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Michael W. Halpin

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  • Scottsdale, AZ, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Process feed management for semiconductor substrate processing
    • Patent number 10,832,903
    • Issue date Nov 10, 2020
    • ASM IP Holding B.V.
    • Fred Pettinger
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas supply manifold and method of supplying gases to chamber using...
    • Patent number 10,683,571
    • Issue date Jun 16, 2020
    • ASM IP Holding B.V.
    • Lucian C. Jdira
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Pulsed valve manifold for atomic layer deposition
    • Patent number 10,370,761
    • Issue date Aug 6, 2019
    • ASM America, Inc.
    • Todd Dunn
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Pulsed valve manifold for atomic layer deposition
    • Patent number 10,266,946
    • Issue date Apr 23, 2019
    • ASM America, Inc.
    • Todd Dunn
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process feed management for semiconductor substrate processing
    • Patent number 9,892,908
    • Issue date Feb 13, 2018
    • ASM America, Inc.
    • Fred Pettinger
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Pulsed valve manifold for atomic layer deposition
    • Patent number 9,574,268
    • Issue date Feb 21, 2017
    • ASM America, Inc.
    • Todd Dunn
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Chamber sealing member
    • Patent number 9,340,874
    • Issue date May 17, 2016
    • ASM IP Holding B.V.
    • Michael Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Susceptor heater and method of heating a substrate
    • Patent number 9,299,595
    • Issue date Mar 29, 2016
    • ASM IP Holding B.V.
    • Todd Dunn
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Grant

    Susceptor heater shim
    • Patent number 9,202,727
    • Issue date Dec 1, 2015
    • ASM IP Holding
    • Todd Dunn
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Grant

    Radiation shielding for a substrate holder
    • Patent number 9,167,625
    • Issue date Oct 20, 2015
    • ASM IP Holding B.V.
    • Eric Shero
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Process feed management for semiconductor substrate processing
    • Patent number 9,017,481
    • Issue date Apr 28, 2015
    • ASM America, Inc.
    • Fred Pettinger
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Chamber sealing member
    • Patent number 9,005,539
    • Issue date Apr 14, 2015
    • ASM IP Holding B.V.
    • Michael Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Susceptor heater and method of heating a substrate
    • Patent number 8,933,375
    • Issue date Jan 13, 2015
    • ASM IP Holding B.V.
    • Todd Dunn
    • F28 - HEAT EXCHANGE IN GENERAL
  • Information Patent Grant

    Vacuum flange ring
    • Patent number D698904
    • Issue date Feb 4, 2014
    • ASM IP Holding B.V.
    • Robert Brennan Milligan
    • D23 - Environmental heating and cooling
  • Information Patent Grant

    Thermocouple
    • Patent number 8,616,765
    • Issue date Dec 31, 2013
    • ASM America, Inc.
    • Buz Darabnia
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thermocouple
    • Patent number 8,262,287
    • Issue date Sep 11, 2012
    • ASM America, Inc.
    • Buz Darabnia
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support system for reduced autodoping and backside deposi...
    • Patent number 8,088,225
    • Issue date Jan 3, 2012
    • ASM America, Inc.
    • Matt G. Goodman
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Thermocouple
    • Patent number 7,874,726
    • Issue date Jan 25, 2011
    • ASM America, Inc.
    • Loren Jacobs
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Wafer support system
    • Patent number 7,655,093
    • Issue date Feb 2, 2010
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support system for reduced autodoping and backside deposi...
    • Patent number 7,648,579
    • Issue date Jan 19, 2010
    • ASM America, Inc.
    • Matt G. Goodman
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer support system
    • Patent number 7,186,298
    • Issue date Mar 6, 2007
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and methods for preventing rotational slippage between a...
    • Patent number 7,169,234
    • Issue date Jan 30, 2007
    • ASM America, Inc.
    • Thomas M. Weeks
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Barrier coating for vitreous materials
    • Patent number 7,166,165
    • Issue date Jan 23, 2007
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Lamp filament design
    • Patent number 6,980,734
    • Issue date Dec 27, 2005
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Delicate product packaging system
    • Patent number 6,976,586
    • Issue date Dec 20, 2005
    • ASM America, Inc.
    • Michael W. Halpin
    • B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
  • Information Patent Grant

    Bonded structures for use in semiconductor processing environments
    • Patent number 6,929,299
    • Issue date Aug 16, 2005
    • ASM America, Inc.
    • Michael W. Halpin
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Compact process chamber for improved process uniformity
    • Patent number 6,869,485
    • Issue date Mar 22, 2005
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Lamp filament design
    • Patent number 6,856,078
    • Issue date Feb 15, 2005
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Filament support for lamp
    • Patent number 6,781,291
    • Issue date Aug 24, 2004
    • ASM America Inc.
    • Michael W. Halpin
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Wafer support system
    • Patent number 6,692,576
    • Issue date Feb 17, 2004
    • ASM America, Inc.
    • Michael W. Halpin
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents