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3162767
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Information
Patent Grant
3162767
References
Source
Patent Number
3,162,767
Date Filed
Not available
Date Issued
Tuesday, December 22, 1964
60 years ago
CPC
H01J37/3056 - for microworking
B23K15/00 - Electron-beam welding or cutting
G01N23/225 - using electron or ion microprobe or incident electron or ion beam
H01C17/2404 - by charged particle impact
H01J37/3005 - Observing the objects or the point of impact on the object
H01J37/302 - Controlling tubes by external information
H01L49/02 - Thin-film or thick-film devices
US Classifications
850 - Scanning-probe techniques or apparatus
073 - Measuring and testing
219 - Electric heating
250 - Radiant energy
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