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Using supercritical fluid
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CPC
B81C2201/117
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
Current Industry
B81C2201/117
Using supercritical fluid
Industries
Overview
Organizations
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Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for etching the silicon oxide layer of a semic...
Patent number
8,889,563
Issue date
Nov 18, 2014
Pukyong National University Industry—University Cooperation Foundation
Kwon-Taek Lim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for producing structural body and etchant for silicon oxide...
Patent number
7,670,496
Issue date
Mar 2, 2010
Sony Corporation
Koichiro Saga
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for stripping sacrificial layer in MEMS assembly
Patent number
7,432,572
Issue date
Oct 7, 2008
Texas Instruments Incorporated
Joshua Malone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vapor phase etching MEMS devices
Patent number
7,279,431
Issue date
Oct 9, 2007
Semitool, Inc.
Eric J. Bergman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Removal of MEMS sacrificial layers using supercritical fluid/chemic...
Patent number
7,160,815
Issue date
Jan 9, 2007
Advanced Technology Materials, Inc.
Michael B. Korzenski
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Etching method
Patent number
7,105,447
Issue date
Sep 12, 2006
Sony Corporation
Tsutomu Oosaka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for removing a sacrificial material with a compressed fluid
Patent number
6,958,123
Issue date
Oct 25, 2005
Reflectivity, Inc.
Jason S. Reid
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for stripping sacrificial layer in MEMS assembly
Patent number
6,951,769
Issue date
Oct 4, 2005
Texas Instruments Incorporated
Joshua Malone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for reducing leaching in metal-coated MEMS
Patent number
6,939,574
Issue date
Sep 6, 2005
PTS Corporation
Bevan Staple
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Drying resist with a solvent bath and supercritical CO2
Patent number
6,928,746
Issue date
Aug 16, 2005
Tokyo Electron Limited
Chantal J. Arena-Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and apparatus for cleaning and/or treating a substrate usin...
Patent number
6,782,900
Issue date
Aug 31, 2004
MiCell Technologies, Inc.
James DeYoung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of undercutting micro-mechanical device with super-critical...
Patent number
6,737,225
Issue date
May 18, 2004
Texas Instruments Incorporated
Seth Andrian Miller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for the manufacture of a thin film actuated mirror array
Patent number
6,203,715
Issue date
Mar 20, 2001
Daewoo Electronics Co., Ltd.
You-Kwang Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated micromechanical sensor device and process for producing it
Patent number
6,133,059
Issue date
Oct 17, 2000
Infineon Technologies AG
Wolfgang Werner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of cleaning and treating a semiconductor device including a...
Patent number
6,024,801
Issue date
Feb 15, 2000
Texas Instruments Incorporated
Robert M. Wallace
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for preventing micromechanical structures from adhering to a...
Patent number
5,766,367
Issue date
Jun 16, 1998
Sandia Corporation
James H. Smith
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated micromechanical sensor device
Patent number
5,744,719
Issue date
Apr 28, 1998
Siemens Aktiengesellschaft
Wolfgang Werner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of unsticking components of micro-mechanical devices
Patent number
5,482,564
Issue date
Jan 9, 1996
Texas Instruments Incorporated
Monte A. Douglas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and product for fabricating a resonant-bridge microaccelerom...
Patent number
4,893,509
Issue date
Jan 16, 1990
General Motors Corporation
Bernard A. MacIver
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR ETCHING THE SILICON OXIDE LAYER OF A SEMIC...
Publication number
20120196445
Publication date
Aug 2, 2012
Pukyong National University
Kwon-Taek LIM
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Depositing an Anti-Adhesion Layer
Publication number
20090004388
Publication date
Jan 1, 2009
Franz Larmer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for stripping sacrificial layer in MEMS assembly
Publication number
20060014312
Publication date
Jan 19, 2006
Texas Instruments, Inc.
Joshua Malone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process for producing structural body and etchant for silicon oxide...
Publication number
20050205515
Publication date
Sep 22, 2005
Koichiro Saga
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for removing a sacrificial material with a compressed fluid
Publication number
20050164127
Publication date
Jul 28, 2005
Jason S. Reid
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Removal of MEMS sacrificial layers using supercritical fluid/chemic...
Publication number
20050118813
Publication date
Jun 2, 2005
Michael B. Korzenski
B08 - CLEANING
Information
Patent Application
Removal of MEMS sacrificial layers using supercritical fluid/chemic...
Publication number
20050118832
Publication date
Jun 2, 2005
Michael B. Korzenski
B08 - CLEANING
Information
Patent Application
Etching process
Publication number
20050112887
Publication date
May 26, 2005
Junichi Muramoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Etching method
Publication number
20050106892
Publication date
May 19, 2005
SONY CORPORATION
Tsutomu Oosaka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Surface treatment method, semiconductor device, method of fabricati...
Publication number
20040259357
Publication date
Dec 23, 2004
Koichiro Saga
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vapor phase etching MEMS devices
Publication number
20040259370
Publication date
Dec 23, 2004
Semitool, Inc.
Eric J. Bergman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for stripping sacrificial layer in MEMS assembly
Publication number
20040248417
Publication date
Dec 9, 2004
TEXAS INSTRUMENTS INCORPORATED
Joshua J. Malone
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for releasing and drying moveable elements of micro-electron...
Publication number
20040139987
Publication date
Jul 22, 2004
David J. Mount
B08 - CLEANING
Information
Patent Application
Drying resist with a solvent bath and supercritical CO2
Publication number
20040035021
Publication date
Feb 26, 2004
Chantal J. Arena-Foster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for reducing leaching in metal-coated MEMS
Publication number
20040022931
Publication date
Feb 5, 2004
PTS Corporation
Bevan Staple
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process and apparatus for contacting a precision surface with liqui...
Publication number
20030196679
Publication date
Oct 23, 2003
International Business Machines Corporation
John Michael Cotte
B08 - CLEANING
Information
Patent Application
Method of undercutting micro-mechanical device with super-critical...
Publication number
20030124462
Publication date
Jul 3, 2003
TEXAS INSTRUMENTS INCORPORATED
Seth Andrian Miller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods for formation of air gap interconnects
Publication number
20030073302
Publication date
Apr 17, 2003
REFLECTIVITY, INC., a California corporation
Andrew G. Huibers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods of applying coatings to micro electromechanical devices usi...
Publication number
20030064149
Publication date
Apr 3, 2003
Seth A. Miller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for removing a sacrificial material with a compressed fluid
Publication number
20030047533
Publication date
Mar 13, 2003
REFLECTIVITY, INC., a California corporation
Jason S. Reid
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods and apparatus for cleaning and/or treating a substrate usin...
Publication number
20030047195
Publication date
Mar 13, 2003
James DeYoung
B81 - MICRO-STRUCTURAL TECHNOLOGY