Number | Date | Country | Kind |
---|---|---|---|
4-280818 | Sep 1992 | JPX | |
4-355507 | Dec 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4170501 | Khajezadeh | Oct 1979 | |
4247859 | Rai-Choudhury | Jan 1981 | |
4379726 | Kumamaru et al. | Apr 1983 |
Number | Date | Country |
---|---|---|
84813 | May 1985 | JPX |
234422 | Sep 1990 | JPX |
Entry |
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R. S. Hockett, "Front side Gettering for N/N.sup.+ (5b)" Proc. Electrochem Society 89-9 (ULSI Sci. Technol. 1989) pp. 190-203. |
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