Number | Name | Date | Kind |
---|---|---|---|
5133284 | Thomas et al. | Jul 1992 | |
5230741 | van de Ven et al. | Jul 1993 | |
5238499 | van de Ven et al. | Aug 1993 | |
5302209 | Maeda et al. | Apr 1994 | |
5338362 | Imahashi | Aug 1994 | |
5779803 | Kurono et al. | Jul 1998 |
Entry |
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E.J. McInerney, "Study of station flow dynamics in a sequential multiwafer chemical vapor deposition batch reactor using reactor modeling", J. Vac. Sci. Technol. A 14(3), May/Jun. 1996, 1996 American Vacuum Society, pp. 1152-1155. |