Claims
- 1. A probe station comprising:(a) a laterally extending surface for holding a test device on said surface; (b) at least one holder for an electrical probe for contacting said test device; (c) a positioning mechanism for selectively moving said surface laterally relative to said holder; (d) an environment control enclosure substantially surrounding said surface and having a side portion; (e) said surface having a laterally extending supporting area for said test device, said surface being movable by said positioning mechanism laterally toward and away from said side portion; (f) said enclosure including relatively slidable, overlapping plates extending laterally beneath said surface, said plates being of different sizes and including apertures of different sizes, said positioning mechanism having a member extending through said apertures in said plates for selectively moving said surface laterally.
- 2. The probe station of claim 1, wherein said enclosure has an upper portion extending substantially laterally over said surface, and said side portion has a top which is substantially immovable laterally relative to said upper portion.
- 3. The probe station of claim 1, wherein said positioning mechanism includes a motor assembly beneath said plates for moving said member laterally.
- 4. The probe station of claim 1, wherein said enclosure has an opening for providing access to said surface for substituting different test devices on said surface, and a door for selectively closing said opening.
- 5. The probe station of claim 1, said enclosure substantially shielding said surface against electromagnetic interference.
- 6. The probe station of claim 1, said enclosure substantially shielding said surface against light.
- 7. The probe station of claim 1, said enclosure limiting fluid communication between the interior and exterior of said enclosure.
Parent Case Info
This application is a continuation of U.S. patent application Ser. No. 08/641,029, filed Apr. 29, 1996, now U.S. Pat. No. 5,604,444, which in turn is a continuation of U.S. patent application Ser. No. 08/417,982, filed Apr. 6, 1995, now U.S. Pat. No. 5,532,609, which in turn is a divisional of U.S. patent application Ser. No. 08/245,581, filed May 18, 1994, now U.S. Pat. No. 5,434,512, which in turn is a divisional of U.S. patent application Ser. No. 07/896,853, filed Jun. 11, 1992, now U.S. Pat. No. 5,345,170.
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DE |
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Entry |
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Continuations (2)
|
Number |
Date |
Country |
Parent |
08/641029 |
Apr 1996 |
US |
Child |
08/790969 |
|
US |
Parent |
08/417982 |
Apr 1995 |
US |
Child |
08/641029 |
|
US |