Patent Application
20210057230
Embodiments of the disclosure are in the field of semiconductor structures and processing and, in particular, carbon-based dielectric materials for semiconductor structure fabrication, and the resulting structures.
For the past several decades, the scaling of features in integrated circuits has been a driving force behind an ever-growing semiconductor industry. Scaling to smaller and smaller features enables increased densities of functional units on the limited real estate of semiconductor chips.
In a first aspect, integrated circuits commonly include electrically conductive microelectronic structures, which are known in the art as vias, to electrically connect metal lines or other interconnects above the vias to metal lines or other interconnects below the vias. Vias are typically formed by a lithographic process. Representatively, a photoresist layer may be spin coated over a dielectric layer, the photoresist layer may be exposed to patterned actinic radiation through a patterned mask, and then the exposed layer may be developed in order to form an opening in the photoresist layer. Next, an opening for the via may be etched in the dielectric layer by using the opening in the photoresist layer as an etch mask. This opening is referred to as a via opening. Finally, the via opening may be filled with one or more metals or other conductive materials to form the via.
One challenge is that the overlay between the vias and the overlying interconnects, and the overlay between the vias and the underlying landing interconnects, generally need to be controlled to high tolerances on the order of a quarter of the via pitch. As via pitches scale ever smaller over time, the overlay tolerances tend to scale with them at an even greater rate than lithographic equipment is able to keep up. Thus, improvements are needed in the area of via and related interconnect manufacturing technologies.
In a second aspect, multi-gate transistors, such as tri-gate transistors, have become more prevalent as device dimensions continue to scale down. In conventional processes, tri-gate or other non-planar transistors are generally fabricated on either bulk silicon substrates or silicon-on-insulator substrates. In some instances, bulk silicon substrates are preferred due to their lower cost and compatibility with the existing high-yielding bulk silicon substrate infrastructure. Scaling multi-gate transistors has not been without consequence, however. As the dimensions of these fundamental building blocks of microelectronic circuitry are reduced and as the sheer number of fundamental building blocks fabricated in a given region is increased, the constraints on the semiconductor processes used to fabricate these building blocks have become overwhelming. Thus, improvements are needed in the area of non-planar transistor manufacturing technologies.
Carbon-based dielectric materials for semiconductor structure fabrication, and the resulting structures, are described. In the following description, numerous specific details are set forth, such as specific integration and material regimes, in order to provide a thorough understanding of embodiments of the present disclosure. It will be apparent to one skilled in the art that embodiments of the present disclosure may be practiced without these specific details. In other instances, well-known features, such as integrated circuit design layouts, are not described in detail in order to not unnecessarily obscure embodiments of the present disclosure. Furthermore, it is to be appreciated that the various embodiments shown in the Figures are illustrative representations and are not necessarily drawn to scale.
Certain terminology may also be used in the following description for the purpose of reference only, and thus are not intended to be limiting. For example, terms such as “upper”, “lower”, “above”, “below,” “bottom,” and “top” refer to directions in the drawings to which reference is made. Terms such as “front”, “back”, “rear”, and “side” describe the orientation and/or location of portions of the component within a consistent but arbitrary frame of reference which is made clear by reference to the text and the associated drawings describing the component under discussion. Such terminology may include the words specifically mentioned above, derivatives thereof, and words of similar import.
Embodiments described herein may be directed to front-end-of-line (FEOL) semiconductor processing and structures. FEOL is the first portion of integrated circuit (IC) fabrication where the individual devices (e.g., transistors, capacitors, resistors, etc.) are patterned in the semiconductor substrate or layer. FEOL generally covers everything up to (but not including) the deposition of metal interconnect layers. Following the last FEOL operation, the result is typically a wafer with isolated transistors (e.g., without any wires).
Embodiments described herein may be directed to back end of line (BEOL) semiconductor processing and structures. BEOL is the second portion of IC fabrication where the individual devices (e.g., transistors, capacitors, resistors, etc.) are interconnected with wiring on the wafer, e.g., the metallization layer or layers. BEOL includes contacts, insulating layers (dielectrics), metal levels, and bonding sites for chip-to-package connections. In the BEOL part of the fabrication stage contacts (pads), interconnect wires, vias and dielectric structures are formed. For modern IC processes, more than 10 metal layers may be added in the BEOL.
Embodiments described below may be applicable to FEOL processing and structures, BEOL processing and structures, or both FEOL and BEOL processing and structures. In particular, although an exemplary processing scheme may be illustrated using a FEOL processing scenario, such approaches may also be applicable to BEOL processing. Likewise, although an exemplary processing scheme may be illustrated using a BEOL processing scenario, such approaches may also be applicable to FEOL processing.
One or more embodiments are directed to fabrication of a material layer, such as a hardmask layer, having properties suitable for high aspect ratio gapfill. The described materials may be composed of etch resistant, insulating carbon formed using oligomeric and polymeric diamondoid spin-on precursors. Embodiments described herein may be implemented to enable patterning techniques for fabricating semiconductor devices or structures having a pitch or 20 nanometers (20 nm) or less. Embodiments described herein may be implemented enable the fabrication of etch resistant fill materials.
To provide context, the presently does not exist a viable approach for depositing carbon having a diamond-like state into high aspect ratio features. This has precluded the use of such materials in new integration schemes requiring multiple etch selectivities, referred to as colors. In accordance with one or more embodiments described herein, multi-functional adamantanes, diamantanes, triamantanes etc. (referred to generally herein as adamantane-based precursors) are used to synthesize small oligomers and polymers. The resulting carbon hardmask material (referred to herein as adamantane-based carbon hardmask material) can be delivered as a material having a high percentage of sp3-hybridized carbon into features that are challenging to fill.
Using diamantane as representative of a family of adamantanes,
In another aspect, it is to be appreciated that many of the molecules described herein may be used in monomeric form as volatile precursors for flowable CVD approaches for filling features. In such a scenario, the monomers may be delivered to a surface where a high energy plasma or catalyst is used to initiate oligomerization at low temperature allowing newly formed molecules to flow into features prior to curing.
To provide further context, for many novel patterning techniques, a set of materials is needed with unique etch characteristics. Along with etch selectivity, such patterning schemes may also require the materials to have the ability to uniformly fill features of various pitch and aspect ratios. Standard methods may be unable to meet this fill requirement. For example, chemical vapor deposition (CVD) based approaches tend to pinch off forming voids. On the other hand, ALD based approaches can fill features but leave a seam. The above approaches may also be hampered by associated non-uniform etch rates from a top of the structure to a bottom of the structure.
In a first application of materials described herein,
Referring to
In an embodiment, the trenches 304 in the patterned material layer 302 are formed using a pitch division processing and patterning scheme. Pitch division patterning typically refers to pitch halving, pitch quartering etc. Pitch division schemes may be applicable to FEOL processing, BEOL processing, or both FEOL (device) and BEOL (metallization) processing. In accordance with one or more embodiments described herein, optical lithography is first implemented to print unidirectional lines (e.g., either strictly unidirectional or predominantly unidirectional) in a pre-defined pitch, e.g., to form a grating structure. Pitch division processing is then implemented as a technique to increase line density.
Referring to
In an embodiment, the adamantane-based carbon hardmask material 306 is a spin-on material that has been optimized to fill high aspect ratio features. In an embodiment, the adamantane-based carbon hardmask material 306 can provide for uniform fill of up to 10:1 (height to width) aspect ratio features, and even up to 20:1 or 30:1, e.g., trenches formed in a conventional hardmask layer.
In an embodiment, the layer 302 that now includes adamantane-based carbon hardmask material 306 therein is referred to as a two-color structure because of the dual etch properties of the film, e.g., the etch properties of the hardmask or ILD 302 and the etch properties of the adamantane-based carbon hardmask material 306. In an embodiment, the adamantane-based carbon hardmask material 306 of the two color system has a unique etch selectivity and good fill (e.g., no voids or seams).
The structure of
Referring to
As such, in an embodiment, the adamantane-based carbon hardmask material 306 is used as an etch mask for etching a semiconductor layer. In an embodiment, the adamantane-based carbon hardmask material 306 is used as an etch mask for etching a plurality of semiconductor fins in a semiconductor layer. In another embodiment, the adamantane-based carbon hardmask material 306 is used as an etch mask for etching a plurality of gate lines in a semiconductor layer. In either case, in an embodiment, the adamantane-based carbon hardmask material 306 is a sacrificial material in that it is ultimately removed, e.g., by an ash process.
Referring to
In an embodiment, an opening 406 is formed in patterned resist or hardmask layer 404. In an embodiment, a lithographic exposure is performed to form opening 406 using a relatively large exposure window. For example, in one embodiment, a trench in the center of the exposure window is selected as a via location for ultimate adamantane-based carbon hardmask material 306 clearance. Neighboring hardmask material (portions of 302) are exposed but are not impacted by a subsequent etch process because of the dual etch selectivity of the layer 302 and the adamantane-based carbon hardmask material 306 As such, even though the neighboring regions are exposed adjacent to one or both sides of the selected trench for via formation, these regions are not impacted by a process used to remove the adamantane-based carbon hardmask material 306 from the selected via location or locations.
Referring to
Referring to
Referring to
It is to be appreciated that the resulting structure of
In a second application of materials described herein, one or more embodiments are directed to approaches for, and structures formed from, landing a gate contact via directly on an active transistor gate. Such approaches may eliminate the need for extension of a gate line on isolation for contact purposes. Such approaches may also eliminate the need for a separate gate contact layer to conduct signals from a gate line or structure. In an embodiment, eliminating the above features is achieved by recessing contact metals in a trench contact and introducing an additional dielectric material in the process flow. The additional dielectric material is included as a trench contact dielectric cap layer with etch characteristics different from the gate dielectric material cap layer already used for trench contact alignment in a gate aligned contact process processing scheme.
As an example,
Referring to
Referring to
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In a third application of materials described herein,
Referring again to
The structure of
In a fourth application of materials described herein, techniques for patterning metal line ends are described. To provide context, in the advanced nodes of semiconductor manufacturing, lower level interconnects may created by separate patterning processes of the line grating, line ends, and vias. However, the fidelity of the composite pattern may tend to degrade as the vias encroach upon the line ends and vice-versa. Embodiments described herein provide for a line end process also known as a plug process that eliminates associated proximity rules. Embodiments may allow for a via to be placed at the line end and a large via to strap across a line end.
To provide further context,
Referring to
However, referring again to
In an aspect, then, one or more embodiments described herein are directed to approaches for building non-conductive spaces or interruptions between metals lines (referred to as “line ends,” “plugs” or “cuts”) and, in some embodiments, associated conductive vias. Conductive vias, by definition, are used to land on a previous layer metal pattern. In this vein, embodiments described herein enable a more robust interconnect fabrication scheme since alignment by lithography equipment is relied on to a lesser extent. Such an interconnect fabrication scheme can be used to relax constraints on alignment/exposures, can be used to improve electrical contact (e.g., by reducing via resistance), and can be used to reduce total process operations and processing time otherwise required for patterning such features using conventional approaches.
Referring to
Referring to
Referring to
Referring to
In an embodiment, filling the opening 816 of the sacrificial material 814 with the dielectric material includes filling with an adamantane-based carbon hardmask material. In one such embodiment, filling the opening 814 of the sacrificial material 816 with the adamantane-based carbon hardmask material includes filling using a spin-on process or a flowable chemical vapor deposition process.
Referring to
Referring to
Referring again to
In an embodiment, the dielectric plug 818′ includes an adamantane-based carbon hardmask material. In an embodiment, the dielectric plug 818′ is in direct contact with the first 824A and second 824B portions of the conductive interconnect line 824.
In an embodiment, the dielectric plug 818′ has a bottom 818A substantially co-planar with a bottom 824C of the conductive interconnect line 824. In an embodiment, a first conductive via 826 is in a trench 808 in the ILD layer 802. In one such embodiment, the first conductive via 826 is below the bottom 824C of the interconnect line 824, and the first conductive via 826 is electrically coupled to the first portion 824A of the conductive interconnect line 824.
In an embodiment, a second conductive via 828 is in a third trench 830 in the ILD layer 802. The second conductive via 828 is below the bottom 824C of the interconnect line 824, and the second conductive via 828 is electrically coupled to the second portion 824B of the conductive interconnect line 824.
In an embodiment, the dielectric plug is formed using a spin-on process and does not include a seam. In another embodiment, however, a dielectric plug may be formed using a fill process (e.g., CVD) where artifacts may remain in the fabricated dielectric plug. As an example,
Referring to
It is to be appreciated that dielectric plugs differing in composition from an ILD material in which they are housed may be included on only select metallization layers, such as in lower metallization layers. As an example,
Referring to
In one embodiment, the one or more dielectric plugs 958 include an adamantane-based carbon hardmask material. In one embodiment, the first ILD layer 954 and the second ILD layer 964 (and, hence, the one or more portions 968 of the second ILD layer 964) include a carbon-doped silicon oxide material.
In one embodiment, individual ones of the first plurality of conductive interconnect lines 956 include a first conductive barrier liner 956A and a first conductive fill material 956B. Individual ones of the second plurality of conductive interconnect lines 966 include a second conductive barrier liner 966A and a second conductive fill material 966B. In one such embodiment, the first conductive fill material 956B is different in composition from the second conductive fill material 966B. In a particular such embodiment, the first conductive fill material 956B includes cobalt, and the second conductive fill material 966B includes copper.
In one embodiment, the first plurality of conductive interconnect lines 956 has a first pitch (P1, as shown in like-layer 970). The second plurality of conductive interconnect lines 966 has a second pitch (P2, as shown in like-layer 980). The second pitch (P2) is greater than the first pitch (P1). In one embodiment, individual ones of the first plurality of conductive interconnect lines 956 have a first width (W1, as shown in like-layer 970). Individual ones of the second plurality of conductive interconnect lines 966 have a second width (W2, as shown in like-layer 980). The second width (W2) is greater than the first width (W1).
It is to be appreciated that the layers and materials described above may be formed in, on or above an underlying semiconductor substrate or structure, such as underlying device layer(s) of an integrated circuit. In an embodiment, an underlying semiconductor substrate represents a general workpiece object used to manufacture integrated circuits. The semiconductor substrate often includes a wafer or other piece of silicon or another semiconductor material. Suitable semiconductor substrates include, but are not limited to, single crystal silicon, polycrystalline silicon and silicon on insulator (SOI), as well as similar substrates formed of other semiconductor materials, such as substrates including germanium, carbon, or group III-V materials. The semiconductor substrate, depending on the stage of manufacture, often includes transistors, integrated circuitry, and the like. The substrate may also include semiconductor materials, metals, dielectrics, dopants, and other materials commonly found in semiconductor substrates. Furthermore, the structures depicted may be fabricated on underlying lower level back end of line (BEOL) interconnect layers.
Although the preceding methods of fabricating a metallization layer, or portions of a metallization layer, of a BEOL metallization layer are described in detail with respect to select operations, it is to be appreciated that additional or intermediate operations for fabrication may include standard microelectronic fabrication processes such as lithography, etch, thin films deposition, planarization (such as chemical mechanical polishing (CMP)), diffusion, metrology, the use of sacrificial layers, the use of etch stop layers, the use of planarization stop layers, or any other associated action with microelectronic component fabrication. Also, it is to be appreciated that the process operations described for the preceding process flows may be practiced in alternative sequences, not every operation need be performed or additional process operations may be performed or both.
In an embodiment, as used throughout the present description, interlayer dielectric (ILD) material is composed of or includes a layer of a dielectric or insulating material. Examples of suitable dielectric materials include, but are not limited to, oxides of silicon (e.g., silicon dioxide (SiO2)), doped oxides of silicon, fluorinated oxides of silicon, carbon doped oxides of silicon, various low-k dielectric materials known in the arts, and combinations thereof. The interlayer dielectric material may be formed by techniques, such as, for example, chemical vapor deposition (CVD), physical vapor deposition (PVD), or by other deposition methods.
In an embodiment, as is also used throughout the present description, metal lines or interconnect line material (and via material) is composed of one or more metal or other conductive structures. A common example is the use of copper lines and structures that may or may not include barrier layers between the copper and surrounding ILD material. As used herein, the term metal includes alloys, stacks, and other combinations of multiple metals. For example, the metal interconnect lines may include barrier layers (e.g., layers including one or more of Ta, TaN, Ti or TiN), stacks of different metals or alloys, etc. Thus, the interconnect lines may be a single material layer, or may be formed from several layers, including conductive liner layers and fill layers. Any suitable deposition process, such as electroplating, chemical vapor deposition or physical vapor deposition, may be used to form interconnect lines. In an embodiment, the interconnect lines are composed of a conductive material such as, but not limited to, Cu, Al, Ti, Zr, Hf, V, Ru, Co, Ni, Pd, Pt, W, Ag, Au or alloys thereof. The interconnect lines are also sometimes referred to in the art as traces, wires, lines, metal, or simply interconnect.
In an embodiment, as is also used throughout the present description, hardmask materials other than the above described adamantane-based carbon hardmask materials are composed of dielectric materials different from the interlayer dielectric material. In one embodiment, different hardmask materials may be used in different regions so as to provide different growth or etch selectivity to each other and to the underlying dielectric and metal layers. In some embodiments, a hardmask layer includes a layer of a nitride of silicon (e.g., silicon nitride) or a layer of an oxide of silicon, or both, or a combination thereof. Other suitable materials may include carbon-based materials. In another embodiment, a hardmask material includes a metal species. For example, a hardmask or other overlying material may include a layer of a nitride of titanium or another metal (e.g., titanium nitride). Potentially lesser amounts of other materials, such as oxygen, may be included in one or more of these layers. Alternatively, other hardmask layers known in the arts may be used depending upon the particular implementation. The hardmask layers maybe formed by CVD, PVD, or by other deposition methods.
In an embodiment, as is also used throughout the present description, lithographic operations are performed using 193 nm immersion lithography (i193), extreme ultra-violet (EUV) lithography or electron beam direct write (EBDW) lithography, or the like. A positive tone or a negative tone resist may be used. In one embodiment, a lithographic mask is a trilayer mask composed of a topographic masking portion, an anti-reflective coating (ARC) layer, and a photoresist layer. In a particular such embodiment, the topographic masking portion is a carbon hardmask (CHM) layer and the anti-reflective coating layer is a silicon ARC layer.
Patterned features may be patterned in a grating-like pattern with lines, holes or trenches spaced at a constant pitch and having a constant width. The pattern, for example, may be fabricated by a pitch halving or pitch quartering approach. In an example, a blanket film (such as a polycrystalline silicon film) is patterned using lithography and etch processing which may involve, e.g., spacer-based-quadruple-patterning (SBQP) or pitch quartering. It is to be appreciated that a grating pattern of lines can be fabricated by numerous methods, including 193 nm immersion lithography (i193), extreme ultra-violet (EUV) and/or electron-beam direct write (EBDW) lithography, directed self-assembly, etc. In other embodiments, the pitch does not need to be constant, nor does the width.
In an embodiment, the term “grating structure” for metal lines, ILD lines or hardmask lines is used herein to refer to a tight pitch grating structure. In one such embodiment, the tight pitch is not achievable directly through conventional lithography. For example, a pattern based on conventional lithography may first be formed, but the pitch may be halved by the use of spacer mask patterning, as is known in the art. Even further, the original pitch may be quartered by a second round of spacer mask patterning. Accordingly, the grating-like patterns described herein may have metal lines, ILD lines or hardmask lines spaced at a constant pitch and having a constant width. The pattern may be fabricated by a pitch halving or pitch quartering, or other pitch division, approach.
Embodiments disclosed herein may be used to manufacture a wide variety of different types of integrated circuits and/or microelectronic devices. Examples of such integrated circuits include, but are not limited to, processors, chipset components, graphics processors, digital signal processors, micro-controllers, and the like. In other embodiments, semiconductor memory may be manufactured. Moreover, the integrated circuits or other microelectronic devices may be used in a wide variety of electronic devices known in the arts. For example, in computer systems (e.g., desktop, laptop, server), cellular phones, personal electronics, etc. The integrated circuits may be coupled with a bus and other components in the systems. For example, a processor may be coupled by one or more buses to a memory, a chipset, etc. Each of the processor, the memory, and the chipset, may potentially be manufactured using the approaches disclosed herein.
Depending on its applications, computing device 1000 may include other components that may or may not be physically and electrically coupled to the board 1002. These other components include, but are not limited to, volatile memory (e.g., DRAM), non-volatile memory (e.g., ROM), flash memory, a graphics processor, a digital signal processor, a crypto processor, a chipset, an antenna, a display, a touchscreen display, a touchscreen controller, a battery, an audio codec, a video codec, a power amplifier, a global positioning system (GPS) device, a compass, an accelerometer, a gyroscope, a speaker, a camera, and a mass storage device (such as hard disk drive, compact disk (CD), digital versatile disk (DVD), and so forth).
The communication chip 1006 enables wireless communications for the transfer of data to and from the computing device 1000. The term “wireless” and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communications channels, etc., that may communicate data through the use of modulated electromagnetic radiation through a non-solid medium. The term does not imply that the associated devices do not contain any wires, although in some embodiments they might not. The communication chip 1006 may implement any of a number of wireless standards or protocols, including but not limited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE 802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE, GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well as any other wireless protocols that are designated as 3G, 4G, 5G, and beyond. The computing device 1000 may include a plurality of communication chips 1006. For instance, a first communication chip 1006 may be dedicated to shorter range wireless communications such as Wi-Fi and Bluetooth and a second communication chip 1006 may be dedicated to longer range wireless communications such as GPS, EDGE, GPRS, CDMA, WiMAX, LTE, Ev-DO, and others.
The processor 1004 of the computing device 1000 includes an integrated circuit die packaged within the processor 1004. In an embodiment, the integrated circuit die of the processor includes or is fabricated using an adamantane-based carbon hardmask material as described herein. The term “processor” may refer to any device or portion of a device that processes electronic data from registers and/or memory to transform that electronic data into other electronic data that may be stored in registers and/or memory.
The communication chip 1006 also includes an integrated circuit die packaged within the communication chip 1006. In an embodiment, the integrated circuit die of the communication chip includes or is fabricated using an adamantane-based carbon hardmask material as described herein.
In further implementations, another component housed within the computing device 1000 may contain an integrated circuit die that includes or is fabricated using an adamantane-based carbon hardmask material as described herein.
In various implementations, the computing device 1000 may be a laptop, a netbook, a notebook, an ultrabook, a smartphone, a tablet, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder. In further implementations, the computing device 1000 may be any other electronic device that processes data.
The interposer 1100 may be formed of an epoxy resin, a fiberglass-reinforced epoxy resin, a ceramic material, or a polymer material such as polyimide. In further implementations, the interposer may be formed of alternate rigid or flexible materials that may include the same materials described above for use in a semiconductor substrate, such as silicon, germanium, and other group III-V and group IV materials.
The interposer may include metal interconnects 1108 and vias 1110, including but not limited to through-silicon vias (TSVs) 1112. The interposer 1100 may further include embedded devices 1114, including both passive and active devices. Such devices include, but are not limited to, capacitors, decoupling capacitors, resistors, inductors, fuses, diodes, transformers, sensors, and electrostatic discharge (ESD) devices. More complex devices such as radio-frequency (RF) devices, power amplifiers, power management devices, antennas, arrays, sensors, and MEMS devices may also be formed on the interposer 1100. In accordance with embodiments of the disclosure, apparatuses or processes disclosed herein may be used in the fabrication of interposer 1100.
Thus, embodiments of the present disclosure include carbon-based dielectric materials for semiconductor structure fabrication, and the resulting structures.
The above description of illustrated implementations of embodiments of the disclosure, including what is described in the Abstract, is not intended to be exhaustive or to limit the disclosure to the precise forms disclosed. While specific implementations of, and examples for, the disclosure are described herein for illustrative purposes, various equivalent modifications are possible within the scope of the disclosure, as those skilled in the relevant art will recognize.
These modifications may be made to the disclosure in light of the above detailed description. The terms used in the following claims should not be construed to limit the disclosure to the specific implementations disclosed in the specification and the claims. Rather, the scope of the disclosure is to be determined entirely by the following claims, which are to be construed in accordance with established doctrines of claim interpretation.
A method of patterning a layer for a semiconductor structure includes forming a plurality of trenches in a dielectric layer above a semiconductor layer above a substrate to form a patterned dielectric layer. The method also includes filling the plurality of trenches with an adamantane-based carbon hardmask material. The method also includes removing the patterned dielectric layer selective to the adamantane-based carbon hardmask material. The method also includes using the adamantane-based carbon hardmask material to pattern the semiconductor layer.
The method of example embodiment 1, wherein filling the plurality of trenches with the adamantane-based carbon hardmask material includes using a spin-on deposition process or a flowable chemical vapor deposition process.
The method of example embodiment 1 or 2, wherein forming the plurality of trenches in the dielectric layer incudes forming the plurality of trenches in a carbon-doped silicon oxide material.
The method of example embodiment 1, 2 or 3 wherein using the adamantane-based carbon hardmask material to pattern the semiconductor layer includes forming a plurality of semiconductor fins in the semiconductor layer.
An integrated circuit structure includes a gate stack above a substrate. A first and a second conductive trench contact are at first and second sides of the gate stack, respectively. A first hardmask component is on and aligned with an uppermost surface of the gate stack. A second hardmask component is on and aligned with first and second conductive trench contacts. The first and second hardmask components differ in composition from one another. One of the first hardmask component or the second hardmask component includes an adamantane-based carbon hardmask material. A conductive via is in an opening in the first hardmask component and on a portion of the gate stack.
The integrated circuit structure of example embodiment 5, wherein a portion of the conductive via is on a portion of the second hardmask component.
The integrated circuit structure of example embodiment 5 or 6, wherein the first hardmask component includes the adamantane-based carbon hardmask material.
The integrated circuit structure of example embodiment 5 or 6, wherein the second hardmask component includes the adamantane-based carbon hardmask material.
An integrated circuit structure includes an inter-layer dielectric (ILD) layer above a substrate. A conductive interconnect line is in a trench in the ILD layer, the conductive interconnect line having a first portion and a second portion, the first portion laterally adjacent to the second portion. A dielectric plug is between and laterally adjacent to the first and second portions of the conductive interconnect line, the dielectric plug including an adamantane-based carbon hardmask material.
The integrated circuit structure of example embodiment 9, wherein the dielectric plug is in direct contact with the first and second portions of the conductive interconnect line.
The integrated circuit structure of example embodiment 9 or 10, wherein the dielectric plug does not include a seam.
The integrated circuit structure of example embodiment 9 or 10, wherein the dielectric plug has an approximately vertical seam spaced approximately equally from the first portion of the conductive interconnect line and from the second portion of the conductive interconnect line.
The integrated circuit structure of example embodiment 9, 10, 11 or 12, wherein the dielectric plug has a bottom substantially co-planar with a bottom of the conductive interconnect line.
The integrated circuit structure of example embodiment 9, 10, 11, 12 or 13, further including a first conductive via in a second trench in the ILD layer, the first conductive via below the bottom of the interconnect line, and the first conductive via electrically coupled to the first portion of the conductive interconnect line, and a second conductive via in a third trench in the ILD layer, the second conductive via below the bottom of the interconnect line, and the second conductive via electrically coupled to the second portion of the conductive interconnect line.
The integrated circuit structure of example embodiment 9, 10, 11, 12, 13 or 14, wherein the conductive interconnect line includes a conductive barrier liner and a conductive fill material, the conductive fill material including cobalt.
An interconnect structure for an integrated circuit includes a first layer of the interconnect structure disposed above a substrate. The first layer includes a first grating of alternating metal lines and dielectric lines in a first direction. The dielectric lines have an uppermost surface higher than an uppermost surface of the metal lines. A second layer of the interconnect structure is disposed above the first layer of the interconnect structure. The second layer includes a second grating of alternating metal lines and dielectric lines in a second direction, perpendicular to the first direction. The dielectric lines have a lowermost surface lower than a lowermost surface of the metal lines of the second grating. The dielectric lines of the second grating overlap and contact, but are distinct from, the dielectric lines of the first grating. A region of dielectric material is disposed between the metal lines of the first grating and the metal lines of the second grating, and in a same plane as upper portions of the dielectric lines of the first grating and lower portions of the dielectric lines of the second grating. The region of dielectric material includes an adamantane-based carbon hardmask material.
The interconnect structure of example embodiment 16, further including a conductive via disposed between and coupling a metal line of the first grating to a metal line of the second grating.
The interconnect structure of example embodiment 17, wherein the conductive via is in the same plane as the region of dielectric material.
The interconnect structure of example embodiment 16, 17 or 18, wherein the dielectric lines of the first grating are composed of a first dielectric material.
The interconnect structure of example embodiment 19, and the dielectric lines of the second grating are composed of a second, different dielectric material. The first and second dielectric materials are different than the region of dielectric material composed of the adamantane-based carbon hardmask material.
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/US2018/024771 | 3/28/2018 | WO | 00 |
