Claims
- 1. A positive-acting photoimageable composition comprising a photoactive component and a polymer component,
the polymer component comprising a polymer that comprises Si groups and phenyl groups and at least three distinct repeat units of: 1) units that contain photoacid-labile groups; 2) units that are free of photoacid-labile and aqueous developing groups; and 3) units that contribute to the aqueous, alkaline developability of the composition.
- 2. The photoimageable composition of claim 1 wherein the photoacid-labile groups comprise ester or acetal moieties.
- 3. The photoimageable composition of claim 1 or 2 wherein the photoacid-labile groups are linked to phenolic hydroxy groups of the polymer.
- 4. The photoimageable composition of any one of claims 1 through 3 wherein the units 2) are phenyl groups that are not substituted by photo acid-labile groups or hydroxy, carboxy, or sulfonic acid moieties.
- 5. The photoimageable composition of claim 4 wherein the units 2) are unsubstituted phenyl groups or phenyl substituted with halogen, alkyl or alkoxy.
- 6. The photoimageable composition of any one of claims 1 through 5 wherein units 3) comprise hydroxy, carboxy or sulfonic acid moieties.
- 7. The photimageable composition of any one of claims 1 through 5 wherein units 3) comprise phenyl groups substituted with hydroxy or carboxy moieties.
- 8. A coated substrate comprising:
a) a polymer composition coating layer applied over a substrate surface; b) a coating layer of a photoimageable composition of any one of claims 1 through 7 disposed over the polymer composition coating layer.
- 9. A coated substrate of claim 8 wherein the polymer composition comprises a phenolic resin.
- 10. A coated substrate of claim 9 wherein the phenolic resin is a novolak resin or a poly(vinylphenol) resin.
- 11. A coated substrate of any one of claims 8 through 10 wherein the polymer composition comprises a thermal acid generator compound or reaction product thereof.
- 12. A coated substrate of any one of claims 8 through 11 wherein the polymer composition comprises a crosslinker component.
- 13. A coated substrate of any one of claims 8 through 12 wherein the polymer composition is crosslinked.
- 14. A coated substrate of any one of claims 8 through 13 wherein the polymer composition does not contain a polymer with Si groups.
- 15. A coated substrate of any one of claims 8 through 14 wherein the polymer composition is not photoimageable.
- 16. A method for forming a electronic device, comprising:
(a) applying on a substrate a coating layer of a polymer composition; (b) over the polymer composition coating layer, applying a photoimageable composition of any one of claims 1 through 8; (c) exposing the photoimageable composition coating layer to activating radiation and developing the exposed photoimageable layer.
- 17. The method of claim 16 wherein a coating layer of the photoimageable composition coating layer is exposed with radiation having a wavelength of about 248 nm.
- 18. The method of claim 16 or 17 wherein the polymer composition comprises a phenolic resin.
- 19. The method of claim 18 wherein the phenolic resin is a novolak resin or a poly(vinylphenol) resin.
- 20. The method of any one of claims 16 through 19 wherein the polymer composition comprises a thermal acid generator compound.
- 21. The method of any one of claims 16 through 20 wherein the polymer composition comprises a crosslinker component.
- 22. The method of any one of claims 16 through 21 wherein the polymer composition coating layer is crosslinked prior to applying the photoimageable composition thereover.
- 23. The method of any one of claims 16 through 22 wherein developing provides a positive tone image of the photoimageable composition.
- 24. The method of any one of claims 16 through 23 wherein substrate areas bared by development are etched or plated.
- 25. A photoimageable composition comprising a binder polymer and a photoactive component, wherein the binder polymer comprises as polymerized units one or more monomers of formula I and one or more monomers of formula II
- 26. The composition of claim 25 wherein R1 is selected from methyl, ethyl, trifluoromethyl, 2,2,2-trifluoroethyl, pentafluoroethyl, phenyl, benzyl, phenethyl, tolyl, trifluoromethylphenyl, trifluoromethoxyphenyl, norbomyl, cyclohexyl, 1,2,2-trifluorovinyl, phenylsulfonatobenzyl, phenylsulfonatophenylethyl, methylsulfonatobenzyl, ethylsulfonatobenzyl, propylsulfonatobenzyl, trifluoromethylsulfonatobenzyl, methylsulfonatophenylethyl, tolylsulfonatobenzyl, tolylsulfonatophenylethyl, camphorsulfonatobenzyl, camphorsulfonatophenylethyl, phenylsulfonatophenyl, methylsulfonatophenyl, tolylsulfonatophenyl, camphorsulfonatophenyl, ethylsulfonatophenyl, propylsulfonatophenyl, trifluoromethylsulfonatophenyl, ethylsulfonatophenylethyl, propylsulfonatophenylethyl, or trifluoromethylsulfonatophenylethyl.
- 27. The composition of claim 25 wherein m=1.
- 28. The composition of claim 25 wherein the photoactive component comprises a photoacid generator.
- 29. The composition of claim 25 wherein the composition is negative-acting.
- 30. The composition of claim 25 further comprising one or more cross-linking agents.
- 31. The composition of claim 30 wherein at least one cross-linking agent is selected from amine containing compounds, epoxy containing materials, compounds containing at least two vinyl ether groups or allyl substituted aromatic compounds.
- 32. The composition of claim 31 wherein the amine containing compounds comprise melamine monomers, melamine polymers, alkylolmethyl melamine resins, benzoguanamine resins, benzoguanamine-formaldehyde resins, urea-formaldehyde resins, glycoluril-formaldehyde resins, or combinations thereof.
- 33. The composition of claim 25 wherein the binder polymer further comprises as polymerized units one or more monomers of formula III
- 34. The composition of claim 33 wherein R3 is selected from ethyl, propyl or cyclohexyl.
- 35. The composition of claim 34 wherein R2 is selected from a) a group selected from —C(O)OC(CH3)3; —CH(CH3)O(C1-C6)alkyl; —CH2C(O)OC(CH3)3; —C5H8O or lactones; b) an optionally substituted noncyclic alkyl moiety having 6 or more carbon atoms, with at least 2 carbon atoms selected from secondary, tertiary and quaternary carbon atoms, and wherein the ether oxygen is directly bonded to a quaternary carbon atom; c) optionally substituted fenchyl; d) optionally substituted phenyl; e) optionally substituted 3,2,0 bridged system; f) optionally substituted bridged heteroalicyclic group; g) optionally substituted cycloalkyl group having 3 or 4 ring carbon atoms; or h) optionally substituted 2,2,1-bridged systems.
- 36. The composition of claim 33 wherein m=1.
- 37. The composition of claim 33 wherein p=1.
- 38. The composition of claim 33 wherein the composition is positive-acting.
- 39. A method of forming a relief image comprising the steps of depositing a photoimageable composition on a substrate and imaging the photoimageable composition through a mask to provide a relief image, wherein the photoimageable composition comprises a binder polymer and a photoactive component, wherein the binder polymer comprises as polymerized units one or more monomers of formula I and one or more monomers of formula II
- 40. The method of claim 39 wherein R1 is selected from methyl, ethyl, trifluoromethyl, 2,2,2-trifluoroethyl, pentafluoroethyl, phenyl, benzyl, phenethyl, tolyl, trifluoromethylphenyl, trifluoromethoxyphenyl, norbomyl, cyclohexyl, 1,2,2-trifluorovinyl, phenylsulfonatobenzyl, phenylsulfonatophenylethyl, methylsulfonatobenzyl, ethylsulfonatobenzyl, propylsulfonatobenzyl, trifluoromethylsulfonatobenzyl, methylsulfonatophenylethyl, tolylsulfonatobenzyl, tolylsulfonatophenylethyl, camphorsulfonatobenzyl, camphorsulfonatophenylethyl, phenylsulfonatophenyl, methylsulfonatophenyl, tolylsulfonatophenyl, camphorsulfonatophenyl, ethylsulfonatophenyl, propylsulfonatophenyl, trifluoromethylsulfonatophenyl, ethylsulfonatophenylethyl, propylsulfonatophenylethyl, or trifluoromethylsulfonatophenylethyl.
- 41. The method of claim 39 wherein m=1.
- 42. The method of claim 39 wherein the photoactive component is a photoacid generator.
- 43. The method of claim 39 wherein the composition is negative-acting.
- 44. The method of claim 39 wherein the photoimageable composition further comprises one or more cross-linking agents.
- 45. The method of claim 39 wherein at least one cross-linking agent is selected from amine containing compounds, epoxy containing materials, compounds containing at least two vinyl ether groups or allyl substituted aromatic compounds.
- 46. The method of claim 39 wherein the binder polymer further comprises as polymerized units one or more monomers of formula III
- 47. The method of claim 46 wherein R3 is selected from ethyl, propyl or cyclohexyl.
- 48. The method of claim 46 wherein R2 is selected from a) a group selected from —C(O)OC(CH3)3; —CH(CH3)O(C1—C6)alkyl; —CH2C(O)OC(CH3)3; —C5H8O or lactones; b) an optionally substituted noncyclic alkyl moiety having 6 or more carbon atoms, with at least 2 carbon atoms selected from secondary, tertiary and quaternary carbon atoms, and wherein the ether oxygen is directly bonded to a quaternary carbon atom; c) optionally substituted fenchyl; d) optionally substituted phenyl; e) optionally substituted 3,2,0 bridged system; f) optionally substituted bridged heteroalicyclic group; g) optionally substituted cycloalkyl group having 3 or 4 ring carbon atoms; or h) optionally substituted 2,2,1-bridged systems.
- 49. The method of claim 46 wherein p=1.
- 50. The method of claim 39 wherein the composition is positive-acting.
- 51. The method of any one of claims 30 through 50 wherein the photoimageable composition is imaged with radiation having a wavelength of about 248 nm.
- 52. The method of any one of claims 39 through 51 wherein the photimageable composition is deposited over a polymer composition on the substrate surface.
- 53. The method of claim 52 wherein the underlying polymer composition comprises a phenolic resin.
- 54. The method of claim 53 wherein the phenolic resin is a novolak resin or a poly(vinylphenol) resin.
- 55. The method of any one of claims 52 through 54 wherein the underlying polymer composition comprises a thermal acid generator compound.
- 56. The method of any one of claims 52 through 55 wherein the underlying polymer composition comprises a crosslinker component.
- 57. The method of any one of claims 52 through 56 wherein the polymer composition coating layer is crosslinked prior to applying the photoimageable composition thereover.
- 58. The method of any one of claims 39 through 57 wherein substrate areas bared by development are etched or plated.
- 59. A method of manufacturing an electronic device comprising the steps of disposing on an electronic device substrate a photoimageable composition comprising a binder polymer and a photoactive component, wherein the binder polymer comprises as polymerized units one or more monomers of formula I and one or more monomers of formula II
- 60. The method of claim 59 wherein R1 is selected from methyl, ethyl, trifluoromethyl, 2,2,2-trifluoroethyl, pentafluoroethyl, phenyl, benzyl, phenethyl, tolyl, trifluoromethylphenyl, trifluoromethoxyphenyl, norbomyl, cyclohexyl, 1,2,2-trifluorovinyl, phenylsulfonatobenzyl, phenylsulfonatophenylethyl, methylsulfonatobenzyl, ethylsulfonatobenzyl, propylsulfonatobenzyl, trifluoromethylsulfonatobenzyl, methylsulfonatophenylethyl, tolylsulfonatobenzyl, tolylsulfonatophenylethyl, camphorsulfonatobenzyl, camphorsulfonatophenylethyl, phenylsulfonatophenyl, methylsulfonatophenyl, tolylsulfonatophenyl, camphorsulfonatophenyl, ethylsulfonatophenyl, propylsulfonatophenyl, trifluoromethylsulfonatophenyl, ethylsulfonatophenylethyl, propylsulfonatophenylethyl, or trifluoromethylsulfonatophenylethyl.
- 61. The method of claim 59 wherein m=1.
- 62. The method of claim 59 wherein the binder polymer further comprises as polymerized units one or more monomers of formula III
- 63. The method of claim 62 wherein R3 is selected from ethyl, propyl or cyclohexyl.
- 64. The method of claim 62 wherein R2 is selected from a) a group selected from —C(O)OC(CH3)3; —CH(CH3)O(C1-C6)alkyl; —CH2C(O)OC(CH3)3; —C5H8O or lactones; b) an optionally substituted noncyclic alkyl moiety having 6 or more carbon atoms, with at least 2 carbon atoms selected from secondary, tertiary and quaternary carbon atoms, and wherein the ether oxygen is directly bonded to a quaternary carbon atom; c) optionally substituted fenchyl; d) optionally substituted phenyl; e) optionally substituted 3,2,0 bridged system; f) optionally substituted bridged heteroalicyclic group; g) optionally substituted cycloalkyl group having 3 or 4 ring carbon atoms; or h) optionally substituted 2,2,1-bridged systems.
- 65. The method of any one of claims 59 through 64 wherein the photoimageable composition is deposited over a polymer composition on the substrate surface.
- 66. The method of claim 65 wherein the underlying polymer composition comprises a phenolic resin.
- 67. The method of claim 66 wherein the phenolic resin is a novolak resin or a poly(vinylphenol) resin.
- 68. The method of any one of claims 65 through 67 wherein the underlying polymer composition comprises a thermal acid generator compound.
- 69. The method of any one of claims 65 through 68 wherein the underlying polymer composition comprises a crosslinker component.
- 70. The method of any one of claims 65 through 69 wherein the polymer composition coating layer is crosslinked prior to applying the photoimageable composition thereover.
- 71. A photoimageable composition comprising a binder polymer and a photoactive component, wherein the binder polymer comprises as polymerized units one or more monomers of formula I, one or more monomers of formula II and one or more monomers of formula III
- 72. A method of forming a relief image comprising the steps of depositing a photoimageable composition on a substrate and imaging the photoimageable composition through a mask to provide a relief image, wherein the photoimageable composition comprises a binder polymer and a photoactive component, wherein the binder polymer comprises as polymerized units one or more monomers of formula I, one or more monomers of formula II and one or more monomers of formula III
- 73. A method of manufacturing an electronic device comprising the steps of disposing on an electronic device substrate a photoimageable composition comprising a binder polymer and a photoactive component, wherein the binder polymer comprises as polymerized units one or more monomers of formula I, one or more monomers of formula II and one or more monomers of formula III
- 74. An optical waveguide having a core and a cladding, wherein at least one of the core and cladding comprising as polymerized units one or more monomers of formula I and one or more monomers of formula II
- 75. The optical waveguide of claim 74 wherein the at least one of core and cladding further comprises as polymerized units one or more monomers of formula III
- 76. A polymer comprising as polymerized units one or more monomers of formula I and one or more monomers of formula II
- 77. The polymer of claim 76 farther comprising as polymerized units one or more monomers of formula III
Parent Case Info
[0001] The present application claims the benefit of U.S. provisional application No. 60/289,368, filed on May 8, 2001, which is incorporated by reference herein in its entirety.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60289368 |
May 2001 |
US |