The continuous trend in the development of electronic devices has been to minimize the sizes of the devices. While the current generation of commercial microelectronics are based on sub-micron design rules, significant research and development efforts are directed towards exploring devices on the nanoscale, with the dimensions of the devices often measured in nanometers or tens of nanometers. Besides the significant reduction of individual device size and much higher packing density compared to microscale devices, nanoscale devices may also provide new functionalities due to physical phenomena on the nanoscale that are not observed on the microscale.
For instance, electronic switching in nanoscale devices using titanium oxide as the switching material has recently been reported. The resistive switching behavior of such a device has been linked to the memristor circuit element theory originally predicted in 1971 by L. O. Chua. The discovery of the memristive behavior in the nanoscale switch has generated significant interests, and there are substantial on-going research efforts to further develop such nanoscale switches and to implement them in various applications. One of the many important potential applications is to use such a switching device as a memory unit to store digital data.
To bring a new device from the laboratory setting to commercial applications, there are often many technical challenges that have to be overcome in order to meet the performance demands of real-world applications. In the case of the nanoscale memristive switching device, one of the major technical challenges is the need to improve the long-term thermal stability of the device. Due to the small size of the switching device, the power needed to operate the device can cause significant localized heating, which can lead to device failure after a number of switching cycles. The limited cycling capability and potential premature failure is undesirable for many applications, such as digital memory, that require the switching device to be able to maintain its operation characteristics after a large number of switching cycles. Thus, improving the thermal Stability and cycling endurance is a pressing issue for the development of the nanoscale switching device.
Some embodiments of the invention are described, by way of example, with respect to the following figures:
To facilitate a better understanding of the significance of the issue addressed by the invention, the components and operation principles of the switching device 100 are described first, with reference to
Generally, the switching material may be electronically semiconducting or nominally insulating and a weak ionic conductor. Many different materials with their respective suitable dopants can be used as the switching material. Materials that exhibit suitable properties for switching include oxides, sulfides, selenides, nitrides, carbides, phosphides, arsenides, chlorides, and bromides of transition and rare earth metals. Suitable switching materials also include elemental semiconductors such as Si and Ge, and compound semiconductors such as III-V and II-VI compound semiconductors. The III-V semiconductors include, for instance, BN, BP, BSb, AlP, AlSb, GaAs, GaP, GaN, InN, InP, InAs, and InSb, and ternary and quaternary compounds. The II-VI compound semiconductors include, for instance, CdSe, CdS, CdTe, ZnSe, ZnS, ZnO, and ternary compounds. These listings of possible switching materials are not exhaustive and do not restrict the scope of the present invention.
The dopant species used to alter the electrical properties of the switching material depends on the particular type of switching material chosen, and may be cations, anions or vacancies, or impurities as electron donors or acceptors. For instance, In the case of transition metal oxides such as TiO2, the dopant species may be oxygen vacancies. For GaN, the dopant species may be nitride vacancies or sulfide ions. For compound semiconductors, the dopants may be n-type or p-type impurities.
The dopant source region 126 contains a dopant source material that functions as a source/sink of dopants that can be driven into or out of the switching material in the primary active region 124 to alter the overall resistance of the switching device 100. The dopant source material may be generally the same as the switching material but with a higher dopant concentration. For example, if the switching material is TiO2, the dopant source material may be TiO2-x, where x is a number significantly smaller than 1, such as from 0.01 to 0.1. In this case, the TiO2-x material acts as a source/sink of oxygen vacancies (V()2) that can drift into and through the TiO2 switching material in the primary active region 124.
The nanoscale switching device 100 can be switched between ON and OFF states by controlling the concentration and distribution of dopants in the primary active region 124. When a DC switching voltage from a voltage source 132 is applied across the top and bottom electrodes 120 and 110, an electrical field is created across the active region 122. This electric field, if of sufficient strength and proper polarity, may drive the dopants from the dopant source region 126 into the primary active region 124, and cause the dopants to drift through the switching material in the primary active region 124 towards the top electrode 120, thereby turning the device into an ON state.
If the polarity of the electrical field is reversed, the dopants may drift in an opposite direction across the primary active region 124 and away from the top electrode, thereby turning the device into an OFF state. In this way, the switching is reversible and may be repeated. Due to the relatively large electrical field needed to cause dopant drifting, after the switching voltage is removed, the locations of the dopants remain stable in the switching material. In other words, the switching may be non-volatile.
The state of the switching device may be read by applying a read voltage to the top and bottom electrodes 120 and 110 to sense the resistance across these two electrodes. The read voltage is typically much lower than the threshold voltage required to cause drifting of the ionic dopants between the top and bottom electrodes, so that the read operation does not alter the ON/OFF state of the switching device.
The switching behavior described above may be based on different mechanisms. In one mechanism, the reduction of resistance may be a “bulk” property of the switching material in the primary active region 124. An increase of the dopant level in the switching material causes the resistance across the switching material to fall, and this may account for the decrease of the overall resistance of the device between the top and bottom electrodes.
In another mechanism, the switching behavior may be an “interface” phenomenon. Initially, with a low dopant level in the switching material, the interface of the switching material and the top electrode 120 may behave like a Schottky barrier, with a high electronic barrier that is difficult for electrons to tunnel through. As a result, the device has a relatively high resistance. When dopants are injected into the switching material by applying a switching voltage, the dopants drift towards the top electrodes 120. The increased concentration of dopants at the electrode interface changes its electrical property from one like a Schottky harrier to one like an Ohmic contact, with a significantly reduced electronic barrier height or width. As a result, electrons can tunnel through the interface much more easily, and this may account for the significantly reduced overall resistance of the switching device. It is also possible that the resistance change is the result of a combination of both the bulk and interface mechanisms. Even though there may be different mechanisms for explaining the switching behavior, it should be noted that the present invention does not rely on or depend on any particular mechanism for validation, and the scope of the invention is not restricted by which switching mechanism is actually at work.
In the foregoing description with reference to
As mentioned above, due to its small volume and limited heat dissipation capability, the nanoscale switching device may be subject to substantial heating and temperature rise during operation. For instance, in a typical switching operation, the voltage needed to switch the device ON may be as high as 20 volts, and the current may be up to 200 microamps. This amount of power can heat the nanoscale switching device to a fairly high temperature and cause severe thermal stress to the device. Nanoscale switching devices prior to this invention had thermal stability issues and could break down after going through multiple switching cycles.
In connection with this invention, it has been discovered by the inventors that a major cause of the device failure is the heat-induced diffusion or electro-migration of the electrode material.
In accordance with an embodiment of the invention, this thermal stability issue is effectively addressed by using conductive materials that are highly thermodynamically stable to form one or more electrodes of the device. Specifically, at least one of the electrodes of the nanoscale switching device is formed of a conductive material that has a sufficiently high melting point so that the diffusion of the electrode material due to heating or electron momentum transfer is substantially reduced. The melting point of the conductive material is in some embodiments at least 1800° C., which is higher than the melting point of platinum and in other embodiments greater than 2200° C. Suitable materials for forming the electrodes include, for example, metals such as tungsten, tantalum, niobium, and molybdenum, and conductive ceramic materials such as titanium nitride, ruthenium oxide, titanium carbide, and tungsten carbide.
Whether all electrodes of the switching device need to be formed of the high-melting-point conductive material depends on the thermal dissipation characteristics of the device. For instance, in the two-terminal switching device shown in
In addition to high melting point metallic or conductive ceramic materials, some materials with relatively low melting points, such as indium tin oxide, can also he practical choices for the electrode materials. The reason is that a small amount of diffused indium or tin forms semiconducting oxide in the switching materials and such semiconducting oxide will not cause serious failure to the switching device, such as putting the device in a permanent ON state.
The thermally stable nanoscale switching device may be formed into an array for various applications.
In the foregoing description, numerous details are set forth to provide an understanding of the present invention. However, it will be understood by those skilled in the art that the present invention may be practiced without these details. While the invention has been disclosed with respect to a limited number of embodiments, those skilled in the art will appreciate numerous modifications and variations therefrom. It is intended that the appended claims cover such modifications and variations as fall within the true spirit and scope of the invention.
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/US2009/052250 | 7/30/2009 | WO | 00 | 5/24/2011 |
Number | Date | Country | |
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Parent | PCT/US2009/000518 | Jan 2009 | US |
Child | 13130837 | US |