Number | Date | Country | Kind |
---|---|---|---|
44 15 600.6 | May 1994 | DEX | |
44 15 601.4 | May 1994 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4707384 | Schachner et al. | Nov 1987 | |
5082522 | Purdes et al. | Jan 1992 |
Number | Date | Country |
---|---|---|
24773 | Feb 1991 | JPX |
293080 | Feb 1991 | JPX |
112177 | May 1991 | JPX |
Entry |
---|
Popov, "Electron Cyclotron Resonance Plasmas Excited by Rectangular and Circular Microwave Modes", J. Vac. Sci. Technol. A., 8(3), May/Jun. 1990. |
Peter, G., A. Koller and S. Vazquez, "A New Electron Beam Evaporation Source for Si Molecular Beam Epitaxy Controlled by a Quadrupole Mass Spectrometer", J. Vac. Sci. Technol. A., 9(8), Nov./Dec. 1991. |