Number | Date | Country | Kind |
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6-151507 | Jun 1994 | JPX |
Number | Name | Date | Kind |
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3926508 | Harmsen et al. | Dec 1975 | |
3991234 | Chang et al. | Nov 1976 | |
4052520 | Chang et al. | Oct 1977 | |
4061800 | Anderson | Dec 1977 | |
4624859 | Akira et al. | Nov 1986 | |
5085904 | Deak et al. | Feb 1992 | |
5302208 | Grimm et al. | Apr 1994 |
Number | Date | Country |
---|---|---|
06330290 | Nov 1994 | JPX |
Entry |
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Wolf, Stanley "Silicon Processing for the VLSI Era", vol. 2, pp. 188-199. |