FREESCALE SEMICONDUCTOR, INC.
Philippe Renaud
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process For Wafer Bonding
Publication number
20080194076
Publication date
Aug 14, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Fa-Yuan Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
System and method for filling vias
Publication number
20080150150
Publication date
Jun 26, 2008
TEXAS INSTRUMENTS INCORPORATED
Mark Andrew Franklin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method For Selective CMP Of Polysilicon
Publication number
20080119051
Publication date
May 22, 2008
Clarkson University
Suryadevara V. Babu
B81 - MICRO-STRUCTURAL TECHNOLOGY