1. Field of the Invention
The present invention relates to a device mounting board on which a device is mounted.
2. Description of the Related Art
With portable electronic appliances such as mobile phones, PDAs, DVCs and DSCs becoming more and more advanced in their capabilities, miniaturization and weight reduction of products have become essential for market acceptance. Accordingly, highly-integrated system LSIs for achieving these goals are demanded. Also, better ease and convenience of use are required of these electronic appliances. In this respect, high capabilities and high performance are required of LSIs used in these appliances. While the number of I/Os is increasing as a result of increasingly high integration of LSI chips, there is also a persistent requirement for miniaturization of packages themselves. In order to meet these incompatible demands, development of a semiconductor package adapted for high-density substrate mounting of semiconductor devices is in serious demand.
Ball grid array (BGA) is known as an example of package adapted for a demand for high density. A BGA is formed such that semiconductor chips are mounted on a package substrate and then molded by resin. Solder balls are formed as terminals in selected areas on the opposite side. In BGA, an uninterrupted mounting area is secured so that miniaturization of a package is achieved relatively easily. The circuit board need not be adapted for small pitch and a high-precision mounting technology is not necessary. Therefore, by using BGA, the total mounting cost may become reduced even if the package cost is relatively high.
Patent document No. 1 describes an alternative example of CSP. In document No. 1 a system in package in which high-frequency LSIs are mounted is disclosed. In this package, a multilayer wiring structure is formed on a base substrate. Semiconductor devices such as high-frequency LSIs are formed thereon. The multilayer wiring structure is formed by a stack including a core substrate, a copper foil provided with an insulating resin layer and the like.
However, it is difficult to achieve a low profile of a level desired in future portable electronics with the related-art CSP.
Related Art List
The present invention has been done in view of the aforementioned circumstances and its object is to provide a thin device mounting board.
The device mounting board on which a device is mounted, according to one aspect of the present invention, the device mounting board comprises: a substrate which includes a first insulating film; a second insulating film which is provided on one surface of the substrate, wherein the first insulating film and the second insulating film include glass fiber impregnated with epoxy resin, and the epoxy resin impregnation ratio of the second insulating film is higher than that of the first insulating film.
The film thickness of the second insulating film may be smaller than that of the first insulating film. Wiring may be provided between the substrate and the second insulating film. The epoxy resin impregnation ratio of the second insulating film may range from 71 Vol % to 75 Vol %. The glass-transition temperature of the second insulating film may range from 160° C. to 170° C., and the bending modulus of elasticity of the second insulating film may range from 27 GPa to 30 GPa.
The device mounting board may further comprise a third insulating film provided on the other surface of the substrate, wherein the third insulating film includes glass fiber impregnated with epoxy resin, and the epoxy resin impregnation ratio of the third insulating film is higher than that of the first insulating film. The epoxy resin impregnation ratio of the third insulating film may range from 71 Vol % to 75 Vol %.
Wiring for connecting the devices may be provided on the second insulating film, and a fourth insulating film may be provided on the wiring so that the devices and the wiring are covered by the fourth insulating film. The fourth insulating film may be a photo solder resist layer including cardo type polymer.
Before describing an embodiment of the present invention, a description will be given of an ISB structure employed in the embodiment. Integrated system in board TM (ISB) is a package developed by the applicant of the instant application. An ISB package is a coreless system in package, a type of electronic circuit packaging mainly comprising bare semiconductor chips, that has a copper wiring pattern but does not use a core (substrate) for supporting circuit components.
According to this package, the following advantages are available.
A description will now be given of merits in a process of fabricating an ISB.
The device mounting board 400 comprises a stack of an insulating resin layer 312 and a photo solder resist layer 328 built on the top surface of a substrate 302 in the stated order. A stack of the insulating resin film 312 and the photo solder resist layer 328 is built on the bottom surface of the substrate 302 in the stated order. The substrate 302 is an example of a substrate that includes a first insulating film. The insulating resin film 312 on the top surface of the substrate 302 is an example of “a second insulating film” according to the invention. The insulating resin film 312 on the bottom surface of the substrate 302 is an example of “a third insulating film” according to the invention. The photo solder resist layer 328 is an example of “a fourth insulating film” according to the invention.
The term “four-layer ISB structure” refers to a structure of four layers containing a wiring layer inside. The wiring layer is embedded inside the insulating resin 312 and the photo solder resist layer 328. Photosensitivity is required of the photo solder resist layer 328 because of a process for forming a via hole in the layer.
In the four-layer ISB structure, the insulating resin film 312 on the top surface and the insulating resin film 312 on the bottom surface sandwiching the substrate 302 may be formed of the same material. Also, the photo solder resist layer 328 on the top surface and the photo solder resist layer 328 on the bottom surface may be formed of the same material. With this, the fabrication process is simplified.
A through hole 327 that runs through the substrate 302, the insulating resin film 312 and the photo solder resist layer 328 is provided. Portions of the wiring formed of a copper film 308, portions of the wiring formed of a copper film 320 and portions of a via 311 are embedded in the substrate 302. Portions of the wiring formed of the copper film 308, portions of the wiring formed of a copper film 320, wiring 309, portions of the via 311 and portions of a via 323 are embedded in the insulating resin film 312. Portions of the wiring formed of the copper film 320 and portions of the via 323 are embedded in the photo solder resist layer 328. An opening 326 is provided in the photo solder resist layer 328.
The substrate 302 may be a resin substrate such as a glass epoxy substrate. For example, the substrate 302 may be a substrate that includes an insulating film formed of glass fiber impregnated with epoxy resin. The thickness of the substrate 302 is about 60 μm, for example.
A resin material that is softened when heated is used to form the insulating resin film 312. A resin material that includes glass fiber impregnated with epoxy resin described later is used. The epoxy resin impregnation ratio of the insulating resin film 312 is higher than that of the substrate 302.
Glass fiber is included so as to improve laser workability. For example, granular or fibrous SiO2 or SiN is used as glass fiber. For example, the thickness of the insulating resin film 312 is about 40 μm.
The photo solder resist layer 328 is formed of, for example, a resin film including cardo type polymer. The thickness of the photo solder resist layer 328 is about 25 μm, for example.
cardo type polymer exhibits an excellent mechanical strength and heat resistance, and a small coefficient of linear expansion, due to an action of the bulk of a substituent group preventing the motion of a backbone. This helps mitigate degradation in adhesion or interlayer peeling occurring between the resin insulating film 312 and the photo solder resist layer 328 in a heat cycle.
The multi-layer wiring structure comprising the wiring formed of the copper film 308, the wiring formed of the copper film 320, the wiring 309, the via 311, the via 323 and the like may not necessarily be formed of copper wires. Aluminum wiring, aluminum alloy wiring, copper alloy wiring, gold bonding wires, gold alloy wiring and a mixture of these may also be used.
On top of the four-layer ISB structure or in the interior thereof may be provided active devices such as transistors and diodes or passive devices such as capacitors and resistors. These active devices and passive devices may be connected to the multi-layer wiring structure inside the four-layer ISB and connectable to an external conductive member via, for example, the via 323.
The photo etching resist layer 306 is patterned by being exposed to light, using a glass as a mask. Subsequently, as illustrated in
For example, the via 311 may be formed as described below. A thin film of a thickness of about 0.5-1 μm is formed on the entirety of the via hole 307 using electroless copper plating, and then a film of about 20 μm is formed by electroplating. Normally, palladium is used as a catalyst for electroless plating. In order to attach a catalyst for electroless plating to a flexible insulating resin, palladium is contained in a water solution in the form of complex, the flexible insulating substrate is steeped in the solution so as to attach the palladium complex on the surface thereof, and the palladium complex is reduced to palladium as a metal, using a reducing agent. In this way, a core for plating is formed on the surface of the flexible insulating substrate.
Subsequently, as illustrated in
Subsequently, as illustrated in
For bonding, the composite of the insulating resin film 312 and the copper foil is brought into contact with the substrate 302 and the wiring 309. The substrate 302 and the wiring 309 are laid in the insulating resin film 312. Subsequently, as illustrated in
Subsequently, as illustrated in
Subsequently, as illustrated in
For example, the via 323 may be formed as described below. A thin film of a thickness of about 0.5-1 μm is formed on the entirety of the via hole 322 using electroless copper plating, and then a film of about 20 μm is formed by electroplating. Normally, palladium is used as a catalyst for electroless plating. In order to attach a catalyst for electroless plating to a flexible insulating resin, palladium is contained in a water solution in the form of complex, the flexible insulating substrate is steeped in the solution so as to attach the palladium complex on the surface thereof, and the palladium complex is reduced to palladium as a metal, using a reducing agent. In this way, a core for plating is formed on the surface of the flexible insulating substrate.
Subsequently, as illustrated in
Subsequently, as illustrated in
Then, as illustrated in
A description will now be given of effects obtained by using the insulating resin film 312 characterized by a higher epoxy resin impregnation ratio than that of the substrate 302. The insulating film which is used as the insulating resin film 312 and which contains glass fiber impregnated with epoxy resin is of the epoxy resin impregnation ratio ranging from 71 Vol % to 75 Vol %. Therefore, it can be molded into a thin film using a predetermined additive, with the occurrence of voids or unevenness being suppressed. Thus, a film of a thickness of about 40 μm can be used for the insulating resin film 312. Compared with the thickness of 60 μm of a resin material ordinarily used for an insulating resin film, the thickness of the insulating resin film 312 is reduced to ⅔. By using an insulating film that contains glass fiber impregnated with epoxy resin as the insulating resin film 312, the thickness of the device mounting board 400 is reduced. Since the occurrence of voids or unevenness in bonding a film is suppressed, the composite of the insulating resin film 312 and a film bonded thereto, provided in the device mounting board 400, contains hardly any voids or unevenness. Accordingly, the stability in fabrication and reliability of the device mounting board 400 are improved.
The insulating resin film 312 that contains glass fiber impregnated with epoxy resin with a impregnation ratio higher than that of the substrate 302 may preferably have the following properties. The epoxy resin impregnation ratio may range from 71 Vol % to 75 Vol %. When the epoxy resin impregnation ratio is within this range, the film can be produced by molding with the occurrence of voids or unevenness being controlled.
The glass-transition temperature (Tg) of the insulating resin film that contains glass fiber impregnated with epoxy resin may range, for example, from 160° C. to 170° C. When the glass-transition temperature is within this range, the film can be fabricated in a stable manner using an ordinary method. The glass-transition temperature may be measured by a dynamic viscoelasticity measurement (DMA) using a bulk sample. The bending modulus of elasticity of the insulating resin film that includes glass fiber impregnated with epoxy resin may range, for example, from 27 GPa to 30 GPa. When the bending modulus of elasticity is within this range, the rigidity of the insulating resin film is improved so that fabrication of a thin film is possible correspondingly.
A variety of semiconductor apparatuses may be formed by mounting semiconductor devices on the device mounting board 400 described in the first embodiment. For example, devices may be mounted by flip chip bonding or wire bonding. Semiconductor devices may be mounted on the device mounting board 400 face up or face down. Semiconductor devices may be mounted on one side or both sides of the device mounting board 400. These forms of mounting may be combined in various ways.
More specifically, as illustrated in
As illustrated in
As illustrated in
In each of the described structures of the semiconductor apparatus is used the device mounting board 400, in which the insulating resin film 312 is implemented by an insulating resin film that contains glass fiber impregnated with epoxy resin, as described in the first embodiment. Therefore, the device mounting board 400 is excellent in properties such as heat resistance, rigidity, interlayer adhesion, parasitic capacitance. As such, the device mounting board 400 is a highly reliable and thin substrate. By mounting semiconductor devices on the device mounting board 400 in which the insulating resin film 312 is implemented by an insulating resin film that contains glass fiber impregnated with epoxy resin, a reliable and thin semiconductor apparatus is provided.
Semiconductor devices may be mounted on the device mounting board 400 in which the photo solder resist layer 328 is formed of a resin film including cardo type polymer. With this, the following effects are provided.
The photo solder resist layer 328 may be formed of, for example, a resin film including cardo type polymer. The photo solder resist layer 328 is excellent in properties such as heat resistance, rigidity, dielectric property and adhesion with devices. The photo solder resist layer 328 is also excellent in resolution. Therefore, by using a resin film including cardo type polymer to form the photo solder resist layer 328, the accuracy of dimension in mounting semiconductor devices on the device mounting board 400 is increased. Accordingly, by using a resin film including cardo type polymer to form the photo solder resist layer 328, the reliability of the device mounting board 400 is improved and the thickness thereof is reduced. Therefore, by mounting semiconductor devices on the device mounting board 400, in which a resin film including cardo type polymer is used to form the photo solder resist layer 328, a highly reliable and thin semiconductor apparatus is provided.
Given above is an explanation of the preferred embodiments of the invention. It is not intended that the present invention is limited to the described embodiments. Variations and modifications will be apparent to those skilled in the art, all of which fall within the scope of the present invention.
While the embodiments are described as using an insulating resin film that contains glass fiber impregnated with epoxy resin to form the insulating resin film 312 constituting the device mounting board 400, such an insulating resin film may be used to form the insulating resin film of a device mounting board other than the device mounting board 400, which is provided with the four-layer ISB structure.
While the embodiments are described as using the device mounting board 400 provided with the four-layer ISB structure comprising four wiring layers, a device mounting board with an ISB structure comprising more than four wiring layers may be used. For example, a substrate comprising six wiring layers may be used.
In the described embodiments, a resin film including cardo type polymer is used to form the photo solder resist layer 328 constituting the device mounting board 400. Alternatively, other materials may be used.
Number | Date | Country | Kind |
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2004-175069 | Jun 2004 | JP | national |