Claims
- 1. A probe station comprising:
- (a) a chuck assembly for holding a test device;
- (b) a holder for an electrical probe for contacting the test device;
- (c) a positioning mechanism for selectively moving at least one of said chuck assembly and said holder toward or away from the other along an axis of approach;
- (d) said chuck assembly comprising at least separate first, second and third chuck assembly elements electrically insulated from one another and positioned at progressively greater distances from said holder along said axis of approach, each of said chuck assembly elements further including at least one surface area facing toward a surface area of another one of said chuck assembly elements, said chuck assembly further including dielectric spacers located between the respective surface areas of the respective chuck assembly elements, said spacers extending over only portions of said surface areas so as to leave air gaps between other portions of said surface areas.
- 2. The probe station of claim 1, further including threaded fasteners extending through said spacers between the respective surface areas of said chuck assembly elements, and respective insulators for electrically insulating said fasteners from at least one of said surface areas.
Parent Case Info
This is a divisional of application Ser. No. 07/896,853 filed on Jun. 11, 1992, now U.S. Pat. No. 5,345,170.
US Referenced Citations (5)
Divisions (1)
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Number |
Date |
Country |
Parent |
896853 |
Jun 1992 |
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