X-ray radiation generated from plasma

Industry

CPC
H05G2/001

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Parent Industries

HELECTRICITY H05Electric techniques H05GX-RAY TECHNIQUE H05G2/00Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes

Current Industry

H05G2/001X-ray radiation generated from plasma

Industries

Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet radiation in genomic sequencing and other appli...
- Patent number 11,718,871
- Issue date Aug 8, 2023
- Supriya Jaiswal
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
EUV radiation source, insert for an EUV radiation source and insert...
- Patent number 11,550,225
- Issue date Jan 10, 2023
- Carl Zeiss SMT GmbH
- Iris Pilch
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of operating semiconductor apparatus and semiconductor appar...
- Patent number 11,243,479
- Issue date Feb 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsiang Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle beam irradiation apparatus, charged particle beam...
- Patent number 10,790,110
- Issue date Sep 29, 2020
- NUFLARE TECHNOLOGY, INC.
- Munehiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-temperature plasma raw material supply apparatus and extreme u...
- Patent number 10,609,802
- Issue date Mar 31, 2020
- Ushio Denki Kabushiki Kaisha
- Akihisa Nagano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet radiation in genomic sequencing and other appli...
- Patent number 10,519,495
- Issue date Dec 31, 2019
- Supriya Jaiswal
- Supriya Jaiswal
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Radiation system and optical device
- Patent number 10,359,710
- Issue date Jul 23, 2019
- ASML Netherlands B.V.
- Hendrikus Gijsbertus Schimmel
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Electron-coupled transformer
- Patent number 10,181,376
- Issue date Jan 15, 2019
- Advanced Fusion Systems LLC
- Curtis A. Birnbach
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for decontaminating windows of an EUV source module
- Patent number 10,165,664
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsin-Feng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet lithography system with debris trapper on exhau...
- Patent number 10,162,277
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shang-Chieh Chien
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for monitoring a radiation source, radiation source, method...
- Patent number 10,042,260
- Issue date Aug 7, 2018
- ASML Netherlands B.V.
- Erik Willem Bogaart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV light source for generating a usable output beam for a projecti...
- Patent number 9,955,563
- Issue date Apr 24, 2018
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet generation device and exposure system including...
- Patent number 9,857,690
- Issue date Jan 2, 2018
- Samsung Electronics Co., Ltd.
- Hoyeon Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Differential phase contrast X-ray imaging system and components
- Patent number 9,823,202
- Issue date Nov 21, 2017
- The Johns Hopkins University
- Daniel Stutman
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Apparatus, a device and a device manufacturing method
- Patent number 9,778,574
- Issue date Oct 3, 2017
- ASML Netherlands B.V.
- Sander Catharina Reinier Derks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for transverse pumping of laser-sustained plasma
- Patent number 9,723,703
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fuel system for lithographic apparatus, EUV source, lithographic ap...
- Patent number 9,648,714
- Issue date May 9, 2017
- ASML Netherlands B.V.
- Wilbert Jan Mestrom
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and arrangement for generating a jet of fluid, method and sy...
- Patent number 9,642,233
- Issue date May 2, 2017
- Ecole Polytechnique
- Soriba Franciszek (François) Sylla
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Extreme ultraviolet lithography collector contamination reduction
- Patent number 9,625,824
- Issue date Apr 18, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Cheng Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser-driven light source for generating light from a plasma in an...
- Patent number 9,609,732
- Issue date Mar 28, 2017
- Energetiq Technology, Inc.
- Donald K. Smith
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Foil trap and light source device using such foil trap
- Patent number 9,599,812
- Issue date Mar 21, 2017
- Ushio Denki Kabushiki Kaisha
- Christof Metzmacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Arrangement for cooling a plasma-based radiation source with a meta...
- Patent number 9,581,392
- Issue date Feb 28, 2017
- Ushio Denki Kabushiki Kaisha
- Gota Niimi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Differential phase contrast X-ray imaging system and components
- Patent number 9,557,279
- Issue date Jan 31, 2017
- The Johns Hopkins University
- Daniel Stutman
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Systems and methods to avoid instability conditions in a source pla...
- Patent number 9,536,631
- Issue date Jan 3, 2017
- ASML Netherlands B.V.
- Daniel Jason Riggs
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of aligning a laser-based radiation source
- Patent number 9,485,847
- Issue date Nov 1, 2016
- Nutech Ventures
- Donald Umstadter
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source for generating a used output beam for a projection...
- Patent number 9,477,025
- Issue date Oct 25, 2016
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for controlling an EUV source
- Patent number 9,455,586
- Issue date Sep 27, 2016
- Ushio Denki Kabushiki Kaisha
- Mohamad Hussein El-Husseini
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Radiation source, lithographic apparatus and device manufacturing m...
- Patent number 9,414,477
- Issue date Aug 9, 2016
- ASML Netherlands B.V.
- Erik Roelof Loopstra
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Photo-masks for lithography
- Patent number 9,411,222
- Issue date Aug 9, 2016
- Zygo Corporation
- Marc Tricard
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Final focus assembly for extreme ultraviolet light source
- Patent number 9,374,882
- Issue date Jun 21, 2016
- ASML Netherlands B.V.
- Paul A. McKenzie
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Extreme Ultraviolet Radiation in Genomic Sequencing and Other Appli...
- Publication number 20200140941
- Publication date May 7, 2020
- Supriya Jaiswal
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Charged Particle Beam Irradiation Apparatus, Charged Particle Beam...
- Publication number 20190304737
- Publication date Oct 3, 2019
- NUFLARE TECHNOLOGY, INC.
- Munehiro OGASAWARA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Device For Monitoring A Radiation Source, Radiation Source, Method...
- Publication number 20170307978
- Publication date Oct 26, 2017
- ASML NETHERLANDS B.V.
- Erik Willem BOGAART
- G01 - MEASURING TESTING
Information Patent Application
Extreme Ultraviolet Radiation In Genomic Sequencing And Other Appli...
- Publication number 20170218440
- Publication date Aug 3, 2017
- Supriya Jaiswal
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
EXTREME ULTRAVIOLET GENERATION DEVICE AND EXPOSURE SYSTEM INCLUDING...
- Publication number 20170059998
- Publication date Mar 2, 2017
- Samsung Electronics Co., Ltd.
- Hoyeon KIM
- G02 - OPTICS
Information Patent Application
APPARATUS GENERATING EXTREME ULTRAVIOLET LIGHT AND EXPOSURE SYSTEM...
- Publication number 20170031142
- Publication date Feb 2, 2017
- Samsung Electronics Co., Ltd.
- Eokbong KIM
- G02 - OPTICS
Information Patent Application
PHOTO-MASKS FOR LITHOGRAPHY
- Publication number 20150286129
- Publication date Oct 8, 2015
- Zygo Corporation
- Marc Tricard
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Arrangement for Cooling a Plasma-Based Radiation Source with a Meta...
- Publication number 20150247679
- Publication date Sep 3, 2015
- Ushio Denki Kabushiki Kaisha
- Gota NIIMI
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
EUV LIGHT SOURCE FOR GENERATING A USABLE OUTPUT BEAM FOR A PROJECTI...
- Publication number 20150173163
- Publication date Jun 18, 2015
- Carl Zeiss SMT GMBH
- Ingo Saenger
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
DIFFERENTIAL PHASE CONTRAST X-RAY IMAGING SYSTEM AND COMPONENTS
- Publication number 20140328457
- Publication date Nov 6, 2014
- The Johns Hopkins University
- Daniel Stutman
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR MANUFACTURING A TARGET FOR THE EMISSION OF PH...
- Publication number 20140287140
- Publication date Sep 25, 2014
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Jean-Paul PERIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONTROLLING AN EUV SOURCE
- Publication number 20140176083
- Publication date Jun 26, 2014
- Ushio Denki Kabushiki Kaisha
- Mohamad Hussein EL-HUSSEINI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
APPARATUS, SYSTEM, AND METHOD FOR SEPARATING GASES AND MITIGATING D...
- Publication number 20140166051
- Publication date Jun 19, 2014
- KLA-Tencor Corporation
- Karl R. Umstadter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser-Driven Light Source
- Publication number 20140117258
- Publication date May 1, 2014
- Energetiq Technology, Inc.
- Donald K. Smith
- B82 - NANO-TECHNOLOGY
Information Patent Application
Optical Characterization Systems Employing Compact Synchrotron Radi...
- Publication number 20140048707
- Publication date Feb 20, 2014
- KLA-Tencor Corporation
- Yanwei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGETS AND PROCESSES FOR FABRICATING SAME
- Publication number 20140030542
- Publication date Jan 30, 2014
- Jesse D. Adams
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GEN...
- Publication number 20140008552
- Publication date Jan 9, 2014
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Drift Tube
- Publication number 20130266104
- Publication date Oct 10, 2013
- ADVANCED FUSION SYSTEMS LLC
- Curtis A. Birnbach
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Electron-Coupled Transformer
- Publication number 20130265130
- Publication date Oct 10, 2013
- ADVANCED FUSION SYSTEMS LLC
- Curtis A. Birnbach
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...
- Publication number 20130221247
- Publication date Aug 29, 2013
- GIGAPHOTON INC.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHIC APPARATUS, EUV RADIATION GENERATION APPARATUS AND DEVI...
- Publication number 20130141709
- Publication date Jun 6, 2013
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DIFFERENTIAL PHASE CONTRAST X-RAY IMAGING SYSTEM AND COMPONENTS
- Publication number 20130028378
- Publication date Jan 31, 2013
- The Johns Hopkins University
- Daniel Stutman
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINANCE DISTRIBUTION DETECTION METHOD IN EXTREME ULTRAVIOLET LI...
- Publication number 20130010282
- Publication date Jan 10, 2013
- Ushio Denki Kabushiki Kaisha
- Daiki Yamatani
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
COLLECTOR MIRROR ASSEMBLY AND EXTREME ULTRAVIOLET LIGHT SOURCE DEVI...
- Publication number 20120326058
- Publication date Dec 27, 2012
- Ushio Denki Kabushiki Kaisha
- Hiroto Sato
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND...
- Publication number 20120298134
- Publication date Nov 29, 2012
- GIGAPHOTON INC.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGETS AND PROCESSES FOR FABRICATING SAME
- Publication number 20120298624
- Publication date Nov 29, 2012
- Thomas Cowan
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Evaporative thermal management of grazing incidence collectors for...
- Publication number 20120281189
- Publication date Nov 8, 2012
- MEDIA LARIO S.R.L
- Boris Grek
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
EUV RADIATION SOURCE COMPRISING A DROPLET ACCELERATOR AND LITHOGRAP...
- Publication number 20120280149
- Publication date Nov 8, 2012
- ASML NETHERLANDS B.V.
- Wilbert Jan Mestrom
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and Arrangement for the Adjustment of Characteristics of a B...
- Publication number 20120248327
- Publication date Oct 4, 2012
- XTREME TECHNOLOGIES GMBH
- Denis Bolshukhin
- G01 - MEASURING TESTING
Information Patent Application
BIOLOGICAL LASER PLASMA X-RAY POINT SOURCE
- Publication number 20120228523
- Publication date Sep 13, 2012
- TATA INSTITUTE OF FUNDAMENTAL RESEARCH
- Krishnamurthy Manchikanti
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

X-ray radiation generated from plasma

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Extreme ultraviolet radiation in genomic sequencing and other appli...

EUV radiation source, insert for an EUV radiation source and insert...

Method of operating semiconductor apparatus and semiconductor appar...

Charged particle beam irradiation apparatus, charged particle beam...

High-temperature plasma raw material supply apparatus and extreme u...

Extreme ultraviolet radiation in genomic sequencing and other appli...

Radiation system and optical device

Electron-coupled transformer

Apparatus for decontaminating windows of an EUV source module

Extreme ultraviolet lithography system with debris trapper on exhau...

Device for monitoring a radiation source, radiation source, method...

EUV light source for generating a usable output beam for a projecti...

Extreme ultraviolet generation device and exposure system including...

Differential phase contrast X-ray imaging system and components

Apparatus, a device and a device manufacturing method

System and method for transverse pumping of laser-sustained plasma

Fuel system for lithographic apparatus, EUV source, lithographic ap...

Method and arrangement for generating a jet of fluid, method and sy...

Extreme ultraviolet lithography collector contamination reduction

Laser-driven light source for generating light from a plasma in an...

Foil trap and light source device using such foil trap

Arrangement for cooling a plasma-based radiation source with a meta...

Differential phase contrast X-ray imaging system and components

Systems and methods to avoid instability conditions in a source pla...

Method of aligning a laser-based radiation source

EUV light source for generating a used output beam for a projection...

Method for controlling an EUV source

Radiation source, lithographic apparatus and device manufacturing m...

Photo-masks for lithography

Final focus assembly for extreme ultraviolet light source

Patents Applicationslast 30 patents

Extreme Ultraviolet Radiation in Genomic Sequencing and Other Appli...

Charged Particle Beam Irradiation Apparatus, Charged Particle Beam...

Device For Monitoring A Radiation Source, Radiation Source, Method...

Extreme Ultraviolet Radiation In Genomic Sequencing And Other Appli...

EXTREME ULTRAVIOLET GENERATION DEVICE AND EXPOSURE SYSTEM INCLUDING...

APPARATUS GENERATING EXTREME ULTRAVIOLET LIGHT AND EXPOSURE SYSTEM...

PHOTO-MASKS FOR LITHOGRAPHY

Arrangement for Cooling a Plasma-Based Radiation Source with a Meta...

EUV LIGHT SOURCE FOR GENERATING A USABLE OUTPUT BEAM FOR A PROJECTI...

DIFFERENTIAL PHASE CONTRAST X-RAY IMAGING SYSTEM AND COMPONENTS

METHOD AND SYSTEM FOR MANUFACTURING A TARGET FOR THE EMISSION OF PH...

METHOD FOR CONTROLLING AN EUV SOURCE

APPARATUS, SYSTEM, AND METHOD FOR SEPARATING GASES AND MITIGATING D...

Laser-Driven Light Source

Optical Characterization Systems Employing Compact Synchrotron Radi...

TARGETS AND PROCESSES FOR FABRICATING SAME

TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GEN...

Drift Tube

Electron-Coupled Transformer

COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...

LITHOGRAPHIC APPARATUS, EUV RADIATION GENERATION APPARATUS AND DEVI...

DIFFERENTIAL PHASE CONTRAST X-RAY IMAGING SYSTEM AND COMPONENTS

ILLUMINANCE DISTRIBUTION DETECTION METHOD IN EXTREME ULTRAVIOLET LI...

COLLECTOR MIRROR ASSEMBLY AND EXTREME ULTRAVIOLET LIGHT SOURCE DEVI...

METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND...

TARGETS AND PROCESSES FOR FABRICATING SAME

Evaporative thermal management of grazing incidence collectors for...

EUV RADIATION SOURCE COMPRISING A DROPLET ACCELERATOR AND LITHOGRAP...

Method and Arrangement for the Adjustment of Characteristics of a B...

BIOLOGICAL LASER PLASMA X-RAY POINT SOURCE