M. Minato and Y. Itoh, “Vacuum characteristics for TiN film coated on the interior surface of a vacuum duct.” Nucl. instr. and Meth. In Phys. Res., vol. B 121, 1997, pp. 187-190. |
N. Hosokawa, T. Tsukada, and T. Misumi, “Self-sputtering phenomena in high-rate coaxial cylindrical magnetron sputtering,” J. Vac. Sci. Technol. vol. 14, No. 1, 1977, pp. 143-146. |
J.N. Matossian, R. Wei, J. Vajo, G. Hunt, M. Gardos, G. Chambers, L. Soucy, D. Oliver, L. Jay, C.M. Taylor, G. Alderson, R. Komanduri, and A. Perry, Plasma-enhanced, magnetron-sputtered deposition (PMD) of materials, Surf. Coat. Technol., vol. 108-109, 1998, pp. 496-506. |
R. Wei, “Low energy, high current density ion implantation of materials at elevated temperatures for tribological applications,” Surface and Coatings Technology 83 (1996) 218-227. |