3666553

Information

• Patent Grant
• 3666553

• References
• Source

• Patent Number

  3,666,553

• Date Filed

  Not available

• Date Issued

  Tuesday, May 30, 1972
  52 years ago

• CPC

  • H01L31/02161 - for devices characterised by at least one potential jump barrier or surface barrier
  • C23C14/0617 - AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
  • H01L23/29 - characterised by the material
  • H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
  • Y10S148/017 - Clean surfaces
  • Y10S148/022 - Controlled atmosphere
  • Y10S148/049 - Equivalence and options
  • Y10S148/056 - Gallium arsenide
  • Y10S148/065 - Gp III-V generic compounds-processing
  • Y10S148/119 - Phosphides of gallium or indium
  • Y10S148/122 - Polycrystalline
  • Y10S148/15 - Silicon on sapphire SOS
  • Y10S148/158 - Sputtering
  • Y10S148/169 - Vacuum deposition
  • Y10S438/967 - Semiconductor on specified insulator

• US Classifications

  • 148 - Metal treatment
  • 257 - Active solid-state devices
  • 427 - Coating processes
  • 438 - Semiconductor device manufacturing: process