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Micro-structural technology
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MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Specific applications of micro-electromechanical systems
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B81B2201/0271
Resonators ultrasonic resonators
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Patents Grants
last 30 patents
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Patent Grant
MEMS cavity with non-contaminating seal
Patent number
12,187,606
Issue date
Jan 7, 2025
SiTime Corporation
Michael Julian Daneman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonator and resonance device including same
Patent number
12,170,514
Issue date
Dec 17, 2024
Murata Manufacturing Co., Ltd.
Yoshihisa Inoue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
Patent number
12,145,838
Issue date
Nov 19, 2024
Vermon S.A.
Cyril Meynier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
Patent number
12,134,555
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Reduced light reflection package
Patent number
12,133,049
Issue date
Oct 29, 2024
Invensense, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-transducer chip ultrasound device
Patent number
12,099,150
Issue date
Sep 24, 2024
EXO IMAGING, INC.
Liang Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-acoustic wafer-level package and method of manufacture
Patent number
12,071,339
Issue date
Aug 27, 2024
RF360 SINGAPORE PTE. LTD.
Manuel Hofer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
Patent number
12,070,773
Issue date
Aug 27, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
SOC PMUT suitable for high-density system integration, array chip,...
Patent number
12,060,264
Issue date
Aug 13, 2024
NANJING SHENGXI XINYING TECHNOLOGY CO., LTD
Hui Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stress isolation using three-dimensional trenches
Patent number
12,054,385
Issue date
Aug 6, 2024
Texas Instruments Incorporated
Ting-Ta Yen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing monolithic integration of piezoelectric microm...
Patent number
12,037,239
Issue date
Jul 16, 2024
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical MEMS based monitoring system
Patent number
11,999,612
Issue date
Jun 4, 2024
Naiqian Han
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS resonator system
Patent number
11,987,495
Issue date
May 21, 2024
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
Patent number
11,944,998
Issue date
Apr 2, 2024
Korea Institute of Science and Technology
Byung Chul Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical structure including a functional element sit...
Patent number
11,939,215
Issue date
Mar 26, 2024
Robert Bosch GmbH
Penny Weir
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual-output microelectromechanical resonator and method of manufact...
Patent number
11,932,530
Issue date
Mar 19, 2024
STATHERA IP HOLDINGS INC.
George Xereas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro hemispherical resonator gyroscope, and an assembly method and...
Patent number
11,920,932
Issue date
Mar 5, 2024
NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY
Xuezhong Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having a connection portion formed of a eutectic alloy
Patent number
11,909,379
Issue date
Feb 20, 2024
Murata Manufacturing Co., Ltd.
Yoshihisa Inoue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultrasonic transducer, manufacturing method thereof, and ultrasonic...
Patent number
11,904,356
Issue date
Feb 20, 2024
Hitachi, Ltd.
Taiichi Takezaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method for forming the same
Patent number
11,897,759
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Po Chen Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,890,643
Issue date
Feb 6, 2024
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonance device and manufacturing method of resonance device
Patent number
11,881,838
Issue date
Jan 23, 2024
Murata Manufacturing Co., Ltd.
Kentarou Dehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultrasonic MEMS acoustic transducer with reduced stress sensitivity...
Patent number
11,865,581
Issue date
Jan 9, 2024
STMicroelectronics S.r.l.
Gabriele Gattere
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric microelectromechanical resonator device and correspon...
Patent number
11,855,604
Issue date
Dec 26, 2023
STMicroelectronics S.r.l.
Federico Vercesi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device comprising different types of microelectromech...
Patent number
11,851,323
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hsiang-Fu Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
Patent number
11,847,851
Issue date
Dec 19, 2023
Invensense, Inc.
Julius Ming-Lin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Non-planar ingress protection element for a sensor device
Patent number
11,838,708
Issue date
Dec 5, 2023
Knowles Electronics, LLC
John J. Albers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor and electronic device
Patent number
11,834,326
Issue date
Dec 5, 2023
Kabushiki Kaisha Toshiba
Kei Masunishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfabricated ultrasonic transducers and related apparatus and me...
Patent number
11,828,729
Issue date
Nov 28, 2023
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bottom electrode via structures for micromachined ultrasonic transd...
Patent number
11,806,747
Issue date
Nov 7, 2023
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
STACKED-DIE MEMS RESONATOR
Publication number
20250019229
Publication date
Jan 16, 2025
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Suspension for Resonators and MEMS Devices
Publication number
20250011162
Publication date
Jan 9, 2025
SiTime Corporation
Nicholas MILLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
Publication number
20250002334
Publication date
Jan 2, 2025
TEXAS INSTRUMENTS INCORPORATED
Simon Joshua Jacobs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
Publication number
20240425360
Publication date
Dec 26, 2024
Rohm Co., Ltd.
Toma FUJITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
Publication number
20240416385
Publication date
Dec 19, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESS ISOLATION USING THREE-DIMENSIONAL TRENCHES
Publication number
20240391758
Publication date
Nov 28, 2024
TEXAS INSTRUMENTS INCORPORATED
Ting-Ta YEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
Publication number
20240383005
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kang-Yi Lien
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
Publication number
20240375940
Publication date
Nov 14, 2024
Murata Manufacturing Co., Ltd.
Masakazu FUKUMITSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DIES EMBEDDED IN GLASS CORES
Publication number
20240327201
Publication date
Oct 3, 2024
Intel Corporation
Numair Ahmed
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MEMS TRANSDUCER DEVICE WITH THIN MEMBRAN...
Publication number
20240327203
Publication date
Oct 3, 2024
STMicroelectronics International N.V.
Mark Andrew SHAW
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD OF MEMS DEVICE
Publication number
20240317580
Publication date
Sep 26, 2024
Murata Manufacturing Co., Ltd.
Fumiya KUROKAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD OF MEMS DEVICE
Publication number
20240317578
Publication date
Sep 26, 2024
Murata Manufacturing Co., Ltd.
Fumiya KUROKAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical Devices For Higher Order Passive Temperature...
Publication number
20240294372
Publication date
Sep 5, 2024
Stathera IP Holdings Inc.
Anosh Daruwalla
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LENS AND EYEWEAR
Publication number
20240286891
Publication date
Aug 29, 2024
HS Vision Ltd.
Alexander MacDonald
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ULTRASONIC TRANSDUCER
Publication number
20240284121
Publication date
Aug 22, 2024
Murata Manufacturing Co., Ltd.
Shinsuke IKEUCHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SHEAR WAVE MODE PIEZOELECTRIC RESONATOR
Publication number
20240278285
Publication date
Aug 22, 2024
BIOMENSIO LTD
Jyrki KAITILA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL-OUTPUT MICROELECTROMECHANICAL RESONATOR AND METHOD OF MANUFACT...
Publication number
20240253975
Publication date
Aug 1, 2024
Stathera IP Holdings Inc.
George Xereas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS RESONANT SENSOR ADAPTED TO GENERATE A PULSE OUTPUT SIGNAL
Publication number
20240228266
Publication date
Jul 11, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Emmanuel HARDY
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...
Publication number
20240165663
Publication date
May 23, 2024
The Board of Trustees of the Leland Stanford Junior University
Bo Ma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...
Publication number
20240154599
Publication date
May 9, 2024
STMicroelectronics S.r.l.
Federico VERCESI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20240140782
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing company Ltd.
PO CHEN YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS RESONANT SENSOR ADAPTED TO GENERATE A PULSE OUTPUT SIGNAL
Publication number
20240132341
Publication date
Apr 25, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Emmanuel HARDY
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCERS AND RELATED APPARATUS AND ME...
Publication number
20240044846
Publication date
Feb 8, 2024
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BOTTOM ELECTRODE VIA STRUCTURES FOR MICROMACHINED ULTRASONIC TRANSD...
Publication number
20240024917
Publication date
Jan 25, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Three Dimensional Microstructures With Selectively Removed Regions...
Publication number
20240019249
Publication date
Jan 18, 2024
The Regents of the University of Michigan
Khalil NAJAFI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
REDUCED LIGHT REFLECTION PACKAGE
Publication number
20240015447
Publication date
Jan 11, 2024
InvenSense, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL STRUCTURE WITH BONDED COVER
Publication number
20240002218
Publication date
Jan 4, 2024
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC RE...
Publication number
20240002216
Publication date
Jan 4, 2024
TEXAS INSTRUMENTS INCORPORATED
Hakhamanesh MANSOORZARE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE COMPRISING DIFFERENT TYPES OF MICROELECTROMECH...
Publication number
20230406695
Publication date
Dec 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsiang-Fu Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20230399225
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing company Ltd.
PO CHEN YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY