3873341

Information

• Patent Grant
• 3873341

• References
• Source

• Patent Number

  3,873,341

• Date Filed

  Not available

• Date Issued

  Tuesday, March 25, 1975
  49 years ago

• CPC

  • C23C14/042 - using masks
  • B41M5/26 - Thermography; Marking by high energetic means
  • C23C14/0036 - Reactive sputtering
  • C23C14/085 - of iron group metals
  • C23C14/58 - After-treatment
  • C23C14/5806 - Thermal treatment
  • C23C14/5846 - Reactive treatment
  • C23C14/5873 - Removal of material
  • C23C16/042 - using masks
  • C23C16/406 - of iron group metals
  • C30B31/185 - Pattern diffusion
  • G03C1/705 - Compositions containing chalcogenides, metals or alloys thereof, as photosensitive substances
  • G03F7/0043 - Chalcogenides; Silicon, germanium, arsenic or derivatives thereof; Metals, oxides or alloys thereof
  • H01L21/31683 - of metallic layers

• US Classifications

  • 430 - Radiation imagery chemistry: process, composition, or product thereof
  • 204 - Chemistry: electrical and wave energy
  • 257 - Active solid-state devices
  • 427 - Coating processes