The exemplary embodiments generally relate to substrate processing tools, more particularly, to substrate transport apparatus.
In semiconductor processing dual SCARA (selective compliant articulated robot arm) arm robot may be used to transfer wafers to and from a semiconductor process module. The dual SCARA arm robot generally allows for a fast swapping of substrates from and to the process module where a fast swap may be referred to as the removal of one substrate from the process module and the placement another different substrate to the same process module in rapid succession without rotating the dual SCARA arm robot as a unit about the shoulder axis of the dual SCARA arm robot and substantially without retracting the arm to a battery position or a fully retracted position.
Generally each arm of the dual SCARA arm robot includes an upper arm rotatable about a shoulder axis, a forearm rotatably coupled to the upper am about an elbow axis and an end effector or substrate holder coupled to the forearm about a wrist axis. Generally each forearm is independently driven by a respective drive axis (e.g. degree of freedom) of a drive system while rotation of both the SCARA arms as a unit occurs with yet another independent drive axis (e.g. degree of freedom) of the drive section. Generally, referring to
The substrate transport robots generally operate within a transport chamber where the transport chamber internal height accommodates the height of, for example, the dual SCARA arm of the transport robot, the Z-travel range of the arm in addition to the required operational clearance between the arms and the walls of the transport chamber.
It would be advantageous to have a reduced heiqht transport arm pulley system so as; to decrease the internal height of the transport chamber thereby decreasing the internal volume of the transport chamber. Decreasing the internal volume of the transfer chamber may increase throughput of a semiconductor processing system as the time it takes to pump down the chamber to vacuum and/or evacuate the chamber to atmospheric pressure is decreased. In addition, decreasing the overall height of the transport chamber decreases the cost of the transport chamber.
Further, current temperature specifications for a substrate transport robot ranges from about room temperature to about 100° C. As the temperature rises, the difference in the coefficients of thermal expansion between at least the transport-robot arm links and the bands 801, 802, 811, 812 induces a difference in the distance between pulleys and the length of the bands 801, 802, 811, 812. This difference may result in increased or decreased tension in the bands 801, 802, 811, 812 and causes a shift in the natural frequency of the bands and may also change the stiffness of the robot arms. Generally band tension is maintained through the use of spring and pulley tensioning mechanisms.
It would be advantageous to have a passive band tensioner that operates using the mechanical properties of materials to provide a passively maintained (e.g. without spring forces) constant tension in the bands. It would also be advantageous to passively compensate for the thermal expansion of the arms so that a constant tension is maintained in the band segments of the transport apparatus transmission loops.
The foregoing aspects and other features of the disclosed embodiment are explained in the following description, taken in connection with the accompanying drawings, wherein:
In one aspect the transport apparatus 100 includes a carriage or frame 106, at least two SCARA arms and a drive section 108 mounted to the frame and coupled to the first and second SCARA arms 110, 120. Any suitable controller 199 is connected to the drive section 108 and includes any suitable program code for effecting operation of the transport apparatus 100 as described herein. In one aspect the at least two SCARA arms include a first SCARA arm 110 connected to the frame 106 and a second SCARA arm 120 connected to the frame 106. The first SCARA arm 110 includes an upper arm link 110U that is rotatably connected at a proximate end of the upper arm link 110U to the frame 106 about a shoulder axis of rotation SAX, a forearm link 110F that is rotatably connected at a proximate end of the forearm link 110F to a distal end of the upper arm link 110U about an elbow axis of rotation EX1, and an end effector 110E that is rotatably coupled to a distal end of the forearm link 110E about a wrist axis of rotation WX1. The second SCARA arm 120 includes an upper arm link 120U that is rotatably connected at a proximate end of the upper arm link 120U to the frame 106 about the shoulder axis of rotation SAX, a forearm link 120F that is rotatably connected at a proximate end of the forearm link 120F to a distal end of the upper arm link 120U about an elbow axis of rotation EX2, and an end effector 120E that is rotatably coupled to a distal end of the forearm link 120F about a wrist axis of rotation WX2. While only a single end effector 110E, 120E is illustrated as being coupled to each wrist axis of rotation WX1, WX2, in other aspects any suitable number of end effectors may be coupled to one or more of the wrist axes WK1, WX2 to effect batch transfers of substrates or fast swapping of substrates with a single SCARA arm 110, 120 of the transport apparatus 100. In this aspect, the shoulder axis of rotation SAX is common to both the first and second SCARA arms 110, 120 while in other aspects, the first and second SCARA arms 110, 120 may have respective shoulder axes of rotation that are arranged side by side.
Referring also to
The third shaft 250C is the inner shaft an a extends from the bottom stator 248C. The inner shaft 250C has the third rotor 260C aligned with the bottom stator 248C. The middle shaft 250A extends upward from the middle stator 248A. The middle shaft has the first rotor 260A aligned with the first stator 248A. The outer shaft. 250B extends upward from the top stator 248B. The outer shaft has the second rotor 260B aligned with the upper stator 248B. Various bearings are provided about the shafts 250A-250C and the frame 106 to allow each shaft to be independently rotatable relative to each other and the frame 106. In one aspect, each shaft 250A-250C may be provided with a position sensor 264. The position sensors 264 are used to signal the controller 199 of the rotational position of the shafts 250A-250C relative to each other and/or relative to the frame 106. Any suitable sensor could be used, such as optical or induction. The drive section 108 may also include one or more suitable Z-axis drives 190 for moving the upper arm links 110U, 120U, the forearm links 110F, 120F and end effectors 110E, 120E of the transport apparatus 100 in a direction substantially parallel with (e.g. along) the shoulder axis of rotation SAX as a unit. In another aspect one or more revolute joints (such as the wrist or elbow axes) of the transport apparatus 100 may include a Z-axis drive to, for example, move the end effector(s) of each arm in the Z-direction independently of each other.
In one aspect, the outer shaft 250B is coupled to upper arm link 110U so that the outer shaft 250B and the upper arm link 110U rotate as a unit about the shoulder axis of rotation SAX. The middle shaft 250A is coupled to the upper arm link 120U so that the middle shaft 250A and the upper arm link 120U rotate as a unit about the shoulder axis of rotation SAX. In other aspects, the outer shaft 250B may be coupled to upper arm link 120U and the middle shaft 250A may be coupled to upper arm link 110U. The inner shaft 120C is connected to each of the forearm links 110F, 120F so as to commonly drive each forearm link 110F, 120F.
In one aspect, as illustrated in
Referring now to
In one aspect, each of the upper arm links 110U, 120U includes an idler pulley 600, 601 located at a respective one of the elbow axes of rotation EX1, EX2. Each idler pulley 600, 601 is mounted to the respective upper arm link 110U, 120U about the respective elbow axis of rotation EX1, EX2 so as to rotate about the elbow axis of rotation EX1, EX2 independent of the upper arm links 11GU, 120U. For example, any suitable bearings 620A, 620B may be provided within the upper arm links 110U, 120U to which the idler pulleys 600, 601 are mounted for rotation about the elbow axes of rotation EX1, EX2. Each idler pulley 600, 601 is coupled to a respective forearm link 110F, 120F so that the idler pulley 600, 601 rotates as a unit with the respective forearm link 110F, 120F about the respective elbow axis of rotation EX1, EX2.
Each end effector 110E, 120E is slaved to the upper arm link 110U, 120U of the respective SCARA arm 110, 120 so as to maintain alignment of the end effector 110E, 120E along the axis of extension and retraction of each SCARA arm 110, 120. For example, in one aspect, elbow drive pulley 603 is mounted to the upper arm link 110U of SCARA arm 110 about the elbow axis of rotation EX1 in any suitable manner so that the elbow drive pulley 603 is rotatably fixed relative to the upper arm link 110U. Idler pulley 604 is mounted within the forearm link 110F in any suitable manner for rotation about the wrist axis WX1. The end effector 110E is mounted to the idler pulley 604 so as to rotate about the wrist axis WX1 as a unit with the idler pulley 604. The idler pulley 604 is coupled to the elbow drive pulley 603 in any suitable manner such as with a segmented transmission loop 660 having at least two separate bands (substantially similar to band segments 701, 702, 711, 712 described herein), where each of the bands wrap at least partially around the idler pulley 604 and the elbow drive pulley 603 in opposite directions so that as the forearm link 110F moves relative to the upper arm link 110U the relative rotation of the elbow drive pulley 603 with respect to the forearm link 110F at the elbow axis of rotation EX1 causes one of the bands to pull on the idler pulley 604 while the other band pushes on the idler pulley 604 effecting rotation of the idler pulley 604 and maintaining alignment of the end effector 110E along the axis of extension and retraction. Similarly, elbow drive pulley 602 is mounted to the upper arm link 120U of SCARA arm 120 about the elbow axis of rotation EX2 in any suitable manner so that the elbow drive pulley 602 is rotatably fixed relative to the upper arm link 120U. Idler pulley 605 is mounted within the forearm link 120F in any suitable manner for rotation about the wrist axis WX2. The end effector 120E is mounted to the idler pulley 605 so as to rotate about the wrist axis WX2 as a unit with the idler pulley 605. The idler pulley 605 is coupled to the elbow drive pulley 602 in any suitable manner such as with a segmented transmission loop 661 having at least two separate bands (substantially similar to band segments 701, 702, 711, 712 described herein), where each of the bands wrap at least partially around the idler pulley 605 and the elbow drive pulley 602 in opposite directions so that as the forearm link 12 OF moves relative to the upper arm link 120U the relative rotation of the elbow drive pulley 602 with respect to the forearm link 120F at the elbow axis of rotation EX2 causes one of the bands to pull on the idler pulley 605 while the other band pushes on the idler pulley 605 effecting rotation of the idler pulley 605 and maintaining alignment of the end effector 120E along the axis of extension and retraction.
Referring also to
Referring to
Referring to
In one aspect, each of the pulley segments 606A, 606B includes at least one mating feature that engages a corresponding mating feature of other pulley segment 606A, 606B where the mating features rotatably fix pulley segment 606A to pulley segment 606B so that the pulley segments 606A, 606B rotate as a unit about the shoulder axis of rotation SAX (i.e. the pulley segments are keyed to one another in a predetermined rotational orientation). For example, in one aspect, pulley segment 606A includes mating surface 730 that mates with mating surface 710 of pulley segment 606B. Pulley segment 606A may also include mating surface 731 that mates with mating surface 741 of pulley segment 606B. While mating surfaces 730, 731, 740, 741 are illustrated and described for rotatably fixing the pulley segments 606A, 606B so that the pulley segments rotate as a unit about the shoulder axis of rotation SAX, in other aspects the pulley segments 606A, 606B may be rotatably fixed in any suitable manner such as with one or more of pins, clips, shoulder bolts or any other suitable fasteners. As may be realized from
As can be seen in
Referring also to
Referring to
On the other end E2 of the arc A1, A2, A11, A12 the band anchor point 770, 771, 772, 773 is positioned so that the included angle of rotation α1, α2, α11, α12, between the end E1 of the band engagement arc A1, A2, A11, A12 and the tangent point T1, T2, T11, T12 is about 90 degrees or less (i.e. the band segment 701, 702, 711, 712 is tangent to the splitting drive pulley 606 and is in pure tension with no bending of the band segment 701, 702, 711, 712 around the splitting drive pulley 606, 906).
In one aspect, the splitting drive pulley 606, 906 and the idler pulleys 600, 601 may have about a 2:1 ratio so that about a ±90 degree rotation of the splitting drive pulley 606, 906 (e.g. corresponding to the band engagement arcs A1, A2, A11, A12) effected by the controller 190 causes about ±180 degrees of rotation of each idler pulley 600, 601. As noted above, in other aspects, the drive ratio between the splitting drive pulley 606, 906 and the idler pulleys 600, 601 may be greater than about 2:1. For example, the drive ratio between the splitting drive pulley 606, 906 and the idler pulleys 600, 601 may be about 2.5:1, about 3:1, about 4:1 or any other suitable drive ratio configured to effect full extension an a retraction of the SCARA arms 110, 120 and/or rotation of one SCARA arm 110, 120 about the shoulder axis SAX relative to the other SCARA arm 110, 120 (see e.g.
Referring to
Referring now to
The transport apparatus 100A includes an upper arm 110UA, forearm 110F, 120F rotatably coupled to the upper arm 110UA and end effectors 110EA, 110EB, 120EA, 120EB rotatably mounted to respective ones of the forearm 110F, 120F. It is noted that the end effectors 110EA, 110EB, 120EA, 120EB may have any suitable configuration for holding one or more than one substrate. For example, where each end effector 110EA, 110EB, 120EA, 120EB holds more than one substrate the substrates may be held in either a stacked or side by side configuration for transferring batches of substrates with a single arm. It is also noted that the upper arm 110UA and forearms 110F, 120F may have unequal lengths from joint center to joint center or in other aspects, the upper arm 110UA and forearms 110F, 120F may have equal lengths from joint center to joint center.
In one aspect, the upper arm 110UA may be a substantially rigid link having a substantially “U” or “V” shape that extends away from the shoulder axis of rotation SAX of the transport apparatus 100A. The upper arm 110UA may include a first portion 110UA1 and a second portion 110UA2 that are releasably rotationally coupled at, for example, the shoulder axis of rotation SAX (or any other suitable point on the upper arm link) in a manner substantially similar to that described in U.S. patent application Ser. No. 11/148,871 entitled “Dual SCARA Arm” and filed on Jun. 9, 2005 (the disclosure of which is incorporated herein by reference in its entirety) so that when the coupling between the first and second portions is released the elbow axes EX1, EX2 can be rotated towards or away from each other about the shoulder axis of rotation SAX to change or adjust the angle ε between the first and second portions 110UA1, 110UA2 and when the coupling is not released the first and second portions form the substantially rigid upper arm 110UA. It is noted that the angle ε may be dynamically adjustable when, for example, each portion 110UA1, 110UA2 of the upper arm 110UA is connected to its own drive shaft of the drive system for driving movement of the arm. For example, when the first and second portions 110UA1, 110UA2 are in a substantially rigid configuration respective drive axes of the drive system are moved in unison and where the angle ε is to be adjusted the respective drive axes of the first and second portions are moved in one of opposite directions, at difference rates in the same direction or in any other suitable manner for dynamically changing or adjusting the angle ε.
The forearm 110F may be rotatably coupled to the upper arm 110UA about elbow axis EX1 and forearm 120F may be rotatably coupled to the upper arm 110UA about elbow axis EX2. Each forearm 110F, 120F may have two independently rotatable end effectors 110EA, 110EB, 120EA, 120EB. For example, end effectors 110EA, 120EB may be independently rotatably mounted to forearm 110F about wrist axis EX1 and end effectors 120EA, 120EB may be independently rotatably mounted to forearm 120F about wrist axis EX2. In one aspect the end effectors may be disposed so that they have a common transfer plane while in other aspects the end effectors may be disposed on substantially proximate or different transfer planes. The dual end effectors on each forearm 110F, 120F allows for the fast swapping of substrates at a substrate holding location such as the process modules 11010, 11011 or load lock modules 11012, 11013. It should be understood that while two end effectors are shown coupled to each forearm 110F, 120F, that any suitable number of end effectors can be rotatably coupled to each forearm 110F, 120F each being configured to hold any suitable number of substrates in, for example, a stacked arrangement or a side by side arrangement in a manner similar to that described above.
In this aspect, drive shaft 250B of the drive section 108 is coupled to the upper arm 110UA so that the drive shaft 250B and the upper arm 110UA rotate as a unit about the shoulder axis of rotation SAX. Drive shaft 250C of the drive section 108 is coupled to forearm drive pulley 1100 so that the drive shaft 250C and the forearm drive pulley 1100 rotate as a unit about the shoulder axis of rotation SAX. Here the forearm drive pulley 1100 is coupled to forearm idler pulley 600 in any suitable manner, such as by a segmented transmission loop 700C which is substantially similar to segmented transmission loop 700 described above. The forearm idler pulley 600 is coupled to the forearm 110F so that the forearm 110F and the forearm idler pulley 600 rotate as a unit about the elbow axis of rotation EX1 so that rotation of drive shaft 250C causes rotation of the forearm 110F about the elbow axis of rotation EX1. While only forearm 110F is illustrated in
Here the splitting drive pulley 906A is also coupled to a reversing transmission that includes, for example, pulleys 690, 691 and segmented transmission loops 710R, 710A. In other aspects, the reversing transmission may be any suitable transmission for changing a direction of motive rotation of splitting drive pulley 906A so that end effectors 110EA, 110EB are rotated at the same time in opposite directions as described below. In one aspect, the splitting drive pulley 906A is coupled to pulley 690 by segmented transmission 710R that includes band segments 711R, 712R. The band segments 711R, 712R couple the splitting drive pulley 906A and the pulley 690 at different band interface levels (similar to band segments 711, 712 in
As can be seen in
The pulley 690 is coupled to pulley 691 about reversing axis 1110 so that pulleys 690, 691 rotate as a unit about the reversing axis 1110. While two separate pulleys 690, 691 are shown, in other aspects pulleys 690, 691 may form a single unitary member similar to splitting drive pulley 906 described above. The pulley 691 is coupled to idler pulley 906B by any suitable transmission such as segmented transmission loop 710A which is substantially similar to the segmented transmission loops described above. In this aspect, the idler pulley 906B is rotatably mounted about the shoulder axis of rotation SAX but in other aspects the idler pulley can be mounted within the upper arm 110UA at any suitable location. The idler pulley 906B is coupled to idler pulley 602I in any suitable manner such as with segmented transmission loop 700B which is substantially similar to the segmented transmission loops described above. The idler pulley 602I is rotatably mounted within the upper arm 110UA about the elbow axis of rotation EX1 is coupled to end effector drive pulley 602D so as to rotate about the elbow axis EX as a unit with end effector drive pulley 602D. The end effector drive pulley 602D is coupled to end effector idler pulley 605 by any suitable transmission such as segmented transmission loop 661 which is substantially similar to the segmented transmission loops described above. The end effector idler pulley 605 is rotatably mounted about the wrist axis WX1 and is coupled to end effector 110EB so as to rotate as a unit with the end effector 110EB about the wrist axis WX1.
As may be realized the rotation of shaft 250A in a first direction causes end effectors 110EA, 120EA to rotate in the first direction. The rotation of shaft 250A also causes the end effectors 110EB, 120EB to rotate in the opposite second direction (e.g. opposite the first direction) due to, for example, their connection to the drive shaft 250A through the reverse transmission formed in part by pulleys 690, 691 and segmented transmission loops 710R, 710A. As such, the end effectors 110EA, 110EB, 120EA, 120EB are coupled to a common drive shaft 250A for causing opposite rotation of the end effectors of each arm for effecting the fast swapping of substrates.
Referring again to
As may be realized the pulley and transmission configuration shown and described for transport apparatus 110A are merely exemplary and that other configurations may exist that allow the fast swap of the end effectors in a manner substantially similar manner to that described herein.
The end effectors 110EA, 110EB, 120EA, 120EB may be oriented on the respective forearm links 110F, 120F so that an angle θ between the end effectors is substantially the same as the angle between the substrate holding locations (e.g. process modules 11010, 11011 and load locks 11012, 11013) as shown in
In the aspects of the disclosed embodiment described herein, the transport apparatus 100, 100A is provided in any suitable atmospheric or vacuum transfer chamber (
Referring again to
In operation, the SCARA arms 110, 120 may be aligned so that an axis of extension and retraction 400R of end effector 110E is aligned with process module PM2 and an axis of extension and retraction 400R of end effector 120E is aligned with process module PM1. In one aspect, SCARA arm 110 may be rotated relative to SCARA arm 120 so that the end effector 110E is aligned with one of process modules PM2-PM4 where at least the limited pulley segment drive 108L is actuated to rotate pulley segment 606A relative to pulley segment 606B by a predetermined amount so that the location of band anchor points 770, 771, 772, 772 of each segmented transmission loop 700, 710 change relative to one another about shoulder axis SAX (as can be seen in
Referring to
Referring to
For exemplary purposes only, referring to elbow pulley 603, wrist pulley 604 and segmented transmission loop 660 of forearm 110F and
R1=Pr+Bth/2 [1]
and the effective elbow pulley radius R2 is
R2=Pe+Bth/2 [2]
where Pr an a Pe are the radius of the wrist pulley 604 and elbow pulley respectively, and Bth is the thickness of the band segment 660A, 660B of the segmented transmission loop 660 noting that
AC=pulley center to center distance
BC=free length of the band 660A, 660B segment
Given equations [1]-[7] the band wrap around the wrist LW can be calculated as
The band warp around the elbow Le can be calculated as
And the total band segment length Lband can be calculated as
Lband=Lw+Le+BC [12]
The formula for thermal expansion in one dimension can be written as
Lfinal=Linitial*Y*(tinitial−tfinal) [13]
Where L is the length of material, y is the material specific coefficient of thermal expansion and t is temperature. Based on equations [13] and [12], the initial and final band lengths for any given temperature change can be determined. For arms 110, 120 where the upper arm 110U, 120U and forearm 110F, 120F material has a different coefficient of thermal expansion than the materials of the pulley(s) or band(s) located therein, there will be a mismatch in the growth rate between the arm length and the band lengths. Referring to
The effective tensioner pulley radius R3 is
R3=Tr+Bth/2 [14]
AE=wrist to elbow pulley center to center distance
AC=wrist to tensioner center to center distance
CE=tensioner to elbow center to center distance
BC=free length of band from the wrist to the tensioner
CD=free length of band from the tensioner to the elbow
AF=distance along AE to the tensioner
CF=distance from wrist-elbow axes to the tensioner
where
AE=AC+CE [14]
AB=R1−R3 [15]
DE=R3−R1 [16]
AC2=AF2+CF2 [17]
AC2=AB2+BC2 [18]
CE2=CF2+FE2 [19]
CE2=CD2+DE2 [20]
BC=√{square root over (AC2−(R1−R3)2)} [21]
CD=√{square root over (CE2−(R3−R2)2)} [22]
The band wrap around the wrist Lw can be calculated as
The band wrap around the elbow Le can be calculated as
The band wrap around the tensioner L1 can be calculated as
Where the total band segment length is
Lband=Lw+L1+Le+BC+DE [26]
In one aspect, the material of the tensioner frame 1605 and the at least two tensioner pulleys 1601, 1602 of the passive band tensioner 1600 are based on the above equations [1]-[26] so that at least the material of one or more of the tensioner bar 1605 and the at least two tensioner pulleys 1601, 1602 have different rates of thermal expansion than the forearm 110F and pulleys 603, 604 to compensate for the thermal expansion of the forearm 110F, pulleys 603, 604 and band segments 660A, 660B where a constant tension of the band segments 660A, 66GB is maintained. In other aspects, the geometry of the tensioner bar 1605 and pulleys 1601, 1602 located thereon may also compensate for the thermal expansion of the forearm 110F, pulleys 603, 604 and band segments 660A, 660B and at least in part effect maintaining the constant tension of the band segments 660A, 660B.
In another aspect, referring to
AE=the wrist to elbow pulley center to center distance
AC=the wrist to tensioner center to center distance
CE=the tensioner to elbow center to center distance
BC=the free length of the band segment from the wrist to the tensioner
DE=the free length of the band segment from the tensioner to the elbow
Where R1, R2 and R3 are as noted above in equations [1], [2] and [14], and
AE=AC+CE [27]
AB=R1−R3 [28]
CD=R3−R2 [29]
AC2=AB2+BC2 [30]
CE2=CD2+DE2 [31]
BC=√{square root over (AC2−(R1−R3)2)} [32]
DE=√{square root over (CE2−(R3−R2)2)} [33]
As noted above, the material of one or more of the tensioner frame 1705F and the pulleys 1701 of the passive band tensioner 1700 have different rates of thermal expansion than one or more of the forearm 110F, pulleys 603, 604 and band segments 660A, 660B to compensate for the thermal expansion of the forearm 110F, pulleys 603, 604 and band segments 660A, 660B where a constant tension of the band segments 660A, 660B is maintained. In other aspects, the geometry of the tensioner frame 1705F and pulley 1701 located thereon may also compensate for the thermal expansion of the forearm 110F, pulleys 603, 604 and band segments 660A, 660B and at least in part effect maintaining the constant tension of the band segments 660A, 660B.
In one aspect, the passive band tensioners 1600, 1700 minimize a sensitivity of the band segment tension (of the band segments in the segmented transmission loops of the transport apparatus 100, 100A) with the thermal expansion of the SCARA arms 110, 120. As noted above, in one aspect, the material of one or more of the pulleys 1601, 1602, 1701 of the passive band tensioners 1600, 1700 may be selected to compensate for the thermal expansion of the SCARA arms 110, 120 where in one aspect the coefficient of thermal expansion of the pulleys 1601, 1602, 1701 may be less than the coefficient of thermal expansion of the arm links (e.g. upper arms 110U, 120U and forearms 110F, 120F and the pulleys located therein). In other aspects, the material of the frame 1605F, 1705F of the passive band tensioners 1600, 1700 may be selected (e.g. in combination with or independent of the selection of the pulley 1601, 1602, 1701 material) to compensate for the thermal expansion of the SCARA arms 110, 120 where in one aspect the coefficient of thermal expansion of the frame 1605F, 1705F may be less than the coefficient of thermal expansion of the arm links (e.g. upper arms 110U, 120U and forearms 110F, 120F and the pulleys located therein). In one aspect, the material of the frame 1605F, 1705F may be a composite or segmented material so that the coefficient of thermal expansion varies along a length of the frame 1605F, 1705F to bias the thermal expansion compensation provided by the passive band tensioner 1600, 1700 to the higher temperatures experienced at the wrist of the arms 110, 120. In still other aspects, the material for one or more of the shoulder, elbow and/or wrist pulleys 600-606 of may be chosen to compensate for the thermal expansion of the arms (in addition to or independent of the passive band tensioners 1600, 1700) so that, a constant tension is maintained in the band segments of the respective segmented transmission loops.
In accordance with one or more aspects of the disclosed embodiment a substrate processing apparatus comprises:
a frame;
a first SCARA arm connected to the frame, the first SCARA arm having an end effector and is configured to extend and retract along a first radial axis;
a second SCARA arm connected to the frame, the second SCARA arm having an end effector and is configured to extend an a retract along a second radial axis;
a drive section coupled to the first and second SCARA arms, the drive section including
a splitting drive pulley rotatably mounted to rotate, as a unit, at an axis of rotation of the drive section, which axis of rotation is shared by the first and second SCARA arms,
the splitting drive pulley being coupled to at least two idler pulleys by respective segmented transmission loops of separate band segments so that the splitting drive pulley is a common pulley splitting one degree of freedom of the drive section between at least two idler pulleys so as to commonly drive the at least two idler pulleys from the one degree of freedom of the drive section,
wherein at least one band of each respective transmission loop share a common band interface level.
In accordance with one or more aspects of the disclosed embodiment the drive pulley has two shared band interface levels.
In accordance with one or more aspects of the disclosed embodiment the drive pulley has three band interface levels, at least one of the three band interface levels being a shared band interface level.
In accordance with one or more aspects of the disclosed embodiment the drive pulley is a segmented pulley having a removable segment that includes at least one of the three band interface levels so as to remove the removable segment from the axis of rotation with corresponding ones of the segmented transmission loops attached thereto, where a mating segment of the drive pulley, that mates with the removable segment, remains on the axis of rotation with corresponding ones of the segmented transmission loops attached thereto.
In accordance with one or more aspects of the disclosed embodiment one of the at least two idler pulleys is connected to the first SCARA arm to effect extension and retraction of the first SCARA arm and another of the at least two idler pulleys is connected to the second SCARA arm to effect extension and retraction of the second SCARA arm.
In accordance with one or more aspects of the disclosed embodiment one of the at least two idler pulleys is disposed at an elbow axis of rotation of each of the first and second SCARA arms and the drive pulley is disposed at a shoulder axis of rotation of the first and second SCARA arms.
In accordance with one or more aspects of the disclosed embodiment the first and second SCARA arms are configured so as to effect independent extension and retraction of each of the first and second SCARA arms.
In accordance with one or more aspects of the disclosed embodiment an axis of extension and retraction of the first SCARA arm is angled with respect to an axis of extension and retraction of the second SCARA arm.
In accordance with one or more aspects of the disclosed embodiment an axis of extension and retraction of the first SCARA arm and an axis of extension and retraction of the second SCARA arm are stacked one above the other over a shoulder axis of rotation of the first and second SCARA arms.
In accordance with one or more aspects of the disclosed embodiment each of the separate band segments has a band anchor point on the drive pulley that defines a band engagement arc with the drive pulley so that the included angle of rotation, between the band engagement arc and a point at which the band anchor point forms a tangent between the respective band segment and the drive pulley, is about 90 degrees or less.
In accordance with one or more aspects of the disclosed embodiment the substrate processing apparatus further comprises a controller configured to rotate a degree of freedom of the drive section so as to change an angle between band anchor points.
In accordance with one or more aspects of the disclosed embodiment the drive pulley includes pulley segments that are movable relative to each other, each pulley segment having at least one band anchor point mounted thereto, the controller being configured to cause relative rotation between the pulley segments to effect the change in the angle between the band anchor points.
In accordance with one or more aspects of the disclosed embodiment a substrate processing apparatus comprises:
a frame;
a first SCARA arm connected to the frame, the first SCARA arm having an end effector and is configured to extend and retract along a first radial axis;
a second SCARA arm connected to the frame, the second SCARA arm having an end effector and is configured to extend an a retract along a second radial axis;
a drive section coupled to the first and second SCARA arms;
a splitting drive pulley coupled to the drive section and rotatably mounted to rotate, as a unit, at an axis of rotation of the drive section, which axis of rotation is shared by the first and second SCARA arms,
at first idler pulley coupled to the splitting drive pulley by a segmented first transmission loop of separate band segments extending between the first idler pulley and the splitting drive pulley; and
a second idler pulley coupled to the splitting drive pulley by a segmented second transmission loop of separate band segments extending between the second idler pulley and the splitting drive pulley so that the drive pulley is a common pulley splitting one degree of freedom of the drive section between the first and second idler pulleys so as to commonly drive the first and second idler pulleys from the one degree of freedom of the drive section;
wherein
the second idler pulley interfaces with the splitting drive pulley on band engagement arcs that are different than the band engagement arcs on which the first idler pulley interfaces with the splitting drive pulley,
and at least one band of each of the first and second transmission loops share a common band interface level.
In accordance with one or more aspects of the disclosed embodiment the drive pulley has two shared band interface levels.
In accordance with one or more aspects of the disclosed embodiment the drive pulley has three band interface levels, at least one of the three band interface levels being a shared band interface level.
In accordance with one or more aspects of the disclosed embodiment the drive pulley is a segmented pulley having a removable segment that includes at least one of the three band interface levels so as to remove the removable segment from the axis of rotation with corresponding ones of the segmented first or second transmission loops attached thereto, where a mating segment of the drive pulley, that mates with the removable segment, remains on the axis of rotation with corresponding ones of the segmented first or second transmission loops attached thereto.
In accordance with one or more aspects of the disclosed embodiment the first idler pulley is connected to the first SCARA arm to effect extension and retraction of the first SCARA arm and the second idler pulley is connected to the second SCARA arm to effect extension and retraction of the second SCARA arm.
In accordance with one or more aspects of the disclosed embodiment the first idler pulleys is disposed at an elbow axis of rotation of the first SCARA arm, the second idler pulley is disposed at an elbow axis of the second SCARA arm and the drive pulley is disposed at a shoulder axis of rotation of the first and second SCARA arms.
In accordance with one or more aspects of the disclosed embodiment the first and second SCARA arms are configured so as to effect independent extension an a retraction of each of the first and second SCARA arms.
In accordance with one or more aspects of the disclosed embodiment an axis of extension and retraction of the first SCARA arm is angled with respect to an axis of extension and retraction of the second SCARA arm.
In accordance with one or more aspects of the disclosed embodiment an axis of extension and retraction of the first SCARA arm and an axis of extension an a retraction of the second SCARA arm are stacked one above the other over a shoulder axis of rotation of the first and second SCARA arms.
In accordance with one or more aspects of the disclosed embodiment each of the separate band segments has a band anchor point on the drive pulley that defines a respective band engagement arc with the drive pulley so that the included angle of rotation, between the respective band engagement arc and a point at which the band anchor point forms a tangent between the respective band segment and the drive pulley, is about 90 degrees or less.
In accordance with one or more aspects of the disclosed embodiment the substrate processing apparatus further comprises a controller configured to rotate a degree of freedom of the drive section so as to change an angle between band anchor points.
In accordance with one or more aspects of the disclosed embodiment the drive pulley includes pulley segments that are movable relative to each other, each pulley segment having at least one band anchor point mounted thereto, the controller being configured to cause relative rotation between the pulley segments to effect the change in the angle between the band anchor points.
In accordance with one or more aspects of the disclosed embodiment a method for processing substrates comprises:
providing a substrate processing apparatus having
a frame,
a first SCARA arm connected to the frame, the first SCARA arm having an end effector and is configured to extend and retract along a first radial axis,
a second SCARA arm connected to the frame, the second SCARA arm having an end effector and is configured to extend an a retract along a second radial axis, and
a drive section coupled to the first and second SCARA arms, the drive section including
a splitting drive pulley rotatably mounted to rotate, as a unit, at an axis of rotation of the drive section, which axis of rotation is shared by the first and second SCARA arms, and
the drive pulley being coupled to at least two idler pulleys by respective segmented transmission loops of separate band segments so that the drive pulley is a common pulley to the at least two idler pulleys; and
splitting one degree of freedom of the drive section between at least two idler pulleys so as to commonly drive the at least two idler pulleys from the one degree of freedom of the drive section;
wherein at least one band of each respective transmission loop share a common band interface level.
C1. In accordance with one or more aspects of the disclosed embodiment the method further comprises interfacing the separate band segments with the drive pulley at two shared band interface levels.
In accordance with one or more aspects of the disclosed embodiment the method further comprises interfacing the separate band segments with the drive pulley at three band interface levels where one of the three band interface levels is a shared band interface level.
In accordance with one or more aspects of the disclosed embodiment the method further comprises providing the drive pulley with a removable segment that includes at least one of the three band interface levels so as to remove the removable segment from the axis of rotation with corresponding ones of the segmented transmission loops attached thereto, where a mating segment of the drive pulley, that mates with the removable segment, remains on the axis of rotation with corresponding ones of the segmented transmission loops attached thereto.
In accordance with one or more aspects of the disclosed embodiment the method further comprises effecting extension and retraction of the first SCARA arm with one of the at least two idler pulleys and effecting extension and retraction of the second SCARA arm with another of the at least two idler pulleys.
In accordance with one or more aspects of the disclosed embodiment the method further comprises extending and retracting the first and second SCARA arms independently from each other.
In accordance with one or more aspects of the disclosed embodiment the method further comprises extending and retracting the first SCARA arm along an axis that is angled relative to an axis of extension and retraction of the second SCARA arm.
In accordance with one or more aspects of the disclosed embodiment the method further comprises extending and retracting the first and second SCARA arm along axes that are stacked one above the other over a shoulder axis of the first and second SCARA arm.
In accordance with one or more aspects of the disclosed embodiment the method further comprises rotating a degree of freedom of the drive section so as to change an angle between anchor points of the separate band segments on the splitting drive pulley.
In accordance with one or more aspects of the disclosed embodiment the method further comprises causing relative movement, with a controller coupled to the drive section, between pulley segments of the splitting drive pulley to effect the change in the angle between anchor points of the separate band segments on the splitting drive pulley.
It should be understood that the foregoing description is only illustrative of the aspects of the disclosed embodiment. Various alternatives and modifications can be devised by those skilled in the art without departing from the aspects of the disclosed embodiment. Accordingly, the aspects of the disclosed embodiment are intended to embrace all such alternatives, modifications and variances that fall within the scope of the appended claims. Further, the mere fact that different features are recited in mutually different dependent or independent claims does not indicate that a combination of these features cannot be advantageously used, such a combination remaining within the scope of the aspects of the invention.
This application is a non-provisional of and claims the benefit of U.S. provisional patent application No. 62/361,325, filed on Jul. 12, 2016, the disclosure of which is incorporated herein by reference in its entirety.
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Number | Date | Country | |
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20180019155 A1 | Jan 2018 | US |
Number | Date | Country | |
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62361325 | Jul 2016 | US |