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3839111
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Information
Patent Grant
3839111
References
Source
Patent Number
3,839,111
Date Filed
Not available
Date Issued
Tuesday, October 1, 1974
50 years ago
CPC
H01L23/293 - Organic
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/31111 - by chemical means
H01L21/31144 - using masks
H01L23/4855 - Overhang structure
H01L23/522 - including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Y10S438/978 - forming tapered edges on substrate or adjacent layers
US Classifications
438 - Semiconductor device manufacturing: process
216 - Etching a substrate: processes
252 - Compositions
257 - Active solid-state devices
430 - Radiation imagery chemistry: process, composition, or product thereof
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