Claims
- 1. A photosensitive composition containing an alkali-soluble resin, a compound having an acid-decomposable group, and a photo-acid generating agent,
- wherein said compound having an acid-decomposable group is a naphthol novolak compound with a molecular weight of not more than 2000, and said naphthol novolak compound is formed by condensation of a naphthol compound with glyoxylic acid.
- 2. A photosensitive composition containing an alkali-soluble resin, a compound having an acid-decomposable group, and a photo-acid generating agent,
- wherein said compound having an acid-decomposable group is a naphthol novolak compound represented by Formula (2) below: ##STR9## wherein R.sup.1 and R.sup.2 may be the same or different and represent a hydrogen atom, a substituted or nonsubstituted alkyl group, or a cyclic substituent; R.sup.3 represents a tert-butylated acetate group or a hydrogen atom; R.sup.4 represents a hydrogen atom, an alkyl group, a carboxyl group or an ester thereof, and m represents an integer indicating the degree of polymerization.
- 3. A photosensitive composition containing an alkali-soluble resin, a compound having an acid-decomposable group, and a photo-acid generating agent,
- wherein said compound having an acid-decomposable group is a naphthol novolak compound with a molecular weight of not more than 2000, and said alkali-soluble resin contains at least one monomer selected from the group consisting of an acrylic acid, a methacrylic acid, and a hydroxylvinylnaphthole.
- 4. A photosensitive composition containing an alkali-soluble resin, a compound having an acid-decomposable group, and a photo-acid generating agent,
- wherein said compound having an acid-decomposable group is a naphthol novolak compound represented by Formula (2) below: ##STR10## wherein at least one of R.sup.1, R.sup.2, R.sup.3 and R.sup.4 is a monovalent organic group having a carboxyl group containing an acid-decomposable substituent; R.sup.3 represents an acid-decomposable group or a hydrogen atom; the others represent an alkyl group, a halogen atom, or a hydrogen atom, and m represents an integer indicating the degree of polymerization.
Priority Claims (2)
Number |
Date |
Country |
Kind |
7-223812 |
Aug 1995 |
JPX |
|
8-221230 |
Aug 1996 |
JPX |
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Parent Case Info
This application is a Division of application Ser. No. 08/705,260, filed on Aug. 29, 1996, U.S. Pat. No. 5,837,419.
US Referenced Citations (13)
Divisions (1)
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Number |
Date |
Country |
Parent |
705260 |
Aug 1996 |
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