Membership
Tour
Register
Log in
the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen
Follow
Industry
CPC
H01L21/02216
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/02216
the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods for depositing low-k dielectric films
Patent number
11,967,498
Issue date
Apr 23, 2024
Applied Materials, Inc.
Bo Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conformal deposition of silicon carbide films
Patent number
11,894,227
Issue date
Feb 6, 2024
Novellus Systems, Inc.
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition method
Patent number
11,881,396
Issue date
Jan 23, 2024
Tokyo Electron Limited
Koji Sasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
PECVD deposition system for deposition on selective side of the sub...
Patent number
11,851,760
Issue date
Dec 26, 2023
Lam Research Corporation
Fayaz Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and method
Patent number
11,837,515
Issue date
Dec 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yin-Jie Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Conformal damage-free encapsulation of chalcogenide materials
Patent number
11,832,533
Issue date
Nov 28, 2023
Lam Research Corporation
James Samuel Sims
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of depositing SiCON with C, O, and N compositional control
Patent number
11,823,893
Issue date
Nov 21, 2023
Applied Materials, Inc.
Mark Saly
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for pressure ramped plasma purge
Patent number
11,817,313
Issue date
Nov 14, 2023
Applied Materials, Inc.
Madhu Santosh Kumar Mutyala
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated capacitor with sidewall having reduced roughness
Patent number
11,798,979
Issue date
Oct 24, 2023
Texas Instruments Incorporated
Elizabeth Costner Stewart
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma enhanced deposition processes for controlled formation of ox...
Patent number
11,776,807
Issue date
Oct 3, 2023
ASM IP Holding, B.V.
Lingyun Jia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Techniques for improved low dielectric constant film processing
Patent number
11,756,796
Issue date
Sep 12, 2023
Applied Materials, Inc.
Rajesh Prasad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Films of desired composition and film properties
Patent number
11,732,350
Issue date
Aug 22, 2023
Novellus Systems, Inc.
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
11,735,412
Issue date
Aug 22, 2023
Kokusai Electric Corporation
Atsushi Sano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective PEALD of oxide on dielectric
Patent number
11,728,164
Issue date
Aug 15, 2023
ASM IP Holding B.V.
Eva Tois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
PECVD deposition system for deposition on selective side of the sub...
Patent number
11,725,283
Issue date
Aug 15, 2023
Lam Research Corporation
Fayaz Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Films of desired composition and film properties
Patent number
11,708,634
Issue date
Jul 25, 2023
Novellus Systems, Inc.
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Films of desired composition and film properties
Patent number
11,680,314
Issue date
Jun 20, 2023
Novellus Systems, Inc.
Bhadri N. Varadarajan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Films of desired composition and film properties
Patent number
11,680,315
Issue date
Jun 20, 2023
Novellus Systems, Inc.
Bhadri N. Varadarajan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device including polysilicon structures and method of...
Patent number
11,676,856
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
J. J. Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of selective deposition for forming fully self-aligned vias
Patent number
11,658,068
Issue date
May 23, 2023
Tokyo Electron Limited
Kandabara Tapily
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Porogen bonded gap filling material in semiconductor manufacturing
Patent number
11,658,120
Issue date
May 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo-Jiun Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a semiconductor device with air gaps for low capa...
Patent number
11,646,227
Issue date
May 9, 2023
Tokyo Electron Limited
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing resist pattern coating composition with use of...
Patent number
11,531,269
Issue date
Dec 20, 2022
NISSAN CHEMICAL CORPORATION
Shuhei Shigaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma enhanced deposition processes for controlled formation of me...
Patent number
11,501,965
Issue date
Nov 15, 2022
ASM IP Holding B.V.
Lingyun Jia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing a semiconductor device including a low-k d...
Patent number
11,476,419
Issue date
Oct 18, 2022
Samsung Electronics Co., Ltd.
Youngmin Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
PECVD deposition system for deposition on selective side of the sub...
Patent number
11,441,222
Issue date
Sep 13, 2022
Lam Research Corporation
Fayaz Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device having an extra low-k dielectric layer and met...
Patent number
11,417,602
Issue date
Aug 16, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Po-Cheng Shih
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microelectronic device substrate formed by additive process
Patent number
11,404,270
Issue date
Aug 2, 2022
Texas Instruments Incorporated
Benjamin Stassen Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for plasma depositing polymers comprising cyclic siloxanes...
Patent number
11,393,679
Issue date
Jul 19, 2022
GVD Corporation
W. Shannan O'Shaughnessy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma enhanced chemical vapor deposition of films for improved ver...
Patent number
11,365,476
Issue date
Jun 21, 2022
Applied Materials, Inc.
Praket P. Jha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
Publication number
20240145234
Publication date
May 2, 2024
Novellus Systems, Inc.
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MANUFACTURING METHOD OF INSULATION FILM
Publication number
20240112906
Publication date
Apr 4, 2024
ABIT TECHNOLOGIES CO., LTD
Kiyokazu NAKAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105443
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Kimihiko NAKATANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Deposition of Thick Layers of Silicon Dioxide
Publication number
20240096616
Publication date
Mar 21, 2024
SPTS TECHNOLOGIES LIMITED
Matt Edmonds
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
Publication number
20240087881
Publication date
Mar 14, 2024
Applied Materials, Inc.
Michael Haverty
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods of Depositing SiCON with C, O, and N Compositional Control
Publication number
20240047193
Publication date
Feb 8, 2024
Applied Materials, Inc.
Mark Saly
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILICON COMPOUND AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEV...
Publication number
20230406822
Publication date
Dec 21, 2023
DNF CO., LTD.
Sunhye HWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALKOXYDISILOXANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
Publication number
20230386825
Publication date
Nov 30, 2023
VERSUM MATERIALS US, LLC
MANCHAO XIAO
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD
Publication number
20230386947
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yin-Jie Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230343580
Publication date
Oct 26, 2023
Kokusai Electric Corporation
Atsushi SANO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SILICON PRECURSOR HAVING A HETEROCYCLIC GROUP, COMPOSITION FOR DEPO...
Publication number
20230307227
Publication date
Sep 28, 2023
Samsung Electronics Co., Ltd.
Sunhye HWANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICE INCLUDING POLYSILICON STRUCTURES AND METHOD OF...
Publication number
20230298935
Publication date
Sep 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
J. J. LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Porogen Bonded Gap Filling Material In Semiconductor Manufacturing
Publication number
20230299003
Publication date
Sep 21, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Bo-Jiun Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS USING HETEROGENEOUS P...
Publication number
20230203646
Publication date
Jun 29, 2023
LAM RESEARCH CORPORATION
Matthew Scott WEIMER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING LOW-K MATERIAL LAYER WITH HIGH-FREQUENCY POWER, S...
Publication number
20230207308
Publication date
Jun 29, 2023
ASM IP HOLDING B.V.
Chie Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Single Precursor Low-K Film Deposition and UV Cure for Advanced Tec...
Publication number
20230142684
Publication date
May 11, 2023
Applied Materials, Inc.
Bo Xie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...
Publication number
20230094012
Publication date
Mar 30, 2023
Applied Materials, Inc.
Ruitong Xiong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE RESIN COATING, PHO...
Publication number
20230076103
Publication date
Mar 9, 2023
Shin-Etsu Chemical Co., Ltd.
Hitoshi Maruyama
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
SEMICONDUCTOR DEVICE HAVING AN EXTRA LOW-K DIELECTRIC LAYER AND MET...
Publication number
20220359412
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Cheng SHIH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROELECTRONIC DEVICE SUBSTRATE FORMED BY ADDITIVE PROCESS
Publication number
20220336217
Publication date
Oct 20, 2022
TEXAS INSTRUMENTS INCORPORATED
Benjamin Stassen Cook
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MONOALKOXYSILANES AND DENSE ORGANOSILICA FILMS MADE THEREFROM
Publication number
20220301862
Publication date
Sep 22, 2022
VERSUM MATERIALS US, LLC
MANCHAO XIAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR SELECTIVE DEPOSITION OF DIELECTRIC ON DIELECTRIC
Publication number
20220238323
Publication date
Jul 28, 2022
TOKYO ELECTRON LIMITED
Robert Clark
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH THROUGHPUT DEPOSITION PROCESS
Publication number
20220238330
Publication date
Jul 28, 2022
Entegris, Inc.
Philip S.H. CHEN
C07 - ORGANIC CHEMISTRY
Information
Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
Publication number
20220220609
Publication date
Jul 14, 2022
Novellus Systems, Inc.
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
Publication number
20220220608
Publication date
Jul 14, 2022
Novellus Systems, Inc.
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
Publication number
20220220611
Publication date
Jul 14, 2022
Novellus Systems, Inc.
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILMS OF DESIRED COMPOSITION AND FILM PROPERTIES
Publication number
20220220610
Publication date
Jul 14, 2022
Novellus Systems, Inc.
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
Publication number
20220162755
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Fayaz Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
Publication number
20220162754
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Fayaz Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PECVD DEPOSITION SYSTEM FOR DEPOSITION ON SELECTIVE SIDE OF THE SUB...
Publication number
20220162753
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Fayaz Shaikh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...