Number | Name | Date | Kind |
---|---|---|---|
4416933 | Antson | Nov 1983 | |
4734340 | Saito | Mar 1988 | |
5834353 | Wu | Nov 1998 | |
5908312 | Cheung | Jun 1999 | |
5918147 | Filipiak | Jun 1999 | |
5923983 | Fulford | Jul 1999 | |
5963810 | Gardner | Oct 1999 | |
6020024 | Maiti | Feb 2000 | |
6037205 | Huh | Mar 2000 | |
6037235 | Narwankar | Mar 2000 |
Number | Date | Country |
---|---|---|
02067753 | Mar 1990 | JP |
04056270 | Feb 1992 | JP |
11074478 | Mar 1999 | JP |
Entry |
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Wolf, Stanely, vol. 1, Silicon Processing for the VLSI Era, pp438-41, 1986.* |
Wolf, Stanely, vol. 2, Silicon Processing for the VLSI Era, pp144-45, 1990. |