Method, system, and circuit for operating a non-volatile memory array

Abstract
A method and a system for operating bits of memory cells in a memory array, the method including applying a first operating pulse to a terminal of a first cell, the first operating pulse is intended to place the first cell into a predefined state; and applying a second operating pulse to a terminal of a second cell in the set, the second operating pulse is intended to place the second cell to the predefined state, and the pulse characteristics of the second operating pulse are a function of the response of the first cell to the first operating pulse.
Description
FIELD OF THE INVENTION

The present invention relates generally to operating memory cells of non-volatile memory (NVM) arrays, such as programming and erasing, and particularly to methods for reducing pulse operations of such arrays.


BACKGROUND OF THE INVENTION

Memory cells are used in the implementation of many types of electronic devices and integrated circuits, such as, but not limited to, erasable, programmable read only memories (EPROMs), electrically erasable, programmable read only memories (EEPROMs), and flash EEPROM memories. Memory cells are used to store the data and other information for these and other integrated circuits.


Non-volatile memory (NVM) cells generally comprise transistors with programmable threshold voltages. For example, a floating gate transistor or a split gate transistor has a threshold voltage (Vt) that is programmed or erased by charging or discharging a floating gate located between a control gate and a channel in the transistor. Data is written in such memory cells by charging or discharging the floating gates of the memory cells to achieve threshold voltages corresponding to the data.


The act of programming the cell involves charging the floating gate with electrons, which increases the threshold voltage Vt. The act of erasing the cell involves removing electrons from the floating gate, which decreases the threshold voltage Vt.


One type of non-volatile cell is a nitride, read only memory (NROM) cell, described in U.S. Pat. No. 6,011,725, the disclosure of which is incorporated herein by reference. Programming and erasing of NROM cells are also described in U.S. Pat. No. 6,011,725.


Unlike a floating gate cell, the NROM cell has two separated and separately chargeable areas. Each chargeable area defines one bit. The separately chargeable areas are found within a nitride layer formed in an oxide-nitride-oxide (ONO) stack underneath the gate. When programming a bit, channel hot electrons are injected into the nitride layer. This is generally accomplished by the application of a positive gate voltage and positive drain voltage, the magnitude and duration of which are determined by different factors related to the amount of programming required.


NROM cells may be single bit. Alternatively, they may have more than one bit, wherein two individual bits, a left-side bit and a right-side bit, are stored in physically different areas of the nitride layer. Each bit may be single level or multi-level (“MLC”), i.e., may be programmed to different voltage levels.


One procedure for programming bits in NROM cells with programming pulses is described in Applicant's copending U.S. patent application Ser. No. 09/730,586, entitled “Programming And Erasing Methods For An NROM Array”, the disclosure of which is incorporated herein by reference.


The application of pulses to operate (program or erase) the NROM array may pose a problem for mass storage or code flash applications. For example, in programming a mass storage array, a major requirement is a fast programming rate, in the range of at least 2 MB/sec. The channel hot electron injection (CHE) used for programming may require a relatively high programming current, e.g., approximately 100 μA per cell. In addition, each programming step may comprise switching and subsequent verification steps. These factors may limit the amount of cells that may be programmed in parallel, to about 64 cells, for example.


Other complications that may hinder achieving fast, parallel programming rates include, among others, temperature dependence, cell length dependence (e.g., die to die and within a die), neighboring cell state dependence, second bit state dependence, and others. For example, FIG. 1 illustrates an effect of cell length on programming NROM cells. FIG. 1 illustrates the change in threshold voltage as a function of drain voltage used to program the cell. In the illustrated example, a first graph, denoted by the reference numeral 77, shows the change in threshold voltage as a function of drain voltage for a cell with a length of 0.5 microns. A second graph, denoted by the reference numeral 78, shows the change in threshold voltage as a function of drain voltage (Vd) for a cell with a length of 0.55 microns. It is seen that the slightly longer cell requires a higher drain voltage to achieve the same change in threshold voltage as the shorter cell.


As another example, FIG. 2 illustrates an effect of temperature on programming NROM cells. FIG. 2 illustrates the change in threshold voltage as a function of drain voltage (Vd) used to program the cell. In the illustrated example, a first graph, denoted by the reference numeral 79, shows the change in threshold voltage as a function of drain voltage in an ambient of 20° C. A second graph, denoted by the reference numeral 80, shows the change in threshold voltage as a function of drain voltage in an ambient of 85° C. It is seen that the warmer ambient requires a higher drain voltage to achieve the same change in threshold voltage as the cooler ambient.


Determination of programming pulses is also complicated by the fact that the cell parameters and operating conditions are usually initially unknown. Utilizing large programming pulse steps may reduce the total amount of programming pulses required to program the array. However, this may be disadvantageous because it may result in a wide and varied distribution of threshold voltages in the programmed cells of the array, which may reduce product reliability.


Alternatively, accurate verification of the cell threshold voltage and comparison of the threshold voltage to a variety of references may reduce the amount of programming pulses and provide faster convergence to the desired programmed threshold voltage level. However, such a method may incur a substantial overhead in the form of multiple verify pulses (e.g., one per reference), which is an undesirable time penalty, or may require an intricate parallel reference design, which is an undesirable chip area penalty.


SUMMARY OF THE INVENTION

The present invention seeks to provide methods for operating (programming or erasing) bits of memory cells in memory arrays, and for reducing pulse operations of such arrays. The invention is described in detail hereinbelow with reference to memory cells of NVM arrays, and particularly to multi-level NROM cells, wherein programming and erasing generally involve changing the threshold voltage level of a bit to a target threshold level. However, it should be emphasized that the invention is not limited to NVM arrays, nor to changing the threshold voltage levels of bits. Rather, the present invention is applicable for any non-volatile or volatile memory array whose operation is based on changing any kind of electrical, physical and/or mechanical properties of the cell array. The invention may be implemented in a variety of applications, such as but not limited to, mass storage or code flash applications, for example.


In accordance with an embodiment of the present invention, a set of cells in the array may be operated to determine their behavior characteristics upon the application of pulses to program or erase. After analyzing how the threshold voltage changes in accordance with the pulses, the rest of the array or some portion thereof may be programmed (or erased) en masse with a significantly reduced number of pulses and verifies. In some cases, the rest of the array may be programmed (or erased) with just one pulse. The additional operation pulses may be learnt and added to previous analysis and may determine the next operating pulse if more than one pulse is applied.


There is thus provided in accordance with an embodiment of the invention a method of operating a set of memory cells in a memory array, the method including applying a first operating pulse to a terminal of a first cell, the first operating pulse is intended to place the first cell into a predefined state, and applying a second operating pulse to a terminal of a second cell, the second operating pulse is intended to place the second cell to the predefined state, and the pulse characteristics of the second operating pulse are a function of the response of the first cell to the first operating pulse.


Further in accordance with an embodiment of the invention the method includes a step of applying a third operating pulse to a terminal of a third cell, the third operating pulse is intended to place the third cell to said predefined state, and the pulse characteristics of the third pulse are a function of the response of the first and the second cells to the first and the second operating pulses, respectively.


Further in accordance with an embodiment of the invention the method adjusts the pulse characteristics of the second operating pulse by adjusting the duration of the second operation pulse.


Still further in accordance with an embodiment of the invention the method adjusts the pulse characteristics of the second operation pulse by adjusting the amplitude of the second operation pulse.


In accordance with another embodiment of the invention a control circuit for operating a set of memory cells in a memory array is provided. The control circuit includes a charge circuit adapted to produce a first operating pulse to a terminal of a first cell intended to place the first cell into a predefined state, and a logic unit adapted to determine pulse characteristics of a second operating pulse as a function of the response of the first cell to the first operating pulse.


Further in accordance with an embodiment of the present invention the logic unit is adapted to determine pulse characteristics of a third operating pulse as a function of the response of the first cell and the second cell to the first and second operating pulses, respectively.


Further in accordance with an embodiment of the present invention the logic unit is adapted to adjust the duration of the second operation pulse.


Further in accordance with an embodiment of the present invention the logic unit is adapted to adjust the amplitude of said second operation pulse.


In accordance with an embodiment of the present invention the control circuit further includes a memory buffer adapted to store data received from the set of memory cells.


In accordance with another embodiment of the invention a system for operating a set of memory cells in a memory array is provided. The system includes a memory array, a sense amplifier adapted to determine a response of operated cells, and a control circuit adapted to produce a first operating pulse to a terminal of a first cell intended to place the first cell into a predefined state. The control circuit is further adapted to determine pulse characteristics of a second operating pulse as a function of the response of the first cell to the first operating pulse.


Further in accordance with an embodiment of the invention the control circuit is adapted to determine pulse characteristics of a third operating pulse as a function of the response of the first cell and the second cell to the first and second operating pulses, respectively.


Further in accordance with an embodiment of the invention the control circuit is adapted to adjust the duration of said the operation pulse.


Further in accordance with an embodiment of the invention the control circuit is adapted to adjust the amplitude of said second operation pulse.





BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be understood and appreciated more fully from the following detailed description taken in conjunction with the appended drawings in which:



FIG. 1 is a simplified graph of an effect of cell length on programming speed for two different cell lengths;



FIG. 2 is a simplified graph of an effect of temperature on programming speed for two different ambient temperatures;



FIG. 3 is a flow chart of a method for operating (e.g., programming or erasing) bits of memory cells in a non-volatile memory cell array, in accordance with a preferred embodiment of the present invention; and



FIG. 4 is a simplified graph comparing the distribution of the threshold voltages of the cells of the entire array, respectively after the application of a single programming pulse, after a plurality of stepped programming pulses, and after a single programming pulse plus an additional supplementary programming pulse in accordance with a preferred embodiment of the present invention.



FIG. 5 is a block diagram of a control circuit, a memory array and a sense amplifier, in accordance with an embodiment of the present invention.





DETAILED DESCRIPTION OF THE PRESENT INVENTION

Reference is now made to FIG. 3, which illustrates a method for operating bits of memory cells in a memory cell array, in accordance with an embodiment of the present invention. FIG. 3 is shown and described herein for programming the bits, but it is appreciated that the invention is not limited to the operation of programming, and the invention may be applied to other operations, such as but not limited to, erasing.


A set of memory cells or bits of the array may be selected (step 101). The set size may be any arbitrary size, such as but not limited to, 64 cells, for example. The bits in the set may then be programmed (step 102), such as by using a stepped programming algorithm. A suitable stepped programming algorithm is the one described in the Applicant's abovementioned copending U.S. patent application Ser. No. 09/730,586, entitled “Programming And Erasing Methods For An NROM Array”. The method comprises applying progressive pulses or steps of programming voltages that progressively raise the threshold voltages of the bits to the desired programmed level. The number of programming pulses or steps may comprise any number, such as but not limited to, 8 steps, and may comprise different gate and drain voltages (source may be grounded), respectively applied to word lines and bit lines of the array. The voltages may be applied for different durations of time as well during the stepped algorithm. Another example for a programming algorithm is a programming algorithm for an MLC array. This programming algorithm is described in the Applicant's copending U.S. patent application Ser. No. 10/155,217, entitled “A Method Of Programming Nonvolatile Memory Cells”. The method for programming an MLC having more than one programmed state to a target programmed state comprises applying a drain, a source and a gate voltage to the MLC, and verifying a threshold voltage level of the MLC. If the verified threshold voltage level of the MLC is below the threshold voltage level associated with the target programmed state, the drain voltage may be increased and the gate voltage may be maintained at a constant level during at least a part of the step of increasing. The steps of applying, verifying, increasing and maintaining may be repeated until the MLC's threshold voltage level is substantially equal to the threshold voltage level associated with the target programmed state. The number of said steps may also comprise any number. The application of the stepped programming algorithm or of the programming algorithm for the MLC array on the set of bits is referred to as the learning phase, wherein the response nature of the bits to the programming voltages may be learned and perhaps stored in memory. Preferably, the overall time allocated to the learning phase is negligible compared to the total array programming time, such as due to a small size of the set.


The response of the bits to the programming operation may then be analyzed, such as by a processor or a logic unit (step 103). The analysis may include information about the operation pulse including but not limited to, pulse height and length, resultant distribution tail, and amount of pulses, for example. The analysis may determine the one operating pulse that singly changes electrical, physical and/or mechanical properties of the bits a predefined amount (step 104). For example, in the programming operation, the processor may determine the programming pulse that singly increases the threshold voltages of the bits a predefined amount (step 105). In an erasing operation, the processor may determine an erasing pulse that singly lowers the threshold voltages of the bits a predefined amount (step 106).


Threshold voltage of non-volatile memory cells is just one example of electrical, physical and/or mechanical properties that may be analyzed in the learning phase. Another examples include piezoelectric and magnetoresistive properties of ferroelectric or ferromagnetic materials. For example, magnetic memory devices, such as magnetic random access memory devices, may include ferromagnetic layers separated by a non-magnetic layer. Information is stored as directions of magnetization vectors in magnetic layers. Magnetic vectors in one magnetic layer, for example, may be magnetically fixed or pinned, while the magnetization direction of the other magnetic layer may be free to switch between the same and opposite directions as information, referred to as “parallel” and “anti-parallel” states, respectively. In response to parallel and anti-parallel states, the magnetic memory device represents two different resistances. The resistance indicates minimum and maximum values when the magnetization vectors of two magnetic layers point in substantially the same and opposite directions, respectively. Accordingly, the change in the direction of the magnetization vectors or the change in the resistance are other examples of electrical, physical and/or mechanical properties that may be analyzed in the learning phase of the present invention.


The operating pulse, which has been determined as a function of the response of the electrical, physical and/or mechanical property (e.g., threshold voltage) of the bits, preferably incorporates the influence of effects or phenomena, such as but not limited to, ambient temperature, cell critical dimensions, array architecture, and others.


The rest of the array (or some portion thereof) may then be operated on (e.g., programmed or erased) with at least one further operating pulse whose voltage values are that of the operating pulse that has been determined in step 104 as a function of the response of the threshold voltages of the bits (step 107). Alternatively, the rest of the array (or some portion thereof may then be operated on (e.g., programmed or erased) with at least one further operating pulse whose voltage values are that of the operating pulse that has been determined in step 104, modified by a tolerance (step 108). Utilization of this operating pulse (optionally, with or without some delta) as the starting point for operating (e.g., programming or erasing) on the rest of the array (or some portion thereof, may compensate for the varying effects mentioned above, such as but not limited to, ambient temperature, cell critical dimensions, array architecture, and others. Moreover, this operation pulse may be analyzed, such as by a processor. The analysis of this operation pulse may be added to previous analysis and may determine the one operating pulse that singly changes electrical, physical and/or mechanical properties of the bits a predefined amount. The additional analysis of the operation pulses on the set of bits is referred to as the continuous learning phase (steps 103-111). It is noted that the continuous learning phase may be used to achieve a better threshold distribution control.


After applying the further operating pulse, the threshold voltage levels of the bits may be verified (step 109) to determine if the threshold voltage levels have reached a predefined level (step 110). If the threshold voltage levels have reached the predefined level for programming or erase, the operation method ends. If the threshold voltage levels of a certain amount of bits have not yet reached the predefined level for programming or erase, then one or more operating pulses of the same value, or alternatively a different value, based on the continuous leaming phase, may be applied to those bits or collectively to the bits of the array (step 111). The procedure may then continue until all of the bits (or a predetermined number of bits) have passed the verification step.


The additional operation pulse may be analyzed if it is done within a predefined period of time (step 112). The time criteria may be the ambient conditions within the array, such as the temperature and voltages, for example.


Reference is now made to FIG. 4, which illustrates a simplified graph comparing the distribution of the threshold voltages of the cells of the entire array after different applications of programming pulses, showing the number of bits (2n) versus the threshold voltage in volts. Curve 83 is the distribution of the threshold voltages of the cells of the entire array after application of a single programming pulse. The distribution is relatively wide. Curve 84 is the distribution of the threshold voltages of the cells of the entire array after a plurality of stepped programming pulses. The distribution is relatively narrow. Curve 85 is the distribution of the threshold voltages of the cells of the entire array after a single programming pulse (determined during the learning phase, as described hereinabove) plus an additional supplementary programming pulse, in accordance with an embodiment of the present invention. It is seen by comparing curves 84 and 85 that the final distributions of the threshold voltages are very similar. Thus, a stepped programming algorithm for the entire array may be replaced by a single programming pulse or a single pulse plus an additional pulse with virtually the same results, thereby significantly improving programming speed.


It will be appreciated by persons skilled in the art that the distribution of the threshold voltages of the cells of the entire array after a single programming pulse (determined during the continuous learning phase as described hereinabove) plus an additional supplementary programming pulse, in accordance with an embodiment of the present invention, may significantly further improve programming speed, because the operation pulse may be determined based on the analysis of a mounting set of operated cells. Since the continuous learning phase may be performed on a mounting set of operated cells, it may lead to a faster convergence to a desired programmed threshold voltage level.


It is noted that a method for operating bits of memory cells in a memory cell array, in accordance with an embodiment of the present invention, may begin with a preliminary step to determine the operation mode whether an array or a portion thereof will be operated with a learning phase, a continuous learning phase or without any of the above.


It is noted that the majority of the array cells may be fully programmed after the first programming pulse. Only a small distribution may require one higher programming pulse and a negligible amount of cells may require even higher pulses. It may be possible to achieve one pulse programming and obtain high writing speeds, with the method of the invention.


Reference is now made to FIG. 5, which illustrates a simplified block diagram of a Control Circuit 200, a Memory Array 300, and a Sense Amplifier 400, in accordance with an embodiment of the present invention. Control Circuit 200 may operate a set of memory cells in Memory Array 300. The set size may be any arbitrary size, such as but not limited to, 64 cells, for example. Control Circuit 200 may include a Charge Circuit 210 which may be adapted to produce a first operating pulse to a terminal of a first cell in Memory Array 200, and intended to place the first cell into a predefined state (i.e., programmed to a target state, read or erased). A Logic Unit 220 may be included in the Control Circuit 200 as well. Logic Unit 220 may be adapted to determine pulse characteristics of a second operating pulse as a function of the response of the first cell to the first operating pulse. Logic Unit 220 may be further adapted to determine pulse characteristics of a third operating pulse as a function of the response of the first cell and the second cell in Memory Array 300 to the first and second operating pulses, respectively. Control Circuit 200 may include an internal Memory Buffer 230 which may be adapted to store data received from Sense Amplifier 400, before it may be analyzed by Logic Unit 220. Sense Amplifier 400 may be adapted to determine the response of the bits to the operation pulses.


It is noted that the pulse characteristics of the operating pulses may be adjusted by adjusting the duration of the operation pulse or by adjusting the amplitude of the operating pulse. Logic Unit 220 may be adapted to adjust the pulse characteristics in both ways.


It will be appreciated by persons skilled in the art that the present invention is not limited by what has been particularly shown and described herein above. Rather the scope of the invention is defined by the claims that follow:

Claims
  • 1. A control circuit for operating a set of memory cells in a memory array, said control circuit comprising: a charge circuit adapted to produce a first operating pulse to a terminal of a first cell intended to place the first cell into a predefined state; and a logic unit adapted to determine pulse characteristics of a second operating pulse as a function of the response of the first cell to the first operating pulse.
  • 2. The control circuit according to claim 1, wherein said logic unit is further adapted to determine pulse characteristics of a third operating pulse as a function of the response of the first cell and a second cell to the first and second operating pulses, respectively.
  • 3. The control circuit according to claim 1, wherein said logic unit is adapted to adjust the duration of said second operation pulse.
  • 4. The control circuit according to claim 1, wherein said logic unit is adapted to adjust the amplitude of said second operation pulse.
  • 5. The control circuit according to claim 1, further comprising a memory buffer adapted to store data received from the set of memory cells.
  • 6. A system for operating a set of memory cells in a memory array, said system comprising: a memory array; a sense amplifier adapted to determine a response of operated cells; and a control circuit adapted to produce a first operating pulse to a terminal of a first cell intended to place the first cell into a predefined state; and adapted to determine pulse characteristics of a second operating pulse as a function of the response of the first cell to the first operating pulse.
  • 7. The system according to claim 6, wherein said control circuit is further adapted to determine pulse characteristics of a third operating pulse as a function of the response of the first cell and a second cell to the first and second operating pulses, respectively.
  • 8. The system according to claim 6, wherein said control circuit is adapted to adjust the duration of said second operation pulse.
  • 9. The system according to claim 6, wherein said control circuit is adapted to adjust the amplitude of said second operation pulse.
CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation from U.S. patent application Ser. No. 10/747,217, filed Dec. 30, 2003 which is a continuation-in-part application of U.S. Ser. No. 10/211,248, filed Aug. 5, 2002, issued as U.S. Pat. No. 6,700,818 on Mar. 2, 2004, which claims priority from U.S. provisional application Ser. No. 60/352,549, filed Jan. 31, 2002, both applications are hereby incorporated by reference in their entirety.

US Referenced Citations (547)
Number Name Date Kind
3881180 Gosney, Jr. Apr 1975 A
3895360 Cricchi et al. Jul 1975 A
3952325 Beale et al. Apr 1976 A
4016588 Ohya et al. Apr 1977 A
4017888 Christie et al. Apr 1977 A
4145703 Blanchard et al. Mar 1979 A
4151021 McElroy Apr 1979 A
4173766 Hayes Nov 1979 A
4173791 Bell Nov 1979 A
4247861 Hsu et al. Jan 1981 A
4257832 Schwabe et al. Mar 1981 A
4281397 Neal et al. Jul 1981 A
4306353 Jacobs et al. Dec 1981 A
4342102 Puar Jul 1982 A
4342149 Jacobs et al. Aug 1982 A
4360900 Bate Nov 1982 A
4373248 McElroy Feb 1983 A
4380057 Kotecha et al. Apr 1983 A
4388705 Sheppard Jun 1983 A
4389705 Sheppard Jun 1983 A
4404747 Collins Sep 1983 A
4435786 Tickle Mar 1984 A
4448400 Harari May 1984 A
4471373 Shimizu et al. Sep 1984 A
4494016 Ransom et al. Jan 1985 A
4507673 Aoyama Mar 1985 A
4521796 Rajkanan et al. Jun 1985 A
4527257 Cricchi Jul 1985 A
4586163 Koike Apr 1986 A
4613956 Paterson et al. Sep 1986 A
4630085 Koyama Dec 1986 A
4663645 Komori et al. May 1987 A
4665426 Allen et al. May 1987 A
4667217 Janning May 1987 A
4672409 Takei et al. Jun 1987 A
4725984 Ip et al. Feb 1988 A
4733105 Shin et al. Mar 1988 A
4742491 Liang et al. May 1988 A
4758869 Eitan et al. Jul 1988 A
4760555 Gelsomini et al. Jul 1988 A
4761764 Watanabe Aug 1988 A
4769340 Chang et al. Sep 1988 A
4780424 Holler et al. Oct 1988 A
4839705 Tigelaar et al. Jun 1989 A
4847808 Kobatake Jul 1989 A
4857770 Partovi et al. Aug 1989 A
4870470 Bass, Jr. et al. Sep 1989 A
4888735 Lee et al. Dec 1989 A
4916671 Ichiguchi Apr 1990 A
4941028 Chen et al. Jul 1990 A
4961010 Davis Oct 1990 A
4992391 Wang Feb 1991 A
5021999 Kohda et al. Jun 1991 A
5027321 Park Jun 1991 A
5029063 Lingstaedt et al. Jul 1991 A
5042009 Kazerounian et al. Aug 1991 A
5075245 Woo et al. Dec 1991 A
5081371 Wong Jan 1992 A
5086325 Schumann et al. Feb 1992 A
5094968 Schumann et al. Mar 1992 A
5104819 Freiberger et al. Apr 1992 A
5117389 Yiu May 1992 A
5120672 Mitchell et al. Jun 1992 A
5142495 Canepa Aug 1992 A
5142496 Van Buskirk Aug 1992 A
5159570 Mitchell et al. Oct 1992 A
5168334 Mitchell et al. Dec 1992 A
5172338 Mehrotra et al. Dec 1992 A
5175120 Lee Dec 1992 A
5204835 Eitan Apr 1993 A
5214303 Aoki May 1993 A
5237213 Tanoi Aug 1993 A
5241497 Komarek Aug 1993 A
5260593 Lee Nov 1993 A
5268861 Hotta Dec 1993 A
5276646 Kim et al. Jan 1994 A
5280420 Rapp Jan 1994 A
5289412 Frary et al. Feb 1994 A
5293563 Ohta Mar 1994 A
5295092 Hotta et al. Mar 1994 A
5295108 Higa Mar 1994 A
5305262 Yoneda Apr 1994 A
5311049 Tsuruta May 1994 A
5315541 Harari et al. May 1994 A
5324675 Hayabuchi Jun 1994 A
5334555 Sugiyama et al. Aug 1994 A
5335198 Van Buskirk et al. Aug 1994 A
5338954 Shimoji Aug 1994 A
5345425 Shikatani Sep 1994 A
5349221 Shimoji Sep 1994 A
5350710 Hong et al. Sep 1994 A
5352620 Komori et al. Oct 1994 A
5357134 Shimoji Oct 1994 A
5359554 Odake et al. Oct 1994 A
5361343 Kosonocky et al. Nov 1994 A
5366915 Kodama Nov 1994 A
5375094 Naruke Dec 1994 A
5381374 Shiraishi et al. Jan 1995 A
5393701 Ko et al. Feb 1995 A
5394355 Uramoto et al. Feb 1995 A
5399891 Yiu et al. Mar 1995 A
5400286 Chu et al. Mar 1995 A
5402374 Tsuruta et al. Mar 1995 A
5412601 Sawada et al. May 1995 A
5414693 Ma et al. May 1995 A
5418176 Yang et al. May 1995 A
5418743 Tomioka et al. May 1995 A
5422844 Wolstenholme et al. Jun 1995 A
5424567 Chen Jun 1995 A
5424978 Wada et al. Jun 1995 A
5426605 Van Berkel et al. Jun 1995 A
5434825 Harari et al. Jul 1995 A
5436478 Bergemont et al. Jul 1995 A
5436481 Egawa et al. Jul 1995 A
5440505 Fazio et al. Aug 1995 A
5450341 Sawada et al. Sep 1995 A
5450354 Sawada et al. Sep 1995 A
5455793 Amin et al. Oct 1995 A
5467308 Chang et al. Nov 1995 A
5477499 Van Buskirk et al. Dec 1995 A
5495440 Asakura Feb 1996 A
5496753 Sakurai et al. Mar 1996 A
5508968 Collins et al. Apr 1996 A
5518942 Shrivastava May 1996 A
5521870 Ishikawa May 1996 A
5523251 Hong Jun 1996 A
5523972 Rashid et al. Jun 1996 A
5530803 Chang et al. Jun 1996 A
5534804 Woo Jul 1996 A
5537358 Fong Jul 1996 A
5544116 Chao et al. Aug 1996 A
5553018 Wang et al. Sep 1996 A
5553030 Tedrow et al. Sep 1996 A
5557221 Taguchi et al. Sep 1996 A
5557570 Iwahashi Sep 1996 A
5559687 Nicollini et al. Sep 1996 A
5563823 Yiu et al. Oct 1996 A
5566125 Fazio et al. Oct 1996 A
5568085 Eitan et al. Oct 1996 A
5579199 Kawamura et al. Nov 1996 A
5581252 Thomas Dec 1996 A
5583808 Brahmbhatt Dec 1996 A
5590068 Bergemont Dec 1996 A
5590074 Akaogi et al. Dec 1996 A
5592417 Mirabel Jan 1997 A
5596527 Tomioka et al. Jan 1997 A
5599727 Hakozaki et al. Feb 1997 A
5600586 Lee et al. Feb 1997 A
5606523 Mirabel Feb 1997 A
5608679 Mi et al. Mar 1997 A
5612642 McClinyock Mar 1997 A
5617357 Haddad et al. Apr 1997 A
5623438 Guritz et al. Apr 1997 A
5627784 Roohparvar May 1997 A
5627790 Golla et al. May 1997 A
5633603 Lee May 1997 A
5636288 Bonneville et al. Jun 1997 A
5644531 Kuo et al. Jul 1997 A
5654568 Nakao Aug 1997 A
5656513 Wang et al. Aug 1997 A
5657332 Auclair et al. Aug 1997 A
5661060 Gill et al. Aug 1997 A
5663907 Frayer et al. Sep 1997 A
5672959 Der Sep 1997 A
5675280 Nomura Oct 1997 A
5677867 Hazani Oct 1997 A
5677869 Fazio et al. Oct 1997 A
5683925 Irani et al. Nov 1997 A
5689459 Chang et al. Nov 1997 A
5694356 Wong et al. Dec 1997 A
5696929 Hasbun et al. Dec 1997 A
5708608 Park et al. Jan 1998 A
5712814 Fratin et al. Jan 1998 A
5712815 Bill et al. Jan 1998 A
5715193 Norman Feb 1998 A
5717581 Canclini Feb 1998 A
5717632 Richart et al. Feb 1998 A
5717635 Akatsu Feb 1998 A
5726946 Yamagata et al. Mar 1998 A
5729489 Fazio et al. Mar 1998 A
5748534 Dunlap et al. May 1998 A
5751037 Aozasa et al. May 1998 A
5751637 Chen et al. May 1998 A
5754475 Bill et al. May 1998 A
5760445 Diaz Jun 1998 A
5760634 Fu Jun 1998 A
5768192 Eitan Jun 1998 A
5768193 Lee et al. Jun 1998 A
5771197 Kim Jun 1998 A
5774395 Richart et al. Jun 1998 A
5777919 Chi-Yung et al. Jul 1998 A
5781476 Seki et al. Jul 1998 A
5781478 Takeuchi et al. Jul 1998 A
5784314 Sali et al. Jul 1998 A
5787036 Okazawa Jul 1998 A
5793079 Georgescu et al. Aug 1998 A
5801076 Ghneim et al. Sep 1998 A
5805500 Campardo et al. Sep 1998 A
5808506 Tran Sep 1998 A
5812449 Song Sep 1998 A
5812456 Hull et al. Sep 1998 A
5812457 Arase Sep 1998 A
5815435 Van Tran Sep 1998 A
5822256 Bauer et al. Oct 1998 A
5825683 Chang et al. Oct 1998 A
5825686 Schmitt-Landsiedel et al. Oct 1998 A
5828601 Hollmer et al. Oct 1998 A
5834851 Ikeda et al. Nov 1998 A
5835935 Estakhri et al. Nov 1998 A
5836772 Chang et al. Nov 1998 A
5841700 Chang Nov 1998 A
5847441 Cutter et al. Dec 1998 A
5861771 Matsuda et al. Jan 1999 A
5862076 Eitan Jan 1999 A
5864164 Wen Jan 1999 A
5867429 Chen et al. Feb 1999 A
5870334 Hemink et al. Feb 1999 A
5870335 Khan et al. Feb 1999 A
5875128 Ishizuka et al. Feb 1999 A
5877537 Aoki Mar 1999 A
5880620 Gitlin et al. Mar 1999 A
5886927 Takeuchi Mar 1999 A
RE36179 Shimoda Apr 1999 E
5892710 Fazio et al. Apr 1999 A
5903031 Yamada et al. May 1999 A
5910924 Tanaka et al. Jun 1999 A
5920503 Lee et al. Jul 1999 A
5920507 Takeuchi et al. Jul 1999 A
5926409 Engh et al. Jul 1999 A
5930195 Komatsu et al. Jul 1999 A
5933366 Yoshikawa Aug 1999 A
5933367 Matsuo et al. Aug 1999 A
5936888 Sugawara Aug 1999 A
5940332 Artieri Aug 1999 A
5946258 Evertt et al. Aug 1999 A
5946558 Hsu Aug 1999 A
5949714 Hemink et al. Sep 1999 A
5949728 Liu et al. Sep 1999 A
5963412 En Oct 1999 A
5963465 Eitan Oct 1999 A
5966603 Eitan Oct 1999 A
5969989 Iwahashi Oct 1999 A
5969993 Takeshima Oct 1999 A
5973373 Krautschneider et al. Oct 1999 A
5982666 Campardo Nov 1999 A
5986940 Atsumi et al. Nov 1999 A
5990526 Bez et al. Nov 1999 A
5991202 Derhacobian et al. Nov 1999 A
5999444 Fujiwara et al. Dec 1999 A
5999494 Holzrichter Dec 1999 A
6000006 Bruce et al. Dec 1999 A
6005423 Schultz Dec 1999 A
6011725 Eitan Jan 2000 A
6018186 Hsu Jan 2000 A
6020241 You et al. Feb 2000 A
6028324 Su et al. Feb 2000 A
6030871 Eitan Feb 2000 A
6034403 Wu Mar 2000 A
6034896 Ranaweera et al. Mar 2000 A
6037627 Kitamura et al. Mar 2000 A
6040610 Noguchi et al. Mar 2000 A
6044019 Cernea et al. Mar 2000 A
6044022 Nachumovsky Mar 2000 A
6063666 Chang et al. May 2000 A
6064226 Earl May 2000 A
6064251 Park May 2000 A
6064591 Takeuchi et al. May 2000 A
6074916 Cappelletti Jun 2000 A
6075402 Ghilardelli Jun 2000 A
6075724 Li et al. Jun 2000 A
6078518 Chevallier Jun 2000 A
6081456 Dadashev Jun 2000 A
6084794 Lu et al. Jul 2000 A
6091640 Kawahara et al. Jul 2000 A
6094095 Murray et al. Jul 2000 A
6097639 Choi et al. Aug 2000 A
6107862 Mukainakano et al. Aug 2000 A
6108240 Lavi et al. Aug 2000 A
6108241 Chevallier Aug 2000 A
6117714 Beatty Sep 2000 A
6118207 Ormerod et al. Sep 2000 A
6118692 Banks Sep 2000 A
6122198 Haddad et al. Sep 2000 A
6128226 Eitan et al. Oct 2000 A
6128227 Kim Oct 2000 A
6130572 Ghilardelli et al. Oct 2000 A
6130574 Bloch et al. Oct 2000 A
6133095 Eitan et al. Oct 2000 A
6134156 Eitan Oct 2000 A
6137718 Reisinger Oct 2000 A
6147904 Liron Nov 2000 A
6147906 Bill et al. Nov 2000 A
6150800 Kinoshita et al. Nov 2000 A
6154081 Pakkala et al. Nov 2000 A
6156149 Cheung et al. Dec 2000 A
6157242 Fukui Dec 2000 A
6157570 Nachumovsky Dec 2000 A
6163048 Hirose et al. Dec 2000 A
6163484 Uekubo Dec 2000 A
6169691 Pasotti et al. Jan 2001 B1
6175523 Yang et al. Jan 2001 B1
6181597 Nachumovsky Jan 2001 B1
6181605 Hollmer et al. Jan 2001 B1
6185143 Perner et al. Feb 2001 B1
6188211 Rincon-Mora et al. Feb 2001 B1
6188613 Manning Feb 2001 B1
6190966 Ngo et al. Feb 2001 B1
6192445 Rezvani Feb 2001 B1
6195196 Kimura et al. Feb 2001 B1
6198342 Kawai Mar 2001 B1
6201282 Eitan Mar 2001 B1
6201737 Hollmer et al. Mar 2001 B1
6205055 Parker Mar 2001 B1
6205056 Pan et al. Mar 2001 B1
6205059 Gutala et al. Mar 2001 B1
6208200 Arakawa Mar 2001 B1
6208557 Bergemont et al. Mar 2001 B1
6214666 Mehta Apr 2001 B1
6215148 Eitan Apr 2001 B1
6215697 Lu et al. Apr 2001 B1
6215702 Derhacobian et al. Apr 2001 B1
6218695 Nachumovsky Apr 2001 B1
6219277 Devin et al. Apr 2001 B1
6219290 Chang et al. Apr 2001 B1
6222762 Guterman et al. Apr 2001 B1
6222768 Hollmer et al. Apr 2001 B1
6233180 Eitan et al. May 2001 B1
6240032 Fukumoto May 2001 B1
6240040 Akaogi et al. May 2001 B1
6246555 Tham Jun 2001 B1
6252442 Malherbe Jun 2001 B1
6252799 Liu et al. Jun 2001 B1
6256231 Lavi et al. Jul 2001 B1
6261904 Pham et al. Jul 2001 B1
6265268 Halliyal et al. Jul 2001 B1
6266281 Derhacobian et al. Jul 2001 B1
6272047 Mihnea et al. Aug 2001 B1
6275414 Randolph et al. Aug 2001 B1
6281545 Liang et al. Aug 2001 B1
6282133 Nakagawa et al. Aug 2001 B1
6282145 Tran et al. Aug 2001 B1
6285246 Basu Sep 2001 B1
6285574 Eitan Sep 2001 B1
6285589 Kajitani Sep 2001 B1
6285614 Mulatti et al. Sep 2001 B1
6292394 Cohen et al. Sep 2001 B1
6297096 Boaz Oct 2001 B1
6297143 Foote et al. Oct 2001 B1
6297974 Ganesan et al. Oct 2001 B1
6304485 Harari et al. Oct 2001 B1
6307784 Hamilton et al. Oct 2001 B1
6307807 Sakui et al. Oct 2001 B1
6308485 Harari et al. Oct 2001 B1
6320786 Chang et al. Nov 2001 B1
6324094 Chevallier Nov 2001 B1
6326265 Liu et al. Dec 2001 B1
6330192 Ohba et al. Dec 2001 B1
6331950 Kuo et al. Dec 2001 B1
6335874 Eitan Jan 2002 B1
6337502 Eitan et al. Jan 2002 B1
6339556 Watanabe Jan 2002 B1
6343033 Parker Jan 2002 B1
6346442 Aloni et al. Feb 2002 B1
6348381 Jong Feb 2002 B1
6348711 Eitan Feb 2002 B1
6351415 Kushnarenko Feb 2002 B1
6353356 Liu Mar 2002 B1
6353554 Banks Mar 2002 B1
6353555 Jeong Mar 2002 B1
6356469 Roohparvar et al. Mar 2002 B1
6359501 Lin et al. Mar 2002 B2
6374337 Estakhri Apr 2002 B1
6385086 Mihara et al. May 2002 B1
6396741 Bloom et al. May 2002 B1
6400209 Matsuyama et al. Jun 2002 B1
6400607 Pasotti et al. Jun 2002 B1
6407537 Antheunis Jun 2002 B2
6410388 Kluth et al. Jun 2002 B1
6417081 Thurgate Jul 2002 B1
6418506 Pashley et al. Jul 2002 B1
6426898 Mihnea et al. Jul 2002 B1
6429063 Eitan Aug 2002 B1
6433624 Grossnikle et al. Aug 2002 B1
6436766 Rangarajan et al. Aug 2002 B1
6436768 Yang et al. Aug 2002 B1
6438031 Fastow Aug 2002 B1
6438035 Yamamoto et al. Aug 2002 B2
6440797 Wu et al. Aug 2002 B1
6442074 Hamilton et al. Aug 2002 B1
6445030 Wu et al. Sep 2002 B1
6449188 Fastow Sep 2002 B1
6449190 Bill Sep 2002 B1
6452438 Li Sep 2002 B1
6456528 Chen Sep 2002 B1
6456533 Hamilton et al. Sep 2002 B1
6458656 Park et al. Oct 2002 B1
6458677 Hopper et al. Oct 2002 B1
6469929 Kushnarenko et al. Oct 2002 B1
6469935 Hayashi Oct 2002 B2
6472706 Widdershoven et al. Oct 2002 B2
6477085 Kuo Nov 2002 B1
6490204 Bloom et al. Dec 2002 B2
6496414 Kasa et al. Dec 2002 B2
6504756 Gonzalez et al. Jan 2003 B2
6510082 Le et al. Jan 2003 B1
6512701 Hamilton et al. Jan 2003 B1
6519180 Tran et al. Feb 2003 B2
6519182 Derhacobian et al. Feb 2003 B1
6522585 Pasternak Feb 2003 B2
6525969 Kurihara et al. Feb 2003 B1
6528390 Komori et al. Mar 2003 B2
6529412 Chen et al. Mar 2003 B1
6532173 Lioka et al. Mar 2003 B2
6535020 Yin Mar 2003 B1
6535434 Maayan et al. Mar 2003 B2
6537881 Rangarjan et al. Mar 2003 B1
6538270 Randolph et al. Mar 2003 B1
6541816 Ramsbey et al. Apr 2003 B2
6552387 Eitan Apr 2003 B1
6555436 Ramsbey et al. Apr 2003 B2
6559500 Torii May 2003 B2
6562683 Wang et al. May 2003 B1
6566194 Ramsbey et al. May 2003 B1
6566699 Eitan May 2003 B2
6567303 Hamilton et al. May 2003 B1
6567312 Torii et al. May 2003 B1
6570211 He et al. May 2003 B1
6574139 Kurihara Jun 2003 B2
6577514 Shor et al. Jun 2003 B2
6577532 Chevallier Jun 2003 B1
6577547 Ukon Jun 2003 B2
6583005 Hashimoto et al. Jun 2003 B2
6583479 Fastow et al. Jun 2003 B1
6584017 Maayan et al. Jun 2003 B2
6590811 Hamilton et al. Jul 2003 B1
6593606 Randolph et al. Jul 2003 B1
6594181 Yamada Jul 2003 B1
6608526 Sauer Aug 2003 B1
6614052 Zhang Sep 2003 B1
6614295 Tsuchi Sep 2003 B2
6614686 Kawamura Sep 2003 B1
6614692 Maayan et al. Sep 2003 B2
6617179 Kim Sep 2003 B1
6617215 Halliyal et al. Sep 2003 B1
6618290 Wang et al. Sep 2003 B1
6624672 Confaloneri et al. Sep 2003 B2
6627555 Eitan et al. Sep 2003 B2
6630384 Sun et al. Oct 2003 B1
6633496 Maayan et al. Oct 2003 B2
6633499 Eitan et al. Oct 2003 B1
6633956 Mitani Oct 2003 B1
6636440 Maayan et al. Oct 2003 B2
6639271 Zheng et al. Oct 2003 B1
6639837 Takano et al. Oct 2003 B2
6639844 Liu et al. Oct 2003 B1
6639849 Takahashi et al. Oct 2003 B2
6642148 Ghandehari et al. Nov 2003 B1
6642573 Halliyal et al. Nov 2003 B1
6642586 Takahashi Nov 2003 B2
6643170 Huang et al. Nov 2003 B2
6643177 Le et al. Nov 2003 B1
6643178 Kurihara Nov 2003 B2
6643181 Sofer et al. Nov 2003 B2
6645801 Ramsbey et al. Nov 2003 B1
6649972 Eitan Nov 2003 B2
6650568 Iijima Nov 2003 B2
6653190 Yang et al. Nov 2003 B1
6653191 Yang et al. Nov 2003 B1
6654296 Jang et al. Nov 2003 B2
6664588 Eitan Dec 2003 B2
6665769 Cohen et al. Dec 2003 B2
6670241 Kamal et al. Dec 2003 B1
6670669 Kawamura Dec 2003 B1
6674138 Halliyal et al. Jan 2004 B1
6677805 Shor et al. Jan 2004 B2
6680509 Wu et al. Jan 2004 B1
6686242 Willer et al. Feb 2004 B2
6690602 Le et al. Feb 2004 B1
6700818 Shappir et al. Mar 2004 B2
6717207 Kato Apr 2004 B2
6723518 Papsidero et al. Apr 2004 B2
6731542 Le et al. May 2004 B1
6738289 Gongwer et al. May 2004 B2
6744692 Shiota et al. Jun 2004 B2
6765259 Kim Jul 2004 B2
6768165 Eitan Jul 2004 B1
6781876 Forbes et al. Aug 2004 B2
6788579 Gregori et al. Sep 2004 B2
6791396 Shor et al. Sep 2004 B2
6794249 Palm et al. Sep 2004 B2
6829172 Bloom et al. Dec 2004 B2
6831872 Matsuoka Dec 2004 B2
6836431 Chang Dec 2004 B2
6870772 Nitta et al. Mar 2005 B1
6871258 Micheloni et al. Mar 2005 B2
6885585 Maayan et al. Apr 2005 B2
6888745 Ehiro et al. May 2005 B2
6912160 Yamada Jun 2005 B2
6917544 Maayan et al. Jul 2005 B2
6928001 Avni et al. Aug 2005 B2
6937523 Eshel Aug 2005 B2
6967872 Quader et al. Nov 2005 B2
6996692 Kuono Feb 2006 B2
7079420 Shappir et al. Jul 2006 B2
20010006477 Banks Jul 2001 A1
20020004878 Norman Jan 2002 A1
20020004921 Muranaka et al. Jan 2002 A1
20020064911 Eitan May 2002 A1
20020132436 Eliyahu et al. Sep 2002 A1
20020140109 Keshavarzi et al. Oct 2002 A1
20020145465 Shor et al. Oct 2002 A1
20020191465 Maayan et al. Dec 2002 A1
20020199065 Subramoney et al. Dec 2002 A1
20030001213 Lai Jan 2003 A1
20030021155 Yachareni et al. Jan 2003 A1
20030072192 Bloom et al. Apr 2003 A1
20030076710 Sofer et al. Apr 2003 A1
20030117841 Yamashita Jun 2003 A1
20030131186 Buhr Jul 2003 A1
20030134476 Roizin et al. Jul 2003 A1
20030142544 Maayan et al. Jul 2003 A1
20030145176 Dvir et al. Jul 2003 A1
20030145188 Cohen et al. Jul 2003 A1
20030155659 Verma et al. Aug 2003 A1
20030190786 Ramsbey et al. Oct 2003 A1
20030197221 Shinozaki et al. Oct 2003 A1
20030202411 Yamada Oct 2003 A1
20030206435 Takahashi Nov 2003 A1
20030208663 Van Buskirk et al. Nov 2003 A1
20030209767 Takahashi et al. Nov 2003 A1
20030214844 Iijima Nov 2003 A1
20030218207 Hashimoto et al. Nov 2003 A1
20030218913 Le et al. Nov 2003 A1
20030222303 Fukuda et al. Dec 2003 A1
20030227796 Miki et al. Dec 2003 A1
20040012993 Kurihara Jan 2004 A1
20040013000 Torii Jan 2004 A1
20040014290 Yang et al. Jan 2004 A1
20040021172 Zheng et al. Feb 2004 A1
20040027858 Takahashi et al. Feb 2004 A1
20040151034 Shor et al. Aug 2004 A1
20040153621 Polansky et al. Aug 2004 A1
20040157393 Hwang Aug 2004 A1
20040222437 Avni et al. Nov 2004 A1
20050058005 Shappir et al. Mar 2005 A1
20050117395 Maayan et al. Jun 2005 A1
20050140405 Do et al. Jun 2005 A1
Foreign Referenced Citations (71)
Number Date Country
0 656 628 Jun 1995 EP
0751560 Jun 1995 EP
0693781 Jan 1996 EP
0 822 557 Feb 1998 EP
0 843 398 May 1998 EP
0580467 Sep 1998 EP
0461764 Jul 2000 EP
1 071 096 Jan 2001 EP
1073120 Jan 2001 EP
1 091 418 Apr 2001 EP
1126468 Aug 2001 EP
0740307 Dec 2001 EP
1164597 Dec 2001 EP
1 207 552 May 2002 EP
1 223 586 Jul 2002 EP
1225596 Jul 2002 EP
1227501 Jul 2002 EP
1333445 Aug 2003 EP
1 365 452 Nov 2003 EP
001217744 Mar 2004 EP
1297899 Nov 1972 GB
2157489 Mar 1985 GB
54-053929 Apr 1979 JP
60-200566 Oct 1985 JP
60201594 Oct 1985 JP
63-249375 Oct 1988 JP
3-285358 Dec 1991 JP
04-226071 Aug 1992 JP
04-291962 Oct 1992 JP
05021758 Jan 1993 JP
06151833 May 1994 JP
06-232416 Aug 1994 JP
07193151 Jul 1995 JP
08-106791 Apr 1996 JP
08-297988 Nov 1996 JP
09-017981 Jan 1997 JP
09162314 Jun 1997 JP
10-106276 Apr 1998 JP
10 334676 Dec 1998 JP
11-162182 Jun 1999 JP
11-354758 Dec 1999 JP
2001-085646 Mar 2001 JP
2001-118392 Apr 2001 JP
2001-156189 Jun 2001 JP
2002-216488 Aug 2002 JP
3358663 Oct 2002 JP
WO 8100790 Mar 1981 WO
WO 9615553 May 1996 WO
WO 9625741 Aug 1996 WO
WO 9803977 Jan 1998 WO
WO 9931670 Jun 1999 WO
WO 9957728 Nov 1999 WO
WO 0046808 Aug 2000 WO
WO 0165566 Sep 2001 WO
WO 0165567 Sep 2001 WO
WO 0184552 Nov 2001 WO
WO 0243073 May 2002 WO
WO 03032393 Apr 2003 WO
WO 03036651 May 2003 WO
WO 03054964 Jul 2003 WO
WO 03063167 Jul 2003 WO
WO 03063168 Jul 2003 WO
WO 03079370 Sep 2003 WO
WO 03079446 Sep 2003 WO
WO 03083916 Oct 2003 WO
WO 03088258 Oct 2003 WO
WO 03088259 Oct 2003 WO
WO 03088260 Oct 2003 WO
WO 03088261 Oct 2003 WO
WO 03088353 Oct 2003 WO
WO 03100790 Dec 2003 WO
Related Publications (1)
Number Date Country
20060126396 A1 Jun 2006 US
Provisional Applications (1)
Number Date Country
60352549 Jan 2002 US
Continuations (1)
Number Date Country
Parent 10747217 Dec 2003 US
Child 11328015 US
Continuation in Parts (1)
Number Date Country
Parent 10211248 Aug 2002 US
Child 10747217 US