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3886004
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Information
Patent Grant
3886004
References
Source
Patent Number
3,886,004
Date Filed
Not available
Date Issued
Tuesday, May 27, 1975
49 years ago
CPC
H01L21/76202 - using a local oxidation of silicon
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02238 - silicon in uncombined form
H01L21/02255 - formation by thermal treatment
H01L21/31662 - of silicon in uncombined form
Y10S148/037 - Diffusion-deposition
Y10S148/043 - Dual dielectric
Y10S148/051 - Etching
Y10S148/085 - Isolated-integrated
Y10S148/106 - Masks, special
Y10S148/116 - Oxidation, differential
Y10S148/118 - Oxide films
Y10S148/173 - Washed emitter
Y10S438/911 - Differential oxidation and etching
Y10S438/981 - Utilizing varying dielectric thickness
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
257 - Active solid-state devices
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