Claims
- 1. An end effector for transferring a substrate between a cassette module and a process module, each of the substrates having a central portion for receiving deposition material and having a peripheral portion on which no deposition material is to be deposited, comprising,
- a body,
- a web having first and second opposite ends and coupled at the first end to the body,
- first means extending from the body through the first and second opposite ends of the web for holding the second opposite end of the web in a fixed relationship to the body,
- second means disposed on the body and fixedly disposed on the second opposite end of the web for supporting the substrate at the peripheral portion of the substrate without any contact of the central portion of the substrate with the body, the web, the first means and the second means, and
- third means disposed between the body and the web for balancing the web relative to the body to provide a balanced relationship of the substrate on the web.
- 2. An end effector for transferring a substrate between a cassette module and a process module, each of the substrates having a central portion for receiving deposition material and having a peripheral portion on which no deposition material is to be deposited, comprising,
- a body,
- a web having first and second opposite ends and coupled at the first end to the body,
- first means extending from the body through the first and second opposite ends of the web for holding the second opposite end of the web in a fixed relationship to the body,
- second means disposed on the body and on the second opposite end of the web for supporting the substrate at the peripheral portion of the substrate without any contact of the central portion of the substrate with the body, the web, the first means and the second means, and
- third means disposed between the body and the web for balancing the web relative to the body to provide a balanced relationship of the substrate on the web,
- the web including a panel having first and second flanges respectively extending from the opposite ends of the panel,
- fourth means for attaching the first flange to the body, and
- the first means extending from the body through the first and second flanges on the panel for rigidifying the panel relative to the body.
- 3. An end effector as set forth in claim 2, further comprising,
- the second means disposed on the body including a ledge,
- the second flange on the panel being disposed to support the substrate at the peripheral portion of the substrate without any contact of the central portion of the substrate with the body, the web and the first and second flanges.
- 4. An end effector for transferring a substrate between a cassette module and a process module, each of the substrates having a central portion for receiving deposition material and having a peripheral portion on which no deposition material is to be deposited, comprising,
- a body,
- a web having first and second opposite ends and coupled at the first end to the body,
- first means extending from the body through the first and second opposite ends of the web for holding the second opposite end of the web in a fixed relationship to the body,
- second means disposed on the body and on the second opposite end of the web for supporting the substrate at the peripheral portion of the substrate without any contact of the central portion of the substrate with the body, the web, the first means and the second means, and
- third means disposed between the body and the web for balancing the web relative to the body to provide a balanced relationship of the substrate on the web,
- the web including a panel having first and second flanges respectively extending from the opposite ends of the panel,
- fourth means for attaching the first flange on the panel to the body,
- a pair of rods extending from the body through the first and second flanges on the panel for rigidifying the panel relative to the body,
- the second flange on the panel being disposed to support the substrate at the peripheral portion of the substrate without any contact of the central portion of the substrate with the body, the web and the first and second flanges.
- 5. An end effector as set forth in claim 4, further comprising,
- the second flange extending from the panel at a transverse angle to the panel to dispose the substrate on the second flange at a position where the central portion of the substrate is displaced from the panel, and
- the body including a bevelled surface contiguous to the ledge to facilitate the disposition of the peripheral portion of the substrate on the ledge.
Parent Case Info
This application is a divisional application of U.S. Ser. No. 08/714,804 filed Sep. 17, 1996 which is a continuation in part of application Ser. No. 08/554,459 filed Nov. 7, 1995 now U.S. Pat. No. 5,830,272.
US Referenced Citations (6)
Divisions (1)
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Number |
Date |
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Parent |
714804 |
Sep 1996 |
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Continuation in Parts (1)
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Number |
Date |
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554459 |
Nov 1995 |
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