Number | Name | Date | Kind |
---|---|---|---|
4063973 | Kirita et al. | Dec 1977 | |
4107726 | Schilling | Aug 1978 | |
4410622 | Dalal et al. | Oct 1983 | |
4436582 | Saxena | Mar 1984 | |
4523372 | Balda et al. | Jun 1985 | |
4541168 | Galie et al. | Sep 1985 | |
4541169 | Bartush | Sep 1985 | |
4583106 | Anantha et al. | Apr 1986 | |
4589928 | Dalton et al. | May 1986 | |
4605470 | Gwozdz et al. | Aug 1986 | |
4614021 | Hulseweh | Sep 1986 | |
4654113 | Tuchiya et al. | Mar 1987 | |
4662064 | Hsu et al. | May 1987 | |
4670967 | Hazuki | Jun 1987 | |
4674176 | Tuckerman | Jun 1987 | |
4676867 | Elkins et al. | Jun 1987 |
Number | Date | Country |
---|---|---|
0023146 | Jan 1981 | EPX |
8504049 | Sep 1985 | EPX |
Entry |
---|
Ghandhi, "VLSI Fabrication Principles", John Wiley & Sons, New York, NY, 1983, pp. 582-585 and 588-589. |