Claims
- 1. An apparatus adapted for performing energy analysis on ions for quantitative analysis measurements by a mass spectrometer, comprising:
- an inner conducting hemisphere and an outer conductor adapted to provide a required electric field potential therebetween for performing said energy analysis of said ions;
- resistive disk means disposed between and connecting said inner conducting hermisphere and said outer conductor for providing predetermined electric field boundary conditions to achieve said required electric field potential, said resistive disk means including ion entrance and exit windows and further comprising an insulator substrate and disposed on the walls of said ion entrance and exit windows and on said insulator substrate a preselected thick film with a two dimensional pattern configuration having selected substantially uniform electrical resistivity characteristics enabling generation of said predetermined electric field boundary conditions responsive to an electrical current applied to said thick film configuration.
- 2. The apparatus as defined in claim 1 wherein said outer conductor comprises an outer conducting hemisphere.
- 3. A method for performing quantitative spectroscopic analysis by energy and angular refocusing of ions of a selected atomic component from a sample and sensing the ions with a detector, comprising the steps of:
- generating near said sample a volume containing said selected atomic component;
- ionizing said selected atomic component in said volume near said sample;
- generating electrical field conditions for extracting said ionized atomic component;
- inputting said extracted ionic atomic component to an electrostatic analyzer;
- applying a first 180.degree. spherical electrostatic field to said input extracted ionic atomic component for energy analyzing said ionic component and generating an output beam;
- refocusing said output beam using a telescopic electrostatic lens system to provide a refocused beam; and,
- applying a second 180.degree. spherical electrostatic field to said refocused beam for completing said energy analyzing process and focusing said energy analyzed beam on said detector.
- 4. A spectrometer for performing energy analysis on charged particles for quantitative spectroscopy, comprising:
- an inner conducting hemisphere and an outer conductor adapted to provide a required electric field potential therebetween for performing said energy analysis of said charged particles; and
- resistive disk means disposed between said inner conducting hemisphere and said outer conductor for providing predetermined electric field boundary conditions to achieve said required electric field potential, said resistive disk means including particle entrance and exit windows and further comprising an insulator substrate and disposed on the walls of said particle entrance and exit windows and on said insulator substrate a preselected thick film with a two-dimensional pattern configuration having selected substantially uniform electrical resistivity characteristics enabling generation of said predetermined electric field boundary conditions responsive to an electrical current applied to said thick film configuration.
- 5. The spectrometer as defined in claim 4 wherein said charged particles selectively comprise positive ions, negative ions and electrons.
- 6. A method for performing quantitative spectroscopy by energy analyzing charged particles emanating from a sample and sensing said charged particles with a detector, comprising the steps of:
- generating said charged particles emanating from said sample;
- applying electric field conditions to said charged particles for extracting said charged particles;
- inputting said extracted charged particles to an electrostatic analyzer;
- applying a first 180.degree. spherical electrostatic field to said input charged particles for energy analyzing said charged particles and generating an output beam;
- refocusing said output beam using a telescopic electrostatic lens system to provide a refocused beam of said energy analyzed charged particles; and
- applying a second 180.degree. spherical electrostatic field to said refocused beam for completing said energy analyzing and focusing said energy analyzed beam on said detector.
- 7. An apparatus adapted for performing energy analysis on charged particles for quantitative analysis measurements by a spectrometer, comprising:
- an inner conducting hemisphere and an outer conductor adapted to provide a required electric field potential therebetween for performing said energy analysis of said charged particles; and
- resistive disk means disposed between and connecting said inner conducting hemisphere and said outer conductor for providing predetermined electric field boundary conditions to achieve said required electric field potential, said resistive disk means including charged particle entrance and exit windows and further comprising an insulator substrate and disposed thereon a thick film having a preselected two-dimensional pattern and selected substantially uniform electrical resistivity characteristics enabling generation of said predetermined electric field boundary conditions responsive to an electrical current applied to said thick film.
- 8. An apparatus adapted for performing energy analysis on charged particles for quantitative analysis measurements by a spectrometer, comprising:
- an inner conducting hemisphere and an outer conductor adapted to provide a required spherical electric field potential therebetween for performing said energy analysis of said charged particles; and
- resistive disk means disposed between and connecting said inner conducting hemisphere and said outer conductor for providing predetermined electric field boundary conditions to achieve said required electric field potential, said resistive disk means including charged particle entrance and exit windows and further comprising an insulator substrate and disposed thereon a uniform thickness, thick film having a preselected two-dimensional pattern and selected substantially uniform electrical resistivity characteristics enabling generation of said predetermined electric field boundary conditions responsive to an electrical current applied to said thick film.
- 9. An apparatus adapted for performing energy analysis on charged particles for quantitative analysis measurements by a spectrometer, comprising:
- means for generating a three-dimensionsl electric field potential for performing said energy analysis of said charged particles; and
- resistive disk means coupled to said electric field potential means for providing predetermined electric field boundary conditions to modify said electric field potential to achieve an optimum electric field potential, said resistive disk means including a particle entrance window and a particle exit window and further comprising an insulator substrate and disposed thereon a substantially uniform resistivity thick film having a preselected two-dimensional pattern enabling generation of said optimum three-dimensional electric field potential and said thick film is disposed on the walls of said particle entrance and exit windows.
- 10. A method for performing quantitative spectroscopic analysis by energy and angular refocusing of ions of a selected atomic component from a sample and sensing the ions with a detector, comprising the steps of:
- generating near said sample a volume containing said selected atomic component;
- ionizing said selected atomic component in said volume near said sample;
- generating electrical field conditions for extracting said ionized atomic component;
- inputting said extracted ionic atomic component to an electrostatic analyzer;
- applying a first 180.degree. spherical electrostatic field to said input extracted ionic atomic component for energy analyzing said ionic component and generating an output beam;
- refocusing spatially and temporally said output beam using a telescopic electrostatic lens system to provide a refocused beam; and
- applying a second 180.degree. spherical electrostatic field to said refocused beam for completing said energy analyzing process and spatially and temporally focusing said energy analyzed beam on said detector.
- 11. A method for performing quantitative spectroscopy of energy analyzing charged particles emanating from a sample and sensing said charged particles with a detector, comprising the steps of:
- generating said charged particles emanating from said sample;
- applying electric field conditions to said charged particles for extracting said charged particles;
- inputting said extracted charged particles to an electrostatic analyzer;
- applying a first 180.degree. spherical electrostatic field to said input charged particles for energy analyzing said charged particles and generating an output beam;
- refocusing spatially and temporally said output beam using a telescopic electrostatic lens system to provide a refocused beam of said energy analyzed charged particles; and
- applying a second 180.degree. spherical electrostatic field to said refocused beam for completing said energy analyzing and spatially and temporarily focusing said energy analyzed beam on said detector.
- 12. An apparatus for performing quantitative spectroscopy using an electrostatic analyzer for energy analyzing charged particles emanating from a sample and sensing said charged particles with a detector, comprising:
- means for generating said charged particles emanating from said sample;
- means for applying electric field conditions to said charged particles for extracting said charged particles;
- means for inputting said extracted charged particle through a first entrance window of said electrostatic analyzer, said first entrance window having a first diameter;
- means for applying a first 180.degree. spherical electrostatic field to said input charged particles for energy analyzing said charged particles and generating an output beam, said output beam passing through a first exit window of said electrostatic analyzer and said first exit window having a second diameter greater than said first diameter, enabling passage of said charged particles having a wide energy range substantially different from the mean energy of said output beam;
- means for refocusing spatially and temporally said output beam to provide a refocused beam of said energy analyzed charged particles; and
- means for applying a second 180.degree. spherical electrostatic field of said refocused beam, said refocused beam passing through a second entrance window having a third diameter and said second entrance window allowing entry of said wide energy range charged particles, and said second electrostatic field completing said energy analyzing and focusing of said charged particles through a second exit window having a diameter less than said second entrance window.
- 13. An apparatus for performing quantitative spectroscopy using an electrostatic analyzer for energy analyzing charged particles emanating from a sample and sensing said charged particles with a detector, comprising:
- means for generating said charged particles emanating from said sample;
- means for applying electric field conditions to said charged particles for extracting said charged particles;
- means for inputting said extracted charged particles through a first entrance window of said electrostatic analyzer, said first entrance window having a first diameter;
- means for applying a first 180.degree. spherical electrostatic field to said input charged particles for energy analyzing said charged particles and generating an output beam, said ouput beam passing through a first exit window of said electrostatic analyzer and said first exit window having a second diameter greater than said first diameter, enabling passage of angularly divergent ones of said charged particles;
- means for refocusing spatially and temporally said output beam to provide a refocusing beam of said energy analyzed charge particles; and
- means for applying a second 180.degree. spherical electrostatic field to said refocused beam, said refocused beam passing through a second entrance window having a third diameter and said second entrance window allowing entry of said angularly divergent charged particles, and said second electrostatic field completing said energy analyzing and focusing of said charged particles through a second exit window having a diameter less than said second entrance window.
- 14. A spectrometer for performing energy analysis on charged particles for quantitative spectroscopy, comprising:
- an inner conducting hemisphere and an outer conductor adapted to provide a required electric field potential therebetween for performing said energy analysis of said charged particles; and
- resistive disk means disposed between and connecting said inner conducting hemisphere and said outer conductor for providing predetermined electric field boundary conditions to achieve said required electric field potential, said resistive disk means including particle entrance and exit windows and further comprising an insulator substrate and disposed on the walls of said particle entrance and exit windows and on said insulator substrate a thick film in a preselected two-dimensional pattern configuration having substantially uniform resistivity characteristics throughout said thick film and said resistive disk means having upper and lower planar boundaries substantially perpendicular to the mean energy portion of said charged particle beam for at least one of the entrance and exit windows.
- 15. A spectrometer for performing energy analysis on charged particles for quantitative spectroscopy, comprising:
- an inner conducting hemisphere and an outer conductor adapted to provide a required electric field potential therebetween for performing said energy analysis of said charged particles; and
- resistive disk means disposed between said inner conducting hemisphere and said outer conductor for providing predetermined electric field boundary conditions to achieve said required electric field potential, said resistive disk means including particle entrance and exit windows and further comprising an insulator substrate defining a plane and disposed on said plane of said substrate a preselected thick film configuration having a two-dimensional pattern and having an upper planar surface substantially parallel to the plane of said insulator substrate and selected substantially uniform electrical resistivity characteristics enabling generation of said predetermined electric field boundary conditions responsive to an electrical current applied to said thick film configuration.
CONTRACTURAL ORIGIN OF THE INVENTION
The U.S. Government has rights in this invention pursuant to Contract No. W-31-109-ENG-38 between the U.S. Department of Energy and Argonne National Laboratory.
US Referenced Citations (3)