Number | Date | Country | Kind |
---|---|---|---|
3-566 | Jan 1991 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3765969 | Kragness et al. | Oct 1973 | |
3920492 | Sugita et al. | Nov 1975 | |
4079507 | King | Mar 1978 | |
4438448 | Harrington et al. | Mar 1984 | |
5065200 | Bhat et al. | Nov 1991 | |
5151764 | Suzuki | Sep 1992 |
Entry |
---|
MacFadyen, "On The Preferential Etching Of GaAs By H.sub.2 SO.sub.4 -H.sub.2 O.sub.2 -H.sub.2 O", Journal of the Electrochemical Society, vol. 130, No. 9, Sep. 1983, pp. 1934-1941. |
Adachi et al, "Chemical Etching Characteristics of (001) GaAs", Journal of the Electrochemical Society, vol. 130, No. 12, Dec. 1983, pp. 2427-2435. |
Huo et al, "Modified Photoresist Etch Mask Process For InP Channeled Substrate Lasers", Journal of the Electrochemical Society, vol. 136, No. 3, Mar. 1989, pp. 772-775. |