Number | Date | Country | Kind |
---|---|---|---|
90 09467 | Jul 1990 | FRX |
Number | Name | Date | Kind |
---|---|---|---|
4141780 | Kleinknecht et al. | Feb 1979 | |
4680084 | Heimann et al. | Jul 1987 | |
4927785 | Theeten et al. | May 1990 |
Entry |
---|
Thin Solid Films, "Optical Monitoring of the End Point in Thin Film Plasma Etching", 109, 1983, pp. 363-369. |
SPIE vol. 990, Chemical, Biochemical and Environmental Applications of Fibers (1988), "Non-Destructive Testing of Reflow on SI Wafer", Laloux, et al., pp. 158-162. |