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the micromechanical device and the control or processing electronics being integrated on the same substrate
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Industry
CPC
B81B2207/015
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2207/00
Micro-structural systems or auxiliary parts thereof
Current Industry
B81B2207/015
the micromechanical device and the control or processing electronics being integrated on the same substrate
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