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3977566 | Hill et al. | Aug 1976 | |
5009385 | Burgener et al. | Apr 1991 | |
5277534 | Anderson et al. | Jan 1994 | |
5326162 | Boverman | Jul 1994 | |
5394658 | Schneiner et al. | Mar 1995 | |
5407449 | Zinger | Apr 1995 | |
5441337 | Mazura et al. | Aug 1995 | |
5464313 | Ohsawa | Nov 1995 | |
5476176 | Gregerson et al. | Dec 1995 | |
5503472 | Vu et al. | Apr 1996 | |
5527390 | Ono et al. | Jun 1996 | |
5565034 | Nanbu et al. | Oct 1996 |
Number | Date | Country |
---|---|---|
544311 | Jun 1993 | EPX |
8100965 | Apr 1981 | SEX |
Entry |
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Van Doren, Matthew J., Precision Machine Design for the Semiconductor Equipment Manufacturing Industry, Massachusetts Institute of Technology, May 1995. |
Slocum, Alexander H., Precision Machine Design, Prentice Hall:Englewood Cliffs, New Jersey, p. 83, 352-353, 401-413, 1992. |