Claims
- 1. An epitaxial semiconductor device in the form of a semiconductor light wave detector, said device comprising a first layer (53) of a highly doped n-type semiconducting substrate, a second layer (54) of a highly doped n-type semiconducting material, a third layer (55) of a distinct intrinsic semiconducting material and a fourth layer (56) of a highly doped n-type semiconducting material similar to said second layer (54), with first and second electrical connections being provided to said fourth layer and to at least one of said first and second layers; wherein a plurality of pairs of Dirac-delta doped monoatomic layers (57, 57', 58, 58') are provided in said third intrinsic layer (55), with the first Dirac-delta doped monatomic layer (57; 58) of each pair (57, 57'; 58, 58') comrising a monoatomic layer of donors, and with the second Dirac-delta doped monoatomic layer (57, 58') of each pair (57, 57'; 58, 58') comprising a monoatomic layer of acceptors positioned parallel to and spaced apart from the associated first Dirac-delta doped layer (57; 58) on the side thereof facing said fourth layer (56).
- 2. A semiconductor device in accordance with claim 1 wherein the doping concentration in the Dirac-delta doped monoatomic layer lies in the range from 10.sup.11 to 10.sup.14 cm.sup.-2.
Priority Claims (1)
Number |
Date |
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84113987.6 |
Nov 1984 |
EPX |
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Parent Case Info
This is a division of Ser. No. 07/722,589 filed Jun. 27, 1991, now U.S. Pat. No. 5,216,260, which is a continuation of Ser. No. 07/636,017, filed Jan. 4, 1991, now U.S. Pat. No. 5,060,234, which was a division of Ser. No. 07/413,911, filed Sept. 28, 1989, now abandoned, which in turn was a division of U.S. patent application Ser. No. 06/798,053, filed Nov. 14, 1985, now U.S. Pat. No. 4,882,609.
US Referenced Citations (12)
Foreign Referenced Citations (1)
Number |
Date |
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0113074 |
Jul 1984 |
EPX |
Divisions (3)
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Number |
Date |
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Parent |
722589 |
Jun 1991 |
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Parent |
413911 |
Sep 1989 |
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Parent |
798053 |
Nov 1985 |
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Continuations (1)
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636017 |
Jan 1991 |
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