BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a circuit block diagram of amplifier circuits constituting an RF power module according to one embodiment of the invention;
FIG. 2 is a circuit diagram showing an example of a circuit structure of a low pass filter;
FIG. 3 is an explanatory diagram of an example of a digital cellular phone system using the RF power module of the embodiment of the invention;
FIG. 4 is a circuit diagram showing an example of a circuit structure of a switch circuit;
FIG. 5 is a circuit diagram of a HEMT element used in the switch circuit of FIG. 4,
FIG. 6 is an equivalent circuit diagram of the HEMT element of FIG. 5 when it is turned on;
FIG. 7 is an equivalent circuit diagram of the HEMT element of FIG. 5 when it is turned off;
FIG. 8 is a circuit diagram showing an example of another circuit structure of the switch circuit;
FIG. 9 is a top view showing a structure of the RF power module according to the embodiment;
FIG. 10 is a sectional view of the RF power module according to the embodiment;
FIG. 11 is a sectional view of a main part of a semiconductor chip when a semiconductor amplification element is formed of a LDMOSFET;
FIG. 12 is a sectional view of a main part of the semiconductor chip when the switch circuit is formed using a HEMT element;
FIG. 13 is a plan view of a main part of the semiconductor chip of FIG. 12;
FIG. 14 is a sectional view showing a main part of a manufacturing step of an integrated passive component used in the RF power module of the embodiment;
FIG. 15 is a sectional view showing a main part of a manufacturing step of the integrated passive component, following the step of FIG. 14;
FIG. 16 is a sectional view showing a main part of a manufacturing step of the integrated passive component, following the step of FIG. 15;
FIG. 17 is a sectional view showing a main part of a manufacturing step of the integrated passive component, following the step of FIG. 16;
FIG. 18 is a sectional view showing a main part of a manufacturing step of the integrated passive component, following the step of FIG. 17;
FIG. 19 is a sectional view showing a main part of a manufacturing step of the integrated passive component, following the step of FIG. 18;
FIG. 20 is a sectional view of a manufacturing step of the RF power module of the embodiment;
FIG. 21 is a sectional view showing a manufacturing step of the RF power module, following the step of FIG. 20.
FIG. 22 is a sectional view showing a manufacturing step of the RF power module, following the step of FIG. 21.
FIG. 23 is a sectional view showing a manufacturing step of the RF power module, following the step of FIG. 22.
FIG. 24 is a schematic sectional view of a wiring board in a comparative example, which incorporates therein a low pass filter;
FIG. 25 is a top perspective drawing of a RF power module 1 according to one preferred embodiment of the invention;
FIG. 26 is a main plan view showing the vicinity of a semiconductor chip in the RF power module of the embodiment;
FIG. 27 is a main plan view showing the vicinity of a semiconductor chip in an RF power module of a comparative example;
FIG. 28 is a main plan view of the RF power module of the embodiment;
FIG. 29 is a plan view of the integrated passive component;
FIG. 30 is a main top view of the wiring board before mounting the integrated passive component;
FIG. 31 is a main top view of the wiring board before mounting the integrated passive component;
FIG. 32 is a sectional view of a main part of the wiring board before mounting the integrated passive component;
FIG. 33 is a sectional view showing a main part of a state in which the integrated passive component is mounted over the upper surface of the wiring board; and
FIG. 34 is a main plan view showing a main part of a case where the position of the integrated passive component deviates from a predetermined position.