Patent Grant
10458548
This application is a 371 application of the international PCT application serial no. PCT/JP2015/072683, filed on Aug. 10, 2015. The entirety of the abovementioned patent application is hereby incorporated by reference herein and made a part of this specification.
The present invention relates to a piston ring coated with an amorphous carbon film, and a method for manufacturing the same.
A piston ring sliding inside an engine slides on an inner circumferential surface of a sleeve (cylinder) in accordance with reciprocating motion of a piston which is mounted in a ring groove formed on an outer circumferential surface of the piston. Accordingly, low-friction properties and abrasion resistance are particularly required among sliding characteristics. Therefore, in the related art, an amorphous carbon film (which will hereinafter also be referred to simply as a “carbon film”) is formed on a surface of the piston ring such that sliding characteristics are ensured.
In this case, in order to sufficiently exhibit low-friction properties or abrasion resistance described above, there is a need to increase the thickness of a carbon film to a certain degree. However, since amorphous carbon films have strong internal stress, it has not been easy to form one layer of a carbon film to be thick.
Therefore, for example, Patent Document 1 proposes that internal stress is relaxed by layering two kinds of carbon layers that differ in hardness (hard layer and soft layer) in two or more layers and forming a carbon film, and the carbon film is formed to be a thick film having a film thickness of 5.0 μm or greater.
In this case, the performance (low-friction properties and abrasion resistance) of the film in its entirety is improved by appropriately regulating mechanical properties of each of the hard layer and the soft layer and thickening the carbon film. However, due to the different mechanical properties between the hard layer and the soft layer, there is concern that discontinuity of mechanical properties will be caused in an interface of layers and separation will occur between the layers.
In regard to the separation between layers, Patent Document 2 proposes a technology in which interlayer adhesion is improved and occurrence of separation is suppressed. In Patent Document 2, two kinds of layers having compositions different from each other are repetitively formed, and an inclined layer in which the composition continuously changes is formed between the layers, so that adhesion between two kinds of layers is ensured.
Patent Literature 1
Japanese Patent Application Laid-Open (JP-A) No. 2012-202522
Patent Document 2
Japanese Patent Application Laid-Open (JP-A) No. 2008-286354
However, in order to provide an inclined layer as described above, a film forming apparatus having a special function, for example, forming two kinds of layers having compositions different from each other at the same time, is required. Moreover, in order to achieve continuity of mechanical properties in the inclined layer, precise control is required in film forming.
Therefore, there has been a demand for a technology capable of manufacturing and providing a piston ring having excellent low-friction properties and abrasion resistance using an ordinary film forming apparatus having no special function, without requiring precise control.
In order to solve the problem described above, the inventor has investigated a method of continuously changing mechanical properties in an interface between layered amorphous carbon films using a film forming apparatus such as an ordinary CVD apparatus having no special function without requiring precise control. As a result, first, it has been conceived that if film forming conditions inside the film forming apparatus can continuously change, an amorphous carbon film in which mechanical properties continuously change can be obtained using an ordinary film forming apparatus.
As an index for specifically realizing that described above, the inventor has focused on an sp2/sp3 ratio in the amorphous carbon film. That is, the inventor has focused on the following fact. The sp2/sp3 ratio indicates a ratio of sp2 bonding (graphite structure) and sp3 bonding (diamond structure) which are bonding modes of carbon in an amorphous carbon film. A soft film is formed when the sp2/sp3 ratio is low. On the other hand, a hard film is formed when the sp2/sp3 ratio is high.
The inventor has conceived that when the sp2/sp3 ratio continuously changes in layering such a soft film and a hard film, mechanical properties continuously change on a border between the soft film and the hard film so that interlayer adhesion can be sufficiently ensured. The inventor has investigated a specific film forming method for forming such a carbon film without requiring precise control.
As a result, it has been found that increasing regions in which the sp2/sp3 ratio continuously increases and decreasing regions in which the sp2/sp3 ratio continuously decreases can be alternately present from a substrate surface toward a film surface such that the sp2/sp3 ratio continuously changes even on borders between the increasing regions and the decreasing regions, by a very simple technique of controlling the substrate temperature using an ordinary film forming apparatus when a carbon film is formed through a CVD method.
That is, the decreasing region is a region in which the sp2/sp3 ratio decreases from a high sp2/sp3 ratio to low sp2/sp3 ratio, from the substrate surface toward the film surface. On the other hand, the increasing region is a region in which the sp2/sp3 ratio increases from a low sp2/sp3 ratio to a high sp2/sp3 ratio, from the substrate surface toward the film surface. Therefore, when an increasing region is present in succession to a decreasing region, a part between a middle portion of the decreasing region and a middle portion of the increasing region becomes a part having a low sp2/sp3 ratio, and a soft film is formed. On the other hand, when a decreasing region is present continuously to an increasing region, a part between a middle portion of the increasing region and a middle portion of the decreasing region becomes a part having a high sp2/sp3 ratio, and a hard film is formed.
Since an interface between the soft film and the hard film formed as described above is an intermediate portion between the decreasing regions or the increasing regions and the sp2/sp3 ratio continuously changes, mechanical properties continuously change. In addition, since the sp2/sp3 ratio continuously changes even on the borders between the increasing regions and the decreasing regions, mechanical properties continuously change even inside the soft film and the hard film.
As a result, since the sp2/sp3 ratio continuously changes inside each of the films and in the interface thereof in a carbon film in which such a soft film and a hard film are layered, it is possible to prevent occurrence of separation inside the layer and between layers even if an inclined layer is not provided using a film forming apparatus having a special function. In addition, as described above, since internal stress can be relaxed in a carbon film in which the soft film and the hard film are layered, it is possible to thicken the carbon film.
A piston ring in which such a carbon film is formed can exhibit excellent low-friction properties or abrasion resistance with respect to a sleeve (cylinder).
In this case, in order to improve adhesion between a formed carbon film and a substrate, it is desirable that hardness of the carbon film to be formed first approach hardness of the substrate and film properties gradually change to a highly hard film having sufficient abrasion resistance. In order to realize this, a region immediately above the substrate needs to be an increasing region. On the other hand, depending on the purpose, the surface of the carbon film can be an increasing region or a decreasing region. Therefore, in layering the carbon film, the decreasing regions are configured to be equal in number to or one region fewer than the increasing regions.
The carbon film formed on the outermost surface may end with an increasing region or may end with a decreasing region. In consideration of the initial sliding state with respect to a sliding counterpart (cylinder), it is possible to choose hardness of the outermost surface of the amorphous carbon film or a hardness change at the time of initial abrasion.
According to the invention of item 1, the above-described knowledge is perceived from a surface of a piston ring which is a result. That is, there is provided a piston ring in which a surface of a ring-shaped substrate is coated with an amorphous carbon film. The amorphous carbon film is formed using a CVD method. Increasing regions in which an sp2/sp3 ratio that is a ratio of sp2 bonding to spa bonding continuously increases and decreasing regions in which the sp2/sp3 ratio continuously decreases are alternately formed from the substrate surface toward a film surface, and the sp2/sp3 ratio continuously changes on borders between the increasing regions and the decreasing regions so that soft films having a low sp2/sp3 ratio and hard films having a high sp2/sp3 ratio are formed in an alternately layered manner. The decreasing regions are configured to be equal in number to or one region fewer than the increasing regions.
According to the invention of item 2, in the piston ring according to item 1, hydrogen content in the amorphous carbon film is equal to or more than 5 atom % in a location having the lowest sp2/sp3 ratio.
In the present invention, as a technique of controlling film properties (hardness) of an amorphous carbon film, it is preferable to employ a technique in which the sp2/sp3 ratio changes in accordance with an increase and a decrease of the hydrogen content caused due to a film forming temperature. This is because, in the case of an amorphous carbon film, there is an interrelationship between the hydrogen content and film properties and the sp2/sp3 ratio becomes lower as the hydrogen content increases so that a soft film can be achieved. In the present invention, in order to obtain a soft film of which internal stress can be sufficiently relaxed, it is preferable that the hydrogen content in the carbon film be equal to or more than 5 atom % in a location having the lowest sp2/sp3 ratio.
According to the invention of item 3, in the piston ring according to item 1 or 2, the amorphous carbon film is formed on an outer circumferential sliding surface and upper and lower surfaces of the substrate.
In consideration of usage circumstances in which the piston ring is used by being mounted in a ring groove formed on the outer circumferential surface of a piston, such an amorphous carbon film does not have to be formed on an inner circumferential surface of the piston ring (substrate). However, it is preferable that the amorphous carbon film be formed on at least the outer circumferential sliding surface and the upper and lower surfaces of the substrate. When the amorphous carbon film is formed on the outer circumferential sliding surface of the substrate, sliding properties with respect to the sleeve can be improved. On the other hand, when the amorphous carbon film is formed on the upper and lower surfaces, low aggressiveness with respect to the piston ring groove can be improved.
In the invention according to items 1 to 3, the sp2/sp3 ratio is employed as an index when the carbon film is formed. However, in place thereof, an ID/IG ratio may be employed as an index which is obtained by measuring Raman scattering light (Raman spectrum) using a Raman spectrometer.
That is, when Raman scattering light is measured with respect to a carbon film using the Raman spectrometer, a D-peak appears near 1,350 cm−1 and a G-peak appears near 1,570 cm−1. Here, the D-peak is a peak based on a six-membered ring structure of carbon, and the G-peak is a peak based on double bonding of carbon. It is known that the ID/IG ratio obtained from each of the peak areas ID and IG has a positive interrelationship with the sp2/sp3 ratio in an amorphous carbon film containing hydrogen, and it is possible to control film properties of the carbon film using the ID/IG ratio in place of the sp2/sp3 ratio.
Since the ID/IG ratio can be easily obtained by means of Raman scattering light compared to measuring the sp2/sp3 ratio, when film forming is controlled by controlling the substrate temperature based on the ID/IG ratio, soft films and hard films are layered such that mechanical properties continuously change in the interface, and thus the carbon film can be easily formed as a thick film.
Specifically, when a G-peak position in the Raman spectrum shifts to a high wavenumber, the ID/IG ratio increases and a hard film is formed, and when the G-peak position shifts to a low wavenumber, the ID/IG ratio decreases and a soft film is formed. Therefore, when a carbon film is formed employing an ordinary film forming apparatus through the CVD method, the substrate temperature is controlled, and the ID/IG ratio is caused to continuously change. Then, high-wavenumber shift regions in which the G-peak position shifts to a high wavenumber and low-wavenumber shift regions in which the G-peak position shifts to a low wavenumber are alternately present such that the ID/IG ratio continuously changes on the borders. Accordingly, soft films and hard films are alternately layered, and a thick carbon film in which mechanical properties continuously change is formed in the interface. Thus, it is possible to provide a piston ring which exhibits excellent low-friction properties or abrasion resistance with respect to a sleeve (cylinder).
The invention according to items 4 to 6 is derived from that described above. In the invention according to item 4, there is provided a piston ring in which a surface of a ring-shaped substrate is coated with an amorphous carbon film. The amorphous carbon film is formed using a CVD method. An ID/IG ratio that is a ratio of a peak area in a D-peak position to a peak area in a G-peak position of a Raman spectrum continuously changes such that high-wavenumber shift regions in which the G-peak position shifts to a high wavenumber and low-wavenumber shift regions in which the G-peak position shifts to a low wavenumber are alternately formed from the substrate surface toward a film surface, and the ID/IG ratio continuously changes on borders between the high-wavenumber shift regions and the low-wavenumber shift regions so that soft films having a low ID/IG ratio and hard films having a high ID/IG ratio are formed in an alternately layered manner. The low-wavenumber shift regions are configured to be equal in number to or one region fewer than the high-wavenumber shift regions.
According to the invention of item 5, in the piston ring according to item 4, hydrogen content in the amorphous carbon film is equal to or more than 5 atom % in a location having the lowest ID/IG ratio.
In addition, according to the invention of item 6, in the piston ring according to item 4 or 5, the amorphous carbon film is formed on an outer circumferential sliding surface and upper and lower surfaces of the substrate.
Next, according to the invention of item 7, there is provided a method for manufacturing a piston ring, in which the piston ring according to any one of items 1 to 6 is manufactured using a CVD method. The method for manufacturing a piston ring includes forming an amorphous carbon film on a substrate by alternately providing a first step of forming a film under a condition in which a temperature of the substrate rises and a second step of forming a film under a condition in which the temperature of the substrate falls.
As described above, in the present invention, a carbon film can be formed such that soft films and hard films are alternately layered, and mechanical properties can continuously change in the interface between the soft film and the hard film, by employing a very simple technique of controlling the substrate temperature using an ordinary film forming apparatus.
Specifically, when film forming is performed under the condition in which the temperature of the substrate rises, the sp2/sp3 ratio (ID/IG ratio) can continuously increase. On the other hand, when film forming is performed under the condition in which the temperature of the substrate falls, the sp2/sp3 ratio (ID/IG ratio) can continuously decrease.
Therefore, when the first step of forming a film under the condition in which the temperature of the substrate rises and the second step of forming a film under the condition in which the temperature of the substrate falls are alternately provided, and when the substrate temperature is controlled, the sp2/sp3 ratio (ID/IG ratio) cyclically changes in a manner of significant→small→significant→small→and so forth, so that the soft films and the hard films are alternately layered. Moreover, the sp2/sp3 ratio (ID/IG ratio) can continuously change in the interface. Therefore, it is possible to form a carbon film in which mechanical properties continuously change and the soft films and the hard films adhere and are layered alternately.
According to the invention of item 8, in the method for manufacturing a piston ring according to item 7, the CVD method is performed using a plasma CVD apparatus.
The plasma CVD apparatus is a film forming apparatus which allows plasma to infiltrate into a region between the substrates and has favorable disposition properties even if a plurality of substrates are densely disposed. Therefore, a carbon film is easily formed at the same time on both the outer circumferential sliding surface and the upper and lower surfaces, and productivity can be improved.
According to the invention of item 9, in the method for manufacturing a piston ring according to item 8, the plasma CVD apparatus is a Penning Ionization Gauge (PIG) plasma CVD apparatus.
Since the PIG plasma CVD apparatus is not a self-discharge type, the state of plasma is unlikely to be affected by the surface state of the substrate (workpiece) or the temperature. Therefore, the temperature of the workpiece is easily affected, so that the substrate temperature can be easily controlled.
According to the invention of item 10, in the method for manufacturing a piston ring according to any one of items 7 to 9, the amorphous carbon film having distribution of different sp2/sp3 ratios is formed with respect to each substrate at the same time by causing each of a plurality of substrates to have a difference in thermal exhaust ability in the CVD method.
When a film is formed by the CVD method, if the temperature distribution is generated within a film forming area in the CVD apparatus, various carbon films can be formed in accordance with the temperature distribution. Therefore, when each of the plurality of substrates is caused to have a difference in thermal exhaust ability, it is possible to form an amorphous carbon film having distribution of different sp2/sp3 ratios suitable for film properties with respect to each substrate at the same time.
According to the invention of item 11, in the method for manufacturing a piston ring according to any one of items 7 to 9, the amorphous carbon film having distribution of different sp2/sp3 ratios inside the substrate is formed at the same time by causing the substrate to internally have a difference in thermal exhaust ability in the CVD method.
When the substrate internally has a difference in thermal exhaust ability, it is possible to form an amorphous carbon film having distribution of different sp2/sp3 ratios suitable for film properties inside the substrate at the same time.
According to the present invention, it is possible to manufacture and provide a piston ring having excellent low-friction properties and abrasion resistance using an ordinary film forming apparatus having no special function, without requiring precise control.
Hereinafter, the present invention will be specifically described based on an embodiment.
1. Configuration of Piston Ring
A piston ring according to the present embodiment includes a substrate having a ring shape, and an amorphous carbon film provided on at least an outer circumferential sliding surface and upper and lower surfaces of the substrate. The piston ring is mounted in a ring groove formed on an outer circumferential surface of a piston and slides on an inner circumferential surface of a cylinder in accordance with reciprocating motion of the piston.
(1) Substrate
A piston ring main body which has been used in the related art can be employed as the substrate, and its material is not particularly limited. Examples of the material include a stainless steel material, a casting material, a cast steel material, and a steel material. In addition, its surface may be subjected to nitriding or may be coated with chromium plating or CrN coating.
(2) Amorphous Carbon Film
In the present embodiment, in the amorphous carbon film, while having an sp2/sp3 ratio that is a ratio of sp2 bonding to sp3 bonding as an index, increasing regions in which the sp2/sp3 ratio continuously increases and decreasing regions in which the sp2/sp3 ratio continuously decreases are alternately formed from the substrate surface toward a film surface. Moreover, the sp2/sp3 ratio also continuously changes on borders between the increasing regions and the decreasing regions. The decreasing regions are configured to be equal in number to or one region fewer than the increasing regions. When the decreasing regions are one region fewer, both the surface of the substrate and the surface of the amorphous carbon film become the increasing regions.
Accordingly, as described above, a soft film is formed in a part having a low sp2/sp3 ratio. On the other hand, a hard film is formed in a part having a high sp2/sp3 ratio. Then, the soft films and the hard films are alternately layered. In this case, since the sp2/sp3 ratio continuously changes from the substrate surface to the film surface, mechanical properties continuously change not only inside the hard films and inside the soft films but also in interfaces of the hard films and the soft films. As a result, it is possible to sufficiently ensure adhesion in the interfaces between the hard films and the soft films and to prevent occurrence of separation in the interfaces. In addition, since soft films and hard films are alternately formed, it is possible to relax internal stress and to easily thicken an amorphous carbon film.
In this case, as described above, the hydrogen content in an amorphous carbon film is preferably equal to or more than 5 atom % in a location having the lowest sp2/sp3 ratio and more preferably ranges from 5 to 60 atom %.
In forming such a carbon film, as described above, in place of the sp2/sp3 ratio, an ID/IG ratio obtained by measuring Raman scattering light (Raman spectrum) using a Raman spectrometer can be employed as an index. An increase of the ID/IG ratio and a shift of a G-peak position to a high wavenumber are behaviors of a case in which a decrease of hydrogen and an increase of the sp2/sp3 ratio occur at the same time, and a decrease of the ID/IG ratio and a shift of the G-peak position to a low wavenumber are behaviors of a case in which an increase of hydrogen and a decrease of the sp2/sp3 ratio occur at the same time, thereby leading to further limited conditions. However, there are few practical problems.
2. Method for Manufacturing Piston Ring
Next, a method for manufacturing a piston ring according to the present embodiment will be described.
(1) Cathodic PIG Plasma CVD Apparatus
To begin with, a cathodic PIG plasma CVD apparatus used in the present embodiment will be described.
A cooling device (not illustrated) for supplying cooling water is provided in the substrate holding tool 17, and a heater (not illustrated) is provided in the film forming chamber 11.
The heater and the cooling device heat and cool the substrate holding tool 17, respectively. Accordingly, the substrate W is indirectly heated and cooled. Here, the heater is configured to be temperature-controllable. On the other hand, the cooling device is configured to have an adjustable speed of supplying the cooling water. Specifically, the cooling device is configured to supply the cooling water to the substrate holding tool 17 when cooling is performed and to stop supplying the cooling water when cooling stops.
(2) Manufacturing Piston Ring
Next, a specific procedure of manufacturing a piston ring (substrate) by forming a carbon film, in which the sp2/sp3 ratio (ID/IG ratio) continuously changes, on a surface of the piston ring using the cathodic PIG plasma CVD apparatus will be described.
(a) Preparation Before Forming Carbon Film
First, the substrate W subjected to degrease cleansing is set in the substrate holding tool 17 of the cathodic PIG plasma CVD apparatus 1 and is installed inside the film forming chamber 11. The substrate W and the substrate holding tool 17 are electrically connected to the electrode 15, and the pulsed power supply 14 applies a pulse voltage thereto.
Next, the insides of the plasma chamber 12 and the film forming chamber 11 are evacuated through the exhaust port 13 using an exhaust pump (not illustrated). Thereafter, argon (Ar) is introduced into the plasma chamber 12 and the film forming chamber 11 as discharge gas, and the pressure is adjusted. The substrate W is held by the substrate holding tool 17 and revolves inside the film forming chamber 11 while rotating on its axis on the electrode 15 until a series of processing steps of forming a film ends.
Thereafter, Ar plasma is generated by discharging a direct current between a hot filament and an anode (not illustrated) inside the plasma chamber 12. The generated Ar plasma is transported to the inside of the film forming chamber 11. The surface of the substrate W, to which a bias voltage (pulse voltage) is applied by the pulsed power supply 14, is irradiated with Ar ions. Then, cleaning processing is performed by etching.
Next, discharging inside the plasma chamber 12 stops, and sputtering is performed with Ti from the Ti sputtering source 16 under predetermined sputtering conditions. Then, a Ti layer having a thickness ranging from 0.1 to 2.0 μm is formed on the surface of the substrate W.
Next, a Si-containing diamond-like carbon (DLC) layer having a thickness ranging from 0.1 to 3.0 μm is further formed on the formed Ti layer.
Specifically, the process is performed, for example, by supplying hydrocarbon such as acetylene (C2H2) and methane (CH4); and hydrogen (H2) together with a compound containing Si such as tetramethylsilane (TMS), as source gas in a cathodic PIG plasma CVD method using the cathodic PIG plasma CVD apparatus.
In this manner, a carbon film sufficiently adheres to the substrate surface due to the Ti layer and the Si-containing DLC layer provided as intermediate layers between the substrate surface and the carbon film.
(b) Forming Carbon Film
Next, a carbon film in which the sp2/sp3 ratio (ID/IG ratio) continuously changes is formed on the Ti layer and the Si-containing DLC layer.
Specifically, the process is performed by alternately providing a first step of forming a film under the condition in which the temperature of the substrate rises and a second step of forming a film in a step in which the temperature of the substrate W falls and the substrate W is cooled. That is, the sp2/sp3 ratio (ID/IG ratio) continuously increases (increasing regions are formed) in the first step, and the sp2/sp3 ratio (ID/IG ratio) continuously decreases (decreasing regions are formed) in the second step. The steps are alternately repeated until the carbon film is formed to have a predetermined thickness.
In this case, the temperature of the substrate W is caused to rise using a heater for heating, and the increasing regions of the sp2/sp3 ratio (ID/IG ratio) can be formed with high continuity by continuously increasing the substrate temperature.
In place of using the heater for heating, it is possible to utilize a natural rise of the substrate temperature at the time of film forming using a tool having low thermal exhaust ability.
On the other hand, the substrate temperature is caused to fall using a dedicated a cooling device, and the decreasing regions of the sp2/sp3 ratio (ID/IG ratio) can be formed with high continuity by continuously decreasing the substrate temperature.
In place of using the dedicated cooling device, it is possible to cause the substrate temperature to fall by adjusting the exhaust heat rate in accordance with the tool shape.
In addition, film forming may be temporarily halted and the substrate temperature may be caused to fall through natural cooling in a cooling step. In this case, since film forming is temporarily halted and the substrate temperature is caused to fall through natural cooling in the cooling step when the sp2/sp3 ratio decreases, film forming is performed at substrate temperature that is discontinuously falling between steps before the cooling step and during the cooling step. However, since carbon is likely to achieve the sp2 bonding (graphite structure), even if the substrate temperature falls discontinuously, the sp2/sp3 ratio does not significantly decrease. The sp2/sp3 ratio gradually decreases, and discontinuity of the sp2/sp3 ratio is suppressed.
In this manner, when the method for manufacturing a piston ring according to the present embodiment is applied, even if an ordinary film forming apparatus having no special function is used, a continuous change of the sp2/sp3 ratio (ID/IG ratio) can be controlled by a very simple control method, that is, controlling the substrate temperature. Therefore, it is possible to easily form a thick carbon film having high continuity of mechanical properties between hard films and soft films and to provide a piston ring having excellent low-friction properties and abrasion resistance.
3. sp2/sp3 Ratio (ID/IG ratio) of Amorphous Carbon Film
As described above, it is possible to know the film forming circumstances for an amorphous carbon film formed as above, through the sp2/sp3 ratio or the ID/IG ratio. Therefore, a method for checking for the sp2/sp3 ratio and the ID/IG ratio in a formed amorphous carbon film will be described below.
(1) Method for Measuring sp2/sp3 Ratio
The sp2/sp3 ratio can be obtained by calculating the strength of sp2 and the strength of sp3 using electron energy-loss spectroscopy (EELS) analysis.
Specifically, a spectrum imaging method in a scanning-type TEM (STEM) mode is applied. Under the conditions of 200 kv for the acceleration voltage, 10−9 Å for the sample absorption current, and ϕ1 nm for the beam spot size, EELS obtained at a pitch of 1 nm is integrated, and a C—K absorption spectrum is extracted as average information from a region of approximately 10 nm, thereby calculating the sp2/sp3 ratio.
(2) Method for Measuring ID/IG Ratio by Raman Spectroscopy
Due to the time and effort required in the EELS analysis, it is not considered to be easy to calculate the sp2/sp3 ratio. Therefore, in place of thereof, the ID/IG ratio may be measured by the Raman spectroscopy as described above.
Specifically, as described above, when Raman scattering light is measured with respect to a carbon film using a Raman spectrometer, a D-peak appears near 1,350 cm−1 and a G-peak appears near 1,570 cm−1. The D-peak is a peak based on a six-membered ring structure of carbon, and the G-peak is a peak based on double bonding of carbon. The ID/IG ratio is calculated from each of the areas ID and IG of peaks. Since the obtained ID/IG ratio has a positive interrelationship with the sp2/sp3 ratio, it is possible to indirectly know the sp2/sp3 ratio by obtaining the ID/IG ratio.
Hereinafter, based on examples, the present invention will be more specifically described. In the description below, the ID/IG ratio is employed as an index.
First, a Ti layer and a Si-containing DLC layer were formed on a substrate as an intermediate layer (adhesion layer) using a cathodic PIG plasma CVD apparatus, and a carbon film layer in which the ID/IG ratio continuously changes was formed on a surface layer thereof.
Film forming in the carbon film layer was performed under the conditions of 0.4 Pa for gas pressure, −500 V for substrate bias voltage, and 5 A for discharge current, and by causing 20 ccm of Ar gas and 80 ccm of CH4 gas to flow. After film forming was performed for 97 minutes, discharging stopped and natural cooling was performed for 90 minutes. After the film forming and cooling were repeated twice, film forming was performed for 97 minutes for the third time, and film forming of the carbon film layer was completed (total thickness of 6.2 μm). In this Example, heating was performed utilizing a natural rise of the substrate temperature at the time of film forming using a tool having low thermal exhaust ability, and cool was performed utilizing natural cooling by dropping discharging.
In regard to the formed carbon film layer,
In addition,
From
Similarly, from
From
In this manner, the hard films and the soft films are alternately formed due to the following reason. When the substrate temperature keeps on rising, graphitization proceeds (the amount of hydrogen decreases) and a hard film is formed. On the other hand, when the substrate temperature falls, graphitization is suppressed (the amount of hydrogen increases) and the surface layer returns to a soft film which is the original film properties. If the soft film is formed once, the soft film does not change in quality to the hard film unless the temperature becomes higher. Therefore, there is no change in quality at the maximum substrate temperature of 230° C. when forming a hard film in this Example, thereby realizing a structure in which the hard films and the soft films are alternately formed in order through film forming performed by repeating rising and falling of the substrate temperature. However, since such an orderly structure cannot be formed when the maximum temperature at the time of forming a hard film reaches the temperature at which a soft film changes in quality, there is a need to be cautious.
First, a Ti layer and a Si-containing DLC layer were formed on a substrate as an intermediate layer (adhesion layer) using a cathodic PIG plasma CVD apparatus having a size larger than the apparatus used in Example 1, and a carbon film layer in which the ID/IG ratio continuously changes was formed on a surface layer thereof.
Film forming in the carbon film layer was performed under the conditions of 0.4 Pa for gas pressure, −500 V for substrate bias voltage, and 10 A for discharge current, and by causing 40 ccm of Ar gas, and 150 ccm of C2H2 gas to flow. After film forming was performed for 77 minutes, discharging stopped and natural cooling was performed for 30 minutes. After the film forming and cooling were repeated twice, film forming was performed for 28 minutes for the third time, and film forming of the carbon film layer was completed (total thickness of 9.6 μm). In this Example as well, heating was performed utilizing a natural rise of the substrate temperature at the tune of film forming using a tool having low thermal exhaust ability, and cool was performed utilizing natural cooling by dropping discharging.
In regard to the formed carbon film layer,
In addition,
From
That is, from
Similarly, from
From
In this manner, similar to the case of Example 1, the hard films and the soft films are alternately formed due to the following reason. When the substrate temperature keeps on rising, graphitization proceeds (the amount of hydrogen decreases) and a hard film is formed. On the other hand, when the substrate temperature falls, graphitization is suppressed (the amount of hydrogen increases) and the surface layer returns to a soft film which is the original film properties. If the soft film is formed once, the soft film does not change in quality to the hard film unless the temperature becomes higher. Therefore, there is no change in quality at the maximum substrate temperature of 210° C. when forming a hard film in this Example, thereby realizing a structure in which the hard films and the soft films are alternately formed in order through film forming performed by repeating rising and falling of the substrate temperature. However, since such an orderly structure cannot be formed when the maximum temperature at the time of forming a hard film reaches the temperature at which a soft film changes in quality, there is a need to be cautious.
Hereinabove, the present invention has been described based on the embodiment. However, the present invention is not limited to the embodiment. It is possible to add various changes with respect to the embodiment within the same range as the present invention and a range equivalent thereto.
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2015/072683 | 8/10/2015 | WO | 00 |
| Publishing Document | Publishing Date | Country | Kind |
|---|---|---|---|
| WO2017/026043 | 2/16/2017 | WO | A |
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| 6312766 | Pai | Nov 2001 | B1 |
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| Number | Date | Country | |
|---|---|---|---|
| 20180238450 A1 | Aug 2018 | US |
