Robert Rash

Person

West Linn, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Flow assisted dynamic seal for high-convection, continuous-rotation...
- Patent number 11,655,556
- Issue date May 23, 2023
- Lam Research Corporation
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electroplating apparatus for tailored uniformity profile
- Patent number 11,549,192
- Issue date Jan 10, 2023
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatus for flow isolation and focusing during electr...
- Patent number 11,001,934
- Issue date May 11, 2021
- Lam Research Corporation
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Integrated elastomeric lipseal and cup bottom for reducing wafer st...
- Patent number 10,982,346
- Issue date Apr 20, 2021
- Lam Research Corporation
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
One-piece anode for tuning electroplating at an edge of a substrate
- Patent number 10,975,489
- Issue date Apr 13, 2021
- Lam Research Corporation
- James Isaac Fortner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
High flow multi-way piston valve for deposition systems
- Patent number 10,969,036
- Issue date Apr 6, 2021
- Lam Research Corporation
- James Isaac Fortner
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus and method for electrodeposition of metals with the use o...
- Patent number 10,923,340
- Issue date Feb 16, 2021
- Lam Research Corporation
- Burhanuddin Kagajwala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electroplating apparatus for tailored uniformity profile
- Patent number 10,920,335
- Issue date Feb 16, 2021
- Novellus Systems, Inc.
- Steven T. Mayer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlling delivery of cross flowing and...
- Patent number 10,781,527
- Issue date Sep 22, 2020
- Lam Research Corporation
- Stephen J. Banik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for synchronized pressure regulation of separa...
- Patent number 10,760,178
- Issue date Sep 1, 2020
- Lam Research Corporation
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Enhancement of electrolyte hydrodynamics for efficient mass transfe...
- Patent number 10,662,545
- Issue date May 26, 2020
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Flow assisted dynamic seal for high-convection, continuous-rotation...
- Patent number 10,612,151
- Issue date Apr 7, 2020
- Lam Research Corporation
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatus for wetting pretreatment for through resist m...
- Patent number 10,301,738
- Issue date May 28, 2019
- Novellus Systems, Inc.
- Bryan L. Buckalew
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Bubble and foam solutions using a completely immersed air-free feed...
- Patent number 10,208,395
- Issue date Feb 19, 2019
- Lam Research Corporation
- Richard Abraham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Cross flow manifold for electroplating apparatus
- Patent number 10,190,230
- Issue date Jan 29, 2019
- Novellus Systems, Inc.
- Richard Abraham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatuses for cleaning electroplating substrate holders
- Patent number 10,092,933
- Issue date Oct 9, 2018
- Novellus Systems, Inc.
- Santosh Kumar
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Edge flow element for electroplating apparatus
- Patent number 10,094,034
- Issue date Oct 9, 2018
- Lam Research Corporation
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Automated cleaning of wafer plating assembly
- Patent number 10,087,545
- Issue date Oct 2, 2018
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Multi-contact lipseals and associated electroplating methods
- Patent number 10,066,311
- Issue date Sep 4, 2018
- Lam Research Corporation
- John Floyd Ostrowski
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Integrated elastomeric lipseal and cup bottom for reducing wafer st...
- Patent number 10,053,793
- Issue date Aug 21, 2018
- Lam Research Corporation
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electroplating apparatus for tailored uniformity profile
- Patent number 10,017,869
- Issue date Jul 10, 2018
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for electrodeposition of metals with the use o...
- Patent number 10,014,170
- Issue date Jul 3, 2018
- Lam Research Corporation
- Burhanuddin Kagajwala
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for modulating azimuthal uniformity in electro...
- Patent number 9,988,733
- Issue date Jun 5, 2018
- Lam Research Corporation
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Enhancement of electrolyte hydrodynamics for efficient mass transfe...
- Patent number 9,834,852
- Issue date Dec 5, 2017
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatus for wetting pretreatment for through resist m...
- Patent number 9,828,688
- Issue date Nov 28, 2017
- Novellus Systems, Inc.
- Bryan L. Buckalew
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Methods and apparatuses for dynamically tunable wafer-edge electrop...
- Patent number 9,752,248
- Issue date Sep 5, 2017
- Lam Research Corporation
- Burhanuddin Kagajwala
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus for wetting pretreatment for enhanced damascene metal fil...
- Patent number 9,721,800
- Issue date Aug 1, 2017
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Cross flow manifold for electroplating apparatus
- Patent number 9,624,592
- Issue date Apr 18, 2017
- Novellus Systems, Inc.
- Richard Abraham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Bubble and foam solutions using a completely immersed air-free feed...
- Patent number 9,617,652
- Issue date Apr 11, 2017
- Lam Research Corporation
- Richard Abraham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for dynamic control of plated uniformity with...
- Patent number 9,567,685
- Issue date Feb 14, 2017
- Lam Research Corporation
- Burhanuddin Kagajwala
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
CONTROL OF DISSOLVED GAS CONCENTRATION IN ELECTROPLATING BATHS
- Publication number 20240200223
- Publication date Jun 20, 2024
- LAM RESEARCH CORPORATION
- Gregory J. Kearns
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTRODEPOSITION OF METALS USING AN IONICALLY RESISTIVE IONICALLY...
- Publication number 20240141541
- Publication date May 2, 2024
- LAM RESEARCH CORPORATION
- Lee Peng Chua
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SPATIALLY AND DIMENSIONALLY NON-UNIFORM CHANNELLED PLATE FOR TAILOR...
- Publication number 20240076795
- Publication date Mar 7, 2024
- LAM RESEARCH CORPORATION
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
BLENDED CONTACT FINGERS FOR PREVENTING CRACKS DURING THIN SUBSTRATE...
- Publication number 20230175161
- Publication date Jun 8, 2023
- LAM RESEARCH CORPORATION
- Stephen J. BANIK
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
LOW ANGLE MEMBRANE FRAME FOR AN ELECTROPLATING CELL
- Publication number 20220298667
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Frederick Dean WILMOT
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE STICKING AND BREAKAGE MITIGATION
- Publication number 20220220627
- Publication date Jul 14, 2022
- LAM RESEARCH CORPORATION
- Aaron Berke
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE
- Publication number 20210148001
- Publication date May 20, 2021
- Novellus Systems, Inc.
- Steven T. Mayer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Flow Assisted Dynamic Seal for High-Convection, Continuous-Rotation...
- Publication number 20200232114
- Publication date Jul 23, 2020
- LAM RESEARCH CORPORATION
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ONE-PIECE ANODE FOR TUNING ELECTROPLATING AT AN EDGE OF A SUBSTRATE
- Publication number 20200173052
- Publication date Jun 4, 2020
- LAM RESEARCH CORPORATION
- James Isaac Fortner
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR SYNCHRONIZED PRESSURE REGULATION OF SEPARA...
- Publication number 20200017989
- Publication date Jan 16, 2020
- LAM RESEARCH CORPORATION
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
HIGH FLOW MULTI-WAY PISTON VALVE FOR DEPOSITION SYSTEMS
- Publication number 20190368630
- Publication date Dec 5, 2019
- LAM RESEARCH CORPORATION
- James Isaac Fortner
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Flow Assisted Dynamic Seal for High-Convection, Continuous-Rotation...
- Publication number 20190264347
- Publication date Aug 29, 2019
- LAM RESEARCH CORPORATION
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING DELIVERY OF CROSS FLOWING AND...
- Publication number 20190085479
- Publication date Mar 21, 2019
- LAM RESEARCH CORPORATION
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS AND APPARATUS FOR FLOW ISOLATION AND FOCUSING DURING ELECTR...
- Publication number 20190055665
- Publication date Feb 21, 2019
- LAM RESEARCH CORPORATION
- Stephen J. Banik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER ST...
- Publication number 20190040544
- Publication date Feb 7, 2019
- LAM RESEARCH CORPORATION
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
MULTI-CONTACT LIPSEALS AND ASSOCIATED ELECTROPLATING METHODS
- Publication number 20180363162
- Publication date Dec 20, 2018
- LAM RESEARCH CORPORATION
- John Floyd Ostrowski
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR MODULATING AZIMUTHAL UNIFORMITY IN ELECTRO...
- Publication number 20180312991
- Publication date Nov 1, 2018
- LAM RESEARCH CORPORATION
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE
- Publication number 20180291517
- Publication date Oct 11, 2018
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR ELECTRODEPOSITION OF METALS WITH THE USE O...
- Publication number 20180286660
- Publication date Oct 4, 2018
- LAM RESEARCH CORPORATION
- Burhanuddin Kagajwala
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING APPARATUS AND METHODS UTILIZING INDEPENDENT CONTROL...
- Publication number 20180258546
- Publication date Sep 13, 2018
- LAM RESEARCH CORPORATION
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
WIDE LIPSEAL FOR ELECTROPLATING
- Publication number 20180251907
- Publication date Sep 6, 2018
- LAM RESEARCH CORPORATION
- Kari Thorkelsson
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ENHANCEMENT OF ELECTROLYTE HYDRODYNAMICS FOR EFFICIENT MASS TRANSFE...
- Publication number 20180105949
- Publication date Apr 19, 2018
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHODS AND APPARATUS FOR WETTING PRETREATMENT FOR THROUGH RESIST M...
- Publication number 20180023209
- Publication date Jan 25, 2018
- Novellus Systems, Inc.
- Bryan L. Buckalew
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CROSS FLOW MANIFOLD FOR ELECTROPLATING APPARATUS
- Publication number 20170175286
- Publication date Jun 22, 2017
- Novellus Systems, Inc.
- Richard Abraham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
BUBBLE AND FOAM SOLUTIONS USING A COMPLETELY IMMERSED AIR-FREE FEED...
- Publication number 20170167045
- Publication date Jun 15, 2017
- LAM RESEARCH CORPORATION
- Richard Abraham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
DURABLE LOW CURE TEMPERATURE HYDROPHOBIC COATING IN ELECTROPLATING...
- Publication number 20170073832
- Publication date Mar 16, 2017
- LAM RESEARCH CORPORATION
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
EDGE FLOW ELEMENT FOR ELECTROPLATING APPARATUS
- Publication number 20170058417
- Publication date Mar 2, 2017
- LAM RESEARCH CORPORATION
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ENHANCEMENT OF ELECTROLYTE HYDRODYNAMICS FOR EFFICIENT MASS TRANSFE...
- Publication number 20170029973
- Publication date Feb 2, 2017
- Novellus Systems, Inc.
- Steven T. Mayer
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER ST...
- Publication number 20170009369
- Publication date Jan 12, 2017
- LAM RESEARCH CORPORATION
- Aaron Berke
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR MODULATING AZIMUTHAL UNIFORMITY IN ELECTRO...
- Publication number 20160362809
- Publication date Dec 15, 2016
- LAM RESEARCH CORPORATION
- Gabriel Hay Graham
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Robert Rash

Person

Patents Grantslast 30 patents

Flow assisted dynamic seal for high-convection, continuous-rotation...

Electroplating apparatus for tailored uniformity profile

Methods and apparatus for flow isolation and focusing during electr...

Integrated elastomeric lipseal and cup bottom for reducing wafer st...

One-piece anode for tuning electroplating at an edge of a substrate

High flow multi-way piston valve for deposition systems

Apparatus and method for electrodeposition of metals with the use o...

Electroplating apparatus for tailored uniformity profile

Methods and apparatus for controlling delivery of cross flowing and...

Method and apparatus for synchronized pressure regulation of separa...

Enhancement of electrolyte hydrodynamics for efficient mass transfe...

Flow assisted dynamic seal for high-convection, continuous-rotation...

Methods and apparatus for wetting pretreatment for through resist m...

Bubble and foam solutions using a completely immersed air-free feed...

Cross flow manifold for electroplating apparatus

Methods and apparatuses for cleaning electroplating substrate holders

Edge flow element for electroplating apparatus

Automated cleaning of wafer plating assembly

Multi-contact lipseals and associated electroplating methods

Integrated elastomeric lipseal and cup bottom for reducing wafer st...

Electroplating apparatus for tailored uniformity profile

Apparatus and method for electrodeposition of metals with the use o...

Apparatus and method for modulating azimuthal uniformity in electro...

Enhancement of electrolyte hydrodynamics for efficient mass transfe...

Methods and apparatus for wetting pretreatment for through resist m...

Methods and apparatuses for dynamically tunable wafer-edge electrop...

Apparatus for wetting pretreatment for enhanced damascene metal fil...

Cross flow manifold for electroplating apparatus

Bubble and foam solutions using a completely immersed air-free feed...

Apparatus and method for dynamic control of plated uniformity with...

Patents Applicationslast 30 patents

CONTROL OF DISSOLVED GAS CONCENTRATION IN ELECTROPLATING BATHS

ELECTRODEPOSITION OF METALS USING AN IONICALLY RESISTIVE IONICALLY...

SPATIALLY AND DIMENSIONALLY NON-UNIFORM CHANNELLED PLATE FOR TAILOR...

BLENDED CONTACT FINGERS FOR PREVENTING CRACKS DURING THIN SUBSTRATE...

LOW ANGLE MEMBRANE FRAME FOR AN ELECTROPLATING CELL

SUBSTRATE STICKING AND BREAKAGE MITIGATION

ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE

Flow Assisted Dynamic Seal for High-Convection, Continuous-Rotation...

ONE-PIECE ANODE FOR TUNING ELECTROPLATING AT AN EDGE OF A SUBSTRATE

METHOD AND APPARATUS FOR SYNCHRONIZED PRESSURE REGULATION OF SEPARA...

HIGH FLOW MULTI-WAY PISTON VALVE FOR DEPOSITION SYSTEMS

Flow Assisted Dynamic Seal for High-Convection, Continuous-Rotation...

METHODS AND APPARATUS FOR CONTROLLING DELIVERY OF CROSS FLOWING AND...

METHODS AND APPARATUS FOR FLOW ISOLATION AND FOCUSING DURING ELECTR...

INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER ST...

MULTI-CONTACT LIPSEALS AND ASSOCIATED ELECTROPLATING METHODS

APPARATUS AND METHOD FOR MODULATING AZIMUTHAL UNIFORMITY IN ELECTRO...

ELECTROPLATING APPARATUS FOR TAILORED UNIFORMITY PROFILE

APPARATUS AND METHOD FOR ELECTRODEPOSITION OF METALS WITH THE USE O...

ELECTROPLATING APPARATUS AND METHODS UTILIZING INDEPENDENT CONTROL...

WIDE LIPSEAL FOR ELECTROPLATING

ENHANCEMENT OF ELECTROLYTE HYDRODYNAMICS FOR EFFICIENT MASS TRANSFE...

METHODS AND APPARATUS FOR WETTING PRETREATMENT FOR THROUGH RESIST M...

CROSS FLOW MANIFOLD FOR ELECTROPLATING APPARATUS

BUBBLE AND FOAM SOLUTIONS USING A COMPLETELY IMMERSED AIR-FREE FEED...

DURABLE LOW CURE TEMPERATURE HYDROPHOBIC COATING IN ELECTROPLATING...

EDGE FLOW ELEMENT FOR ELECTROPLATING APPARATUS

ENHANCEMENT OF ELECTROLYTE HYDRODYNAMICS FOR EFFICIENT MASS TRANSFE...

INTEGRATED ELASTOMERIC LIPSEAL AND CUP BOTTOM FOR REDUCING WAFER ST...

APPARATUS AND METHOD FOR MODULATING AZIMUTHAL UNIFORMITY IN ELECTRO...