The strong growth in demand for portable consumer electronics is driving the need for high-capacity storage devices. Non-volatile semiconductor memory devices, such as flash memory storage cards, are becoming widely used to meet the ever-growing demands on digital information storage and exchange. Their portability, versatility and rugged design, along with their high reliability and large capacity, have made such memory devices ideal for use in a wide variety of electronic devices, including for example digital cameras, digital music players, video game consoles, PDAs and cellular telephones.
While many varied packaging configurations are known, a recent design relates to a semiconductor flash cube having a vertically stacked array of semiconductor die. The die bond pads of these die are extended out to a vertical edge of the cube, and a pattern of electrical traces are then formed on the vertical edge by thin film deposition and photolithography coupling the edge-connected die bond pads to each other and a pattern of solder balls on a top or bottom surface of the cube. The solder balls may then be soldered to a host device such as a printed circuit board for memory storage by the host device.
Typical semiconductor cubes include a substrate electrically connected to the memory die stack as by wire bonding for transferring signals between the memory die stack and a host device. Flash cubes such as described above provide an advantage in that a conventional substrate may be omitted, thereby providing improving storage capacity for a given size package.
However, it is important in flash cubes that the semiconductor die in the die stack be precisely aligned. In particular, in forming the electrical lead pattern on the vertical edge, if the die together do not form a highly aligned planar surface, the lead pattern may not be properly formed on the edge and may not function properly. Given that there are manufacturing tolerances in the sizes of semiconductor die, and given that semiconductor die are stacked with a DAF layer which can allow slight shifting of the die relative to each other before curing, it is difficult to provide the vertical edge with the needed level of planarity.
The present technology will now be described with reference to the figures, which in embodiments relate to a semiconductor cube including one or more highly planar vertical sidewalls on which to form a pattern of electrical traces. The semiconductor cube may be fabricated from a semiconductor cube assembly including a vertical semiconductor die stack and a pair of wire bond landing blocks. The vertical semiconductor die stack may be wire bonded off of first and second opposed edges to different levels of the first and second wire bond landing blocks. Once all wire bonds are formed, the semiconductor cube assembly may be encapsulated in mold compound.
Thereafter, the semiconductor cube assembly may be cut vertically to sever both landing block assemblies, leaving just the encapsulated semiconductor die stack. The severed landing block assemblies may be discarded. The vertical cuts at the opposed sides of the semiconductor die stack form highly planar sidewalls in the molding compound. The vertical cuts also sever the wire bonds off of both edges of the semiconductor die in the die stack, with ends of the severed wire bonds being exposed at the cut planar sidewalls of the molding compound. Thereafter, a pattern of electrical traces may be formed on the highly planar sidewalls in contact with the exposed wire bonds. The electrical traces connect the die stack to a controller die, which in turn may be coupled to a host device, such as for example by solder balls or solder bumps.
It is understood that the present technology may be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the technology to those skilled in the art. Indeed, the technology is intended to cover alternatives, modifications and equivalents of these embodiments, which are included within the scope and spirit of the technology as defined by the appended claims. Furthermore, in the following detailed description of the present technology, numerous specific details are set forth in order to provide a thorough understanding of the present technology. However, it will be clear to those of ordinary skill in the art that the present technology may be practiced without such specific details.
The terms “top” and “bottom,” “upper” and “lower” and “vertical” and “horizontal” as may be used herein are by way of example and illustrative purposes only, and are not meant to limit the description of the technology inasmuch as the referenced item can be exchanged in position and orientation. Also, as used herein, the terms “substantially,” “approximately” and/or “about” mean that the specified dimension or parameter may be varied within an acceptable manufacturing tolerance for a given application. In one embodiment, the acceptable manufacturing tolerance is ±0.25% of a defined dimension.
An embodiment of the present technology will now be explained with reference to the flowchart of
The semiconductor die 102 may for example be processed to include integrated circuits to form die 102 into memory die such a NAND flash memory die, but other types of die 102 may be used. These other types of semiconductor die include but are not limited to RAM such as an SDRAM. In the embodiments shown in the figures, semiconductor die 102 include a row of die bond pads 110 at opposed edges of the semiconductor die 102. However, as explained, the semiconductor die 102 may include die bond pads 110 off of a single edge in further embodiments.
The wire bond landing blocks 104 on either side of the semiconductor die 102 may for example be formed of multiple layers 105 of aluminum (a first layer 105 of a pair of landing blocks 104 being shown in
The pads 110 may preferably be formed of a metal such as copper or aluminum well-suited for receiving a wire bond in a conventional wire bond process is explained below. Each pad 112 may align in the y-direction with a corresponding die bond pad 110. While a single row of pads 112 are shown facing the semiconductor die 102, each layer of each landing block 104 may include pads 110 on opposed edges in further embodiments. In such embodiments, the pads 110 closest to die 102 may receive wire bonds, and the second group of pads 110 farthest from die 102 may remain unused.
In embodiments, the layers 105 of landing blocks 104 may have the same thickness as die 102, though the landing block layers 105 may be thinner or thicker than die 102 in further embodiments. The layers 105 of landing block 104 may be separated from the semiconductor die 102 on the carrier 106 along the y-direction by space 114 on either side of the die 102. The spaces 114 may be 1 mm to 10 mm wide, though they may be wider or narrower than that in further embodiments.
In step 202, wire bonds 120 may be formed between the die bond pads 110 on die 102 and the pads 112 on the layers 105. Wire bonds 120 may be made for example of gold, and formed according to a number of schemes. However, in one embodiment, a wire bond capillary (not shown) forms a ball bump 122 on a first die bond pad 110 of die 102. From there, the wire bond capillary pays out wire and forms a stitch bond on a corresponding pad 112 of a layer 105. The wire bond capillary may then break the wire, move along the x-direction to the next die bond pad 110, and repeat the process until all wire bonds 120 are formed between the die bond pads 110 and the corresponding pads 112. The process may then be repeated for the opposed row of die bond pads 110 on die 102. As noted, wire bonds 120 may be formed by other methods in further embodiments.
It is understood that the number of die bond pads 110 and corresponding pads 112 is shown for illustrative purposes only, and there may be many more die bond pads 110, pads 112 and wire bonds 120 in further embodiments. In the embodiments shown in the figures, semiconductor die 102 include a pair of rows of die bond pads 110 at opposed edges of the die 102. However, in embodiments, die 102 may include a single row of die bond pads 110. In such embodiments, there may be a single wire bond landing block 104 that receives wire bonds from the single row of the die bond pads 110.
As indicated in the flowchart of
While the die 102 in stack 124 may be stacked on top of each other in the z-direction with reasonable tolerances, there is no requirement that the vertical edges of the respective die 102 precisely align with each other in vertical planes. This is in contrast to conventional semiconductor flash cubes, where one or more vertical edges needs to be aligned in a plane as discussed in the Background section.
In step 204, a blank 130 may be affixed to the uppermost layer of FOD 126 as shown in
In step 208, a controller die 136 may be affixed to an upper surface of blank 130, for example via a DAF (die attach film) layer on a bottom surface of the controller die 136. The controller die 136 may for example be an ASIC, but may be other types of controllers in further embodiments. As explained below, the controller die 136 may be electrically connected to the semiconductor die 102 in stack 124. As is also shown in
An upper surface of controller die 136 may include contact pads for receiving a grid of solder bumps 140 shown for example in the front view of
In step 214, the semiconductor cube assembly 100 may be encapsulated in a mold compound 144 as shown for example in the front view of
Once the semiconductor cube assembly 100 is encapsulated in step 214, the carrier 106 may be removed in step 216. The release layer 108 may be heated or chemically treated to allow easy removal of the carrier 106.
In step 218, the semiconductor cube assembly 100 may be cut, or singulated, with cuts made in the x-z plane through the block of molding compound 144 as indicated by the dashed lines 146 in
The cuts along dashed lines 146 may also be made through the pads 132 and blank 130, leaving a portion of the pads 132 and blank 130 exposed in the sidewalls 150 of the semiconductor cube 160 as seen in
The cuts along lines 146 also sever each of the wire bonds between the die 102 in stack 124 and the layers 105 of the respective wire bond landing blocks 104. As seen in
The cuts along lines 146 may be performed by various cutting methods, including by saw blade, and produce highly planer sidewalls 150. The planarity and smoothness of sidewalls 150 may be increased in a polishing step 220, or multiple polishing steps 220 using successively smaller grains of grit in the polishing solution.
In steps 224-240, a pattern of electrical traces 162 may be formed on one or both sidewalls 150 as seen in
The pattern of electrical traces 162 may be formed by a variety of different steps. However, in one embodiment, in a step 224, a conductive seed layer may be applied to a sidewall 150. As the molding compound of sidewall 150 is in itself a dielectric insulator, there is no need to lay down and insulation layer beneath the conductive seed layer. The seed layer may be a thin film produced in a PVD (physical vapor deposition) process, and may for example be formed of titanium, nickel, copper or stainless steel sputtered onto the sidewall 150. The seed layer may be formed of other electrical conductors and may be applied by other thin film deposition techniques in further embodiments. The seed layer may be 2-5 μm, but may be thicker or thinner than that in further embodiments. Annealing heating may optionally be performed to purge a metal grain condition in the seed layer.
Next, the seed layer may be processed to remove portions of the layer and leave behind the desired pattern of electrical traces 162. In one example, a layer of photoresist may be spray coated over the seed layer (step 226). A pattern may be formed in the photoresist layer by the lithography (either a positive or negative image of the eventual electrical trace pattern), and the lithography pattern may be developed to expose the seed layer in the desired pattern through the photoresist (step 230). The exposed seed layer may be electroplated (step 232), and then the residual photoresist may be removed (step 234). A polyimide protective insulating layer may be coated and cured over the pattern of traces 162 (steps 238, 240). The pattern of electrical traces 162 may be formed by other photolithographic and non-photolithographic processes in further embodiments. One additional process is screen printing of the conductive traces in the shape of the electrical traces 162.
The pattern of electrical traces 162 connect the wire bonds 120 to the pads 132. As described above, pad 132 is in turn wire bonded internally to the die bond pads of the controller die 136. Thus, the system of electrical traces 162 and wire bonds 120 may effectively transfer signals between the controller die 136 and the semiconductor die 102 within the semiconductor cube 160. The semiconductor cube 160 may in turn be connected to a host device such as a printed circuit board having a pattern of contacts matching the pattern of solder bumps 140. The pattern of solder bumps 140 shown in
As noted, the wire bond landing blocks 104, and pattern of electrical traces 162, may be formed on one side or on two opposed sides of the semiconductor cube 160.
The semiconductor cube assembly 100 according to this embodiment may be cut along two adjacent (orthogonal) edges as shown in
It is understood that die bond pads 110 may be provided around one edge, two adjacent or opposed edges, three edges or all four edges of semiconductor die 102. Wire bond landing blocks 104 as described above may be provided adjacent each edge including die bond pads 110. Similarly, a finished semiconductor cube 160 may include severed wire bonds exposed at one sidewall, two adjacent or opposed sidewalls, three sidewalls or all four sidewalls, depending on the die bond pad configuration on the die 102 in the die stack 124.
In the flowchart of
The controller die 136 may include a pattern of contact pads on an upper surface, which contact pads are exposed through the mold compound 144. The mold compound 144 may initially cover these contact pads and the mold compound may then be etched to expose these contact pads, or the contact pads may remain uncovered by mold compound during the encapsulation process.
In step 260, a polyimide layer 170 may be affixed to an upper surface of the semiconductor cube assembly 100 as shown in
As shown in
In step 264, solder balls 176 (
After formation of the solder balls, the remainder of the fabrication steps of semiconductor cube 160 may be performed according to any of the embodiments described above. The carrier may be released in step 216, and the semiconductor cube assembly 100 maybe singulated in step 218. The resulting exposed planar sidewalls (150 and/or 154) may be polished (step 220), and a pattern of electrical traces 162 may be formed on the planar sidewalls in steps 224-240 as described above. A finished semiconductor cube 160 according to this embodiment is shown in
The cuts in the encapsulated semiconductor cube assembly 100 along lines 146 (
Additionally, the controller die 136 is located at a top of the cube 160, near to a connection point of the cube 160 with a host device. This minimizes the interconnection distance between the controller die 136 and the host device, which in turn can reduce loss and crosstalk, and improve the signal transfer speed.
In summary, the present technology relates to a semiconductor cube, comprising: one or more semiconductor die, the one or more semiconductor die including die bond pads; wire bonds having first ends affixed to the die bond pads; a protective enclosure enclosing the one or more semiconductor die, the wire bonds having second ends, opposite the first ends, terminating at a sidewall of the protective enclosure; and a pattern of electrical traces on the sidewall, electrically coupled to the second ends of the wire bonds terminating at the sidewall.
In another example, the present technology relates to a semiconductor cube, comprising: a plurality of stacked semiconductor die comprising a first set of die bond pads; wire bonds having first ends affixed to the first set of die bond pads; a controller die comprising a second set of die bond pads; electrical interconnects coupled to the second set of die bond pads; a protective enclosure enclosing the one or more semiconductor die, the wire bonds having a second end, opposite the first end, terminating at a sidewall of the protective enclosure, and the electrical interconnects having a portion terminating at the sidewall; and a pattern of electrical traces on the sidewall in physical contact with the second ends of the wire bonds terminating at the sidewall and in physical contact with the portion of the electrical interconnects terminating at the sidewall.
In a further example, the present technology relates to a method of fabricating a semiconductor cube comprising a plurality of stacked semiconductor die and wire bonds having a first end coupled to the plurality of semiconductor die and a second end, opposite the first end, terminating at a sidewall of the semiconductor cube, the method comprising: (a) forming wire bonds between a semiconductor die of the stacked semiconductor die and a wire bond landing block; (b) encapsulating the stacked semiconductor die, wire bonds and at least a portion of the wire bond landing block in a protective enclosure to form a semiconductor cube assembly; (c) cutting the semiconductor cube assembly to separate the stacked semiconductor die from the wire bond landing block and severing the wire bonds in a sidewall of the semiconductor cube; and (d) forming electrical traces on the sidewall interconnecting the severed wire bonds.
In a further example, the present technology relates to a semiconductor cube, comprising: one or more semiconductor die, the one or more semiconductor die including die bond pads; wire bond means having first ends affixed to the die bond pads; a protective enclosure means enclosing the one or more semiconductor die, the wire bond means having second ends, opposite the first ends, terminating at a sidewall of the protective enclosure means; and electrical trace means on the sidewall, electrically coupled to the second ends of the wire bond means terminating at the sidewall.
The foregoing detailed description of the technology has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the technology to the precise form disclosed. Many modifications and variations are possible in light of the above teaching. The described embodiments were chosen in order to best explain the principles of the technology and its practical application to thereby enable others skilled in the art to best utilize the technology in various embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the technology be defined by the claims appended hereto.
Number | Date | Country | Kind |
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201711389696.1 | Dec 2017 | CN | national |