| Number | Name | Date | Kind |
|---|---|---|---|
| 2787750 | Jones | Apr 1957 | |
| 3887785 | Ahlport | Jun 1975 | |
| 4374316 | Inamori | Feb 1983 | |
| 4385310 | Houston | May 1983 | |
| 4413308 | Brown | Nov 1983 | |
| 4417296 | Schelhorn | Nov 1983 |
| Entry |
|---|
| Greenhouse, Harold M., "Design of Temperature-Controlled Substrates . . .", Microelectronics, vol. 6, No. 1, Sep. 1974. |