Number | Date | Country | Kind |
---|---|---|---|
11-158712 | Jun 1999 | JP |
Number | Name | Date | Kind |
---|---|---|---|
5424253 | Usami et al. | Jun 1995 | |
5470800 | Muroyama et al. | Nov 1995 | |
5605867 | Sato et al. | Feb 1997 | |
5656337 | Park et al. | Aug 1997 |
Number | Date | Country |
---|---|---|
5-259297 | Oct 1993 | JP |
6-181205 | Jun 1994 | JP |
6-267939 | Sep 1994 | JP |
7-29901 | Jan 1995 | JP |
7-50295 | Feb 1995 | JP |
7-99191 | Apr 1995 | JP |
7-122552 | May 1995 | JP |
9-129632 | May 1997 | JP |
9-148324 | Jun 1997 | JP |
11-74485 | Mar 1999 | JP |
11-288933 | Oct 1999 | JP |
Entry |
---|
Silicon Processing for the VLSI Era-vol. 2, S.Wolf, pp. 196-199 no month, 1990.* |
Patent Abstracts of Japan vol. 018, No. 171 (E-1529), Mar. 23, 1994. |
Patent Abstracts of Japan vol. 1997, No. 12, Dec. 25, 1997. |