Number | Date | Country | Kind |
---|---|---|---|
2-331317 | Nov 1990 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4508161 | Holden | Apr 1985 | |
4565601 | Kakehi et al. | Jan 1986 | |
4609037 | Wheeler et al. | Sep 1986 | |
4771730 | Tezuka | Sep 1988 | |
4931135 | Horiuchi et al. | Jun 1990 | |
5078851 | Nishihata et al. | Jan 1992 |
Number | Date | Country |
---|---|---|
0339580 | Nov 1989 | EPX |
63-141317 | Jun 1988 | JPX |
63-227021 | Sep 1988 | JPX |
63-229716 | Sep 1988 | JPX |
Entry |
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Database WPIL, Derwent Publications Ltd., AN 89-359386, & JP-A-1 268 030, & U.S. Pat. No. 5,085,750, "Plasma Etching System for Semiconductor Device Mfr.-Has Gas Plasma Generator Sample Platform for Dividing Sample in Coolant Using Gas Laser". |